24

52 128 200 300 42 54 92 128 178 100 M12 x 1.75 24 28 100 17.5 32.5 89 64 210 90 236 188 210 166 48 72 148 220 320 35 47 85 121 171 124 M14 x 2.0 28 11 MGPL (Ball bushing) MGPA (High precision ball bushing) A, DB, E Dimensions MGPM (Slide bearing) A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E 50 st or less Over 50 st 200 st or less Over 200 st 50 st or less Over 50 st 200 st or less

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 Series ML1C Mechanically

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

Modular F.R.L. Unit

Recommended tightening torque Unit: Nm Connection thread Torque 1/8 1/4 3/8 1/2 3/4 1 12 to 14 M5 7 to 9 22 to 24 28 to 30 28 to 30 36 to 38 After tightening by hand, tighten further approximately 1/6 turn using a tightening tool. Adjustment Warning 1. Regulator and filter regulator 1. Set the regulator while verifying the displayed values of the inlet and outlet pressure gauges.

IDX-OM-W038

N.C 3 N.O 1 2 7 6 5 4 N.O PE L N TB PLC GFCI ILS M C TC M C PLC THS M C OLR PTC CM PLC PTC C01 CM IDH6-10 TC IDH6 / IDHA6 TS M C F H SSR FM PRS P FM 1 IDH6/IDHA6 IDH6 / IDHA6 IDH6/IDHA6 IDH6 / IDHA6 CM FM OLR PRS ILS PTC PTC() MC THS TB TC TS SSR H F GFCI PLC 64 IDH Series IDX-OM-W038 . 6.4 6.3 IDH6 / IDHA6 1 65 IDH Series 6.4 IDX-OM-W038 7 7 7-1 / IDH Series 7-17-

Air Cylinder

I-04A I-05A I-08A I-10A 40 +0.070 0 +0.070 0 +0.070 0 +0.084 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 NT-04 NT-05 NT-08 NT-10 40 69 74 91 22 27 37 37 24 28 36 40 55 60 71 83 M14 x 1.5 15.5 15.5 22.5 24.5 20 20 26 28 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 8 22 27 32 41 25.4 31.2 37.0 47.3 21 26 31 39 12 12 18 20 16 16 28 30 50, 63 50, 63 M18 x 1.5 11 13 16 80 80 M22 x 1.5 100 100 105 M26 x 1.5 11

Electric Actuators

Dimensions [mm] Model L1 L2 L3 A B C D E F G J 127.1 LEPS6m-25m 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6m-50m 156.6 169.6 13 22 45 30 52 22 52 60 107.4 18 Series LEPS Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1 Motor cable length 300

Digital Flow Switch (Integrated display type)

49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -84No.PF-OMM0005-N PF3W721 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31 52

Air Suction Filter

Model Symbol Port size A B ZFA100 1/8 18 ZFA200 1/4 20 28 -8- 2) Manifold Model Symbol Port size A B ZFA100 1/8 19 18 ZFA200 1/4 24 28 Model Symbol Single unit Note) Number of manifold stations 2 3 4 5 6 7 8 9 10 L1 38 56 74 92 110 128 146 164 182 200 ZFA100 L2 50 68 86 104 122 140 158 176 194 212 L1 48 76 104 132 160 188 216 244 272 300 ZFA200 L2 60 88 116 144 172 200 228 256 284 312 Note

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Spacer Bolt Top cover Top Cover Mounting Bolt Tightening Torque Bore size Tightening torque 25, 32 0.46 to 0.60 lbfft [0.63 to 0.82 Nm] 2 CKZT -X2797 -X2798 Dimensions CKZT S-X2797 Clamp arm (Refer to page 5 for details.) 16 93 52 53 40 10 34 13 250.1 34 3 170.05 44 A 50.1 180.1 28 +0.1 0 C B Proximity switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size

Air Suction Filter With One-touch Fittings

differential pressure 20kPa Applicable tubing material Nylon/Soft Nylon/Polyurethane Note) Alcohol, acetone, etc. also cause damage, so be sure for the product not to be close to them 2-3 Dimensions Size Model A B C D E F G H I J K L M N ZFB100-04 53 4 ZFB100-06 54 6 ZFB200-06 6 ZFB200-08 8 ZFB300-08 69.5 8 ZFB300-10 70 10 48 26 22.5 12.5 24 17.5 15 50 15.5 14.4 12.8 8.5 Metric size 52 28

Pressure Relief 3 Port Valve with Locking Holes

Dimensions Padlock mounting position (Port size) (Port size) Standard specifications Model P1 P2 A B C D E F G H VHS20 1/8, 1/4 1/8 71.5 23 40 37 28 42 17.5 40 VHS30 1/4, 3/8 1/4 87 32 53 49 38 53 20 53 VHS40 1/4, 3/8, 1/2 3/8 111 42.3 70 63 52 71 29 70 1 0 - Revision history Rev. A Safety Instructions (Piping) corrected.

-- NCM seies

Pfrt"d Series NCM Front Nose Mutntinu: NCMB (inch) bola(hrah) lrd\4 lri( 4 g D K N Ilc NE NN w ZB o75 l%l 0.250 y4-28 0.50 o.624 0.86 0.75 0.62 o.12 %4a 0.50 0.95 2.97 tesd [-?

EXxx-OMN0037CN

No.EX-OMN0037CN-A / EX600-AXA EX600-AYA EX600-AMB SMC 3 9 10 12 12 14 15 15 16 16 LED 18 19 19 24 25 25 26 26 LED 27 28 28 32 33 33 34 34 LED 36 37 37 44 -1No.EX-OMN0037CN-A 45 46 46 46 46 46 47 -2No.EX-OMN0037CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

IZE11.eng

Bracket (Model: ZS-28-B) Perform zero adjustment again after removing any charge from the sensor. Zero adjust Error M3x5 L 4. Press the button to finish the setting. Then [P_2] is displayed. Set as above. Mounting with panel mount adapter Fix the panel mount adapter to the product with the mounting screws (nominal size: 3 x 8 L, 2 pcs.) supplied.

AS-FPQ/AS-FPG

ASS ASR ASF Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Use the collision speed when calculating dynamic moment. 12 28 41 MXP16 26 Symbol Unit Definition Definition Symbol Symbol Unit mm An (n = 1 to 3) V Collision speed mm/s Correction values of moment center position distance J E Va Average speed Kinetic energy mm/s J Emax W Load weight Allowable kinetic energy kg mm Ln (n = 1 to 3) Wa Allowable load weight Overhang kg Nm M (Mp, My, Mr) We

Digital Flow Switch (Integrated display type)

NPN (1 output) + Analogue (1 to 5 V) type PF2A7--28--X560 PNP (1 output) + Analogue (1 to 5 V) type PF2A7--68--X560 NPN (1 output) + Analogue (4 to 20 mA) type PF2A7--29--X560 PNP (1 output) + Analogue (4 to 20 mA) type PF2A7--69--X560 Max. 30 V, 80 mA Internal voltage drop: 1 V or less 28: Analogue output: 1 to 5 V Max. 80 mA Internal voltage drop: 1.5 V or less 68: Analogue output: 1 to

FILTER REGULATOR

1/8 M42X1.5 M42X1.5 38.4 38.4 AW40-B 70 147.1 91.7 37.3 80 37.3 1.5 28 42.5 75.7 42.5 1/43/81/2 1/8 AW40-06-B 75 149.1 93.2 37.3 80 37.3 1.2 28 42.5 75.7 42.5 3/4 1/8 44.3 AW60-B 95 234.1 175.5 47.5 30 47.5 3.2 28 42.5 80.8 42.5 1 1/8 Optional Bracket mount dimensions Panel mount dimensions Model Q S T U AW20-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AW30-B 41 40 45.8 6.5 8 53 2.3