: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)

R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)

R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)

R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)

R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)

R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)

: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)

: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)

), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1T (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: Instantaneous Flow: L/min, Temperature

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1T (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: F (G), Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1T (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature:

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1T (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature:

This series is mainly used in combination with the series ITV0000 w/o a display function.Mainly used w/ITV0000 w/o display function, Converts digital input signal into analog output signal, 10 bit parallel input signal (max), ITV CONTROLLER, 4-CHANNEL, INSTRUMENTATION, IT/ITV0000/1000 E/P REGULATOR, 2X, IT1000 NO SIZE(MISC.

This series is mainly used in combination with the series ITV0000 w/o a display function.Mainly used w/ITV0000 w/o display function, Converts digital input signal into analog output signal, 10 bit parallel input signal (max), ITV CONTROLLER, 4-CHANNEL, INSTRUMENTATION, IT/ITV0000/1000 E/P REGULATOR, 2X, IT1000 NO SIZE(MISC.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

XLA XL XLQ XLQ y Body surface treatment/Seal material and its changed part Bodysurfacetreatment Part numbers indicating changed seal material and leakage XM XY Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Symbol Nil A Note 2) Leakage Pam3/s or less Note 1) Changed part None w, e w e Symbol External 1.3 x 10-10 (FKM

Pressure Switch/Reed Switch Type

(The SI unit type is provided for use in Japan.) + Voltage AC/DC 48 V 100 V Nil S None With seal w w Seal 50 mA 40 mA 20 mA Max. operating current and range Note 2) + Nil 6 Note1) Set pressure range 0.1 to 0.4 MPa 0.1 to 0.6 MPa a Semi-standard + Nil L Z 0.5 m 3 m 5 m Lead wire length q e b Series IS10 + Scale plate pressure unit MPa Both MPa and psi Nil P Note2) c CAT.ES60-19A

AC20-A to AC40-A

Example)AC30-F03DM-KSTV-13NR-A q r t y w e q Symbol Bodysize Description 20 25 30 40 Rc NPT G Nil N F Threadtype w + 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 Portsize e + Floattype autodrain a Withoutautodrain N.C.(Normalclose)Drainportisclosedwhenpressureisnotapplied. N.O.(Normalopen)Drainportisopenwhenpressureisnotapplied.

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting type T NM1 Mounting type M1 NM2 Mounting type M2 * Refer to the applicable stroke table. w Size 25 32 40 Applicable Stroke Table : Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 LEFS32

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). LECP6 LECP1 Series Capable of setting up operation without using a PC or teaching box Value input Standard controller Features Step motor (Servo/24 VDC) Compatible motor q w 14 points 64 points Max. number of step data 24 VDC Power supply voltage Refer to the operation manual for using the products.