VSA4

position exhaust center 1 2 3 4 Option 2 Body size standard 1 4 Pilot Nil Body side 1 Base side (Without sub-plate) Option Piping Option 3 position exhaust center Port size 0 Sub-plate side ported 1 Sub-plate bottom ported Nil None PA Non-locking manual override 00 Without sub-plate 4 Without sub-plate (For manifold) Option Caution 01 1 8 Rc 1 4 Rc Rc 02 03 3 8 Refer to pages 5-11-2 to 6

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, DIN (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, DIN, VALVE

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, DIN (DC

Air Suction Filter Series ZFA 1

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc. ZFA200 Both left and right brackets.

NVEPA|VEFseies

(See tigure 6) Delay Adjustment Feedback Signal DETECTAMP GAIN (Built-in teedback circuit type-VEAl 31 252 onv This control is usd to change the amplitcation of he sensor signal. When the DetectAMP. GAIN adjuslment knob is turned cloclevise (to the right) the amplification will increase. (See ligure S3) Fig. 6-3 16 PRE$SURE CONIROL OF DIE CUSHION Fo|Fr Contrcl Arnplifl. Cl.cui!

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Pipe thread type Name plate in imperial units Pressure gauge in imperial units Sales Note 6) G EA, EB, EC, ED Nil Rc MPa MPa Fixed SI unit Japan, Overseas NPT G Rc Only overseas NPT psi psi With unit conversion function (Initial value psi) G Z Note 4) Note 4) For pipe thread type: NPT Note 5) For options: EA, EB, EC, ED Note 6) According to the new Measurement Law, only the SI unit type is

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression

C76

to 6-10-46.

Nozzle Type Ionizer IZN10E Series ®

Port size (One-touch tting) Symbol Type 06 6: Metric size One-touch fitting 07 6.35 (1/4"): Inch size Made to Order (For details, refer to page 21.) 16 6: Metric size (Elbow) Symbol Specications -X367 Nozzle with right angles One-touch fitting 17 6.35 (1/4"): Inch size (Elbow) Nozzle, Fitting Cautions when using the IZN10E-11mmm-m female threads for piping Emitter For the female thread (

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Contact: 1a) 8 06 3/4 Note) Terminal box for 24 VDC is available for 5, 6 (LED light).

2-Layer Soft Fluoropolymer Tubing Series TQ

2-Layer Soft Fluoropolymer Tubing Series TQ RoHS Specifications TQ0604 6 4 # # TQ0806 8 6 # # Translucent (Material color) Air, Water, Inert gas, Solvent TQ1008 10 8 # # TQ1209 12 9 # # Designation TQ0425 4 2.5 # # O.D. (mm) I.D.

Pressure Switch/Reed Switch Type

0 Adjusting screw 5 Brass Hexagon nut 6 Brass !1 Indicator 7 PBT Spring 8 Stainless steel !2 q Magnet 9 Piston 10 POM Seal piston 11 NBR 1/8 15 23 Scale plate 12 PC Wiring Warning Mounting Warning Pressure Source Warning 1. 1. 1. Connect load before connecting with power source. The switch will break instantly if no load is connected. Make the wiring length as short as possible.

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, DIN (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, IP65 (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, VALVE, BODY PORTED (DC), VALVE,

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, VALVE, BODY PORTED, DIN (DC), VALVE