ZSE3/ISE3 .-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSE3 Vacuum Q CE marked products Note) Only available with output specifications 21 and 23.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part lists y Description No.
Construction 3 1 Component Parts Description Material No. q w e r t y u 4 Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Resin Stainless Steel Stainless Steel Stainless Steel NBR NBR, Resin 2 5 6 7 4.3-5 Series VQ20/30 Dimensions/Series VQ20 In-line style/Grommet(G) VQ21A1-mGm-m Dotted line: Bracket mounting style (-F) 4.3-6 Series VQ20/30 For Dry Air,
Case Replacement Parts q Gasket for cover case AL-204H AL-205H ZFA100 Part no. ZFA200 No. Description Selection Warning 1.
Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.
Material Surface treatment Description NBR, Silicone rubber, Urethane rubber, Fluoro rubber, EPR ZM Pad q Adapter plate Aluminum w e ZH Piston rod r Stainless steel Spring Carbon steel Hard chrome plated ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t Aluminum
Connection G(PR 1/2 F04 o O: Standard specifications O: Combination possible Blank: Combination not possible Modular Connection Part Numbers muxm : Air filter NAF3OOO NAF4OOO Mist separator NAFM3OOO NAFM4OOO L-bracket B31OL 841 OL T-bracket B31OT B41OT Spacer Y30 Y40 Spacer with L-bracket Y3OL Y4OL Soacer with T-bracket Y3OT Y4OT o c o F to G E Modular and Products Combinations tTr/ffiI rIVffi Q)
OTo reuse the lubing, cut off the previously lodged portion of lhe lubeOThen pull it back gently to make sure that il has a positive seal. o Rectangular Multi-Connector Series KDI/t Dimensions ..) q E a 6 L 7 4 1 . = z a 3i' -l _*r>'L ;l ann , l:i Panel mount cutout 5/32" l4mm) KDM20 .9 g 7.64" (194) | Panel mount cutout 3-hexagonal screws 5/32" l4mm) Rectangular Multi-Connector Series KDM
Operation tinre @ntinuous (ShourVday) =1.Syears Clean Air for Clean Room Seruice Clean roorn Comgessed ait C Supa Mist Seoarator q/silem B/Blcrrviq air b partsdebning ODerry pcint: -58'F or less (Atnospheric p(essure), OEfficiency: Less than 100 particles 0.3 microns ol1 larger per cubic foot.
Part No. cD-P11 cD,p12 Load voltage 100 vAC ziovac 24VDC 2smA 12.5mA 5omA Inch Contacl Proleqtion gox/Dimensions 0.80 1_20 1.40 ot7,.., 15 iffiqffi Hou To MountThe Auto Stoitch fllL_ #F*t-q -s-ffi*""*"-'" *-jil-|--.e*',**" @712 OTo set swikh posili,m, loGen tfie scre$/ and rno f|e sviitcfr to fie desircd po6itbn. f ighten tre soewtotre recommended brque (0.9" 1.1 lb indr). o Series NCDJP
1.06 V4-16 0.88 i1.62 o.78 5.12 15O (1%l o.437 '14-20 0.75 o.749 0.34 1.56 o.25 0.63 1.25 o.aa 1.50 0.91 4.50 Series NCM Rear Piuot NCMC o Series NCMW Parts Lid kit:at ivl#tat ns|}gks ) Fhd co\,t Aluminum alloy Vvhite alumite ) q&d.tib Stainless steel Pirao.l Aluminum all,oy Chrqnate a Pistfr!
Contact Drotection bg)dlnternal circuit cD.P11 Oul Blue (black) (+)oLn Browll (rcd) C)Out Blue (brack) Solid State Wiring Method 3 vi irc q'51rn U/hen potte| solrce lor siu bh and load s commom) --19toul_Jn.a1 .
(l) 3 Vertical movement '1 .9+lo 13.23 o".2.55 l"+3 a 5.25 l"+35 a.17.5 44.O 3.4+l; aa.2 _ 4.2+la lo: D$tance iiom mounling sudace to cenler ,q'60 lo+6.0 cr.105 lo+7[ o:Drslance I'on moJnLnq sLnace Io load s co.1er ol . Nore) Priicipally, itbe@ms imposible 10 operal.
Be sure to loosen the locknut before adjusting the knob by hand. r After adjustment, tighten lock screw for tamper proof operation, Fluid-Air/Supply 1 05psig (7 kgt / cm2l NSR 1110 to-32^lrn {l',151 NSR 3110 NSR 4110 %tlPf 75 75 g q 6 0 il IJ I 6 a 60 d 5 F "ff 45 * 3 0 d 30 1 5 0 o o 7 1 4 2 1 2 A 3 FWSSM P r e ssur e C -lwr a ct eri st i e s Supply pressure 1OOpsig (7kgt/cm2l, Secondary
B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t
single Solenoid 2 position / double solenoid 3 position, closed center / double solenoid 3 position, exhaust center / double solenoid 3 position, pressure center / double solenoid t Special order Body optlon 0 _lndividual exhaust for the pilot x and fiain valve 3 _Common exhaust for main valve and pilot valve t Special o.der Vonage 1r-100vAc 5qeHz 2*-200VAC "q.Hz 3-1.1OVAC'eoHz 4-22OVAC q-Hz
X16 Liquid contact seals SF7000 (Perfluoropolyether rubber) 1 3 01 X16 PB101 A Actuation Symbol 3 Actuation Air operated X16 Made to Order Liquid contact seals SF7000 Thread type Option Symbol Type Rc NPT G Symbol Nil B Option None With foot Nil N F q e Seal material of the liquid contact parts is changed to SF7000 (Perfluoropolyether rubber).
1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q
Information that can be copied includes the following: q Pressure set values, w Range settings, e Display Units, r Output modes, t Response times. 5% R.D. Displayed pressure value When CH1 is copied to CH2, CH3, and CH4, information of OUT1 in CH1 will be copied. When CH2, CH3, or CH4 is copied to CH1, information of OUT1 in CH2, CH3, or CH4 will be copied only to OUT1 in CH1.