Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

ZP

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

JXCx-OMT0023

RAV-781BYZ-2 3AC 250V 300V 783V10% 2500A 20kV 75pF 20 to 70 RAV-781BXZ-4 3AC 250V 300V 1700V10% 2500A 2kV 75pF 20 to 70 11 27 11.

Regulator

2.3 35.5 42.5 21 7 AR40-06-D 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50-D 70 75 66 11 22 113 3.2 AR60-D 70 75 66 11 22 113 3.2 The dimension of B is the length when the regulator knob is unlocked. -28- 12-2.

Lubrication Equipment

70 90 95 27 40 56 73 73 50 80 95 120 120 120 120 81.5 122 142 177 177 254 268 25 40 53 70 75 90 95 25.5 38 38 41 39 45 45 M5 X 0.8 AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 30 41 50 50 70 70 27 40 54 54 66 66 22 23 26 25 35 35 5.4 6.5 8.5 8.5 11 11 8.4 8 10.5 10.5 13 13 40 53 70 70 90 90 2.3 2.3 2.3 2.3 3.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 SAC1000, #3 SAC2000,

MGG

of guide rods ( ) 0.06 0.05 0.04 0.04 0.03 0.03 0.02 0.04 Port size Rc 1/4 Rc 3/8 Rc 1/2 Rc 1/8 Shock absorber specifications RB1007 RB1412 RB2015 RB2725 Shock absorber model MGG20 MGG25, 32 MGG40, 50, 63 MGG80, 100 Applicable guide cylinder Maximum energy absorption J 5.88 19.6 58.8 147 Stroke absorption mm 7 12 15 25 Maximum collision speed m/s 5 Maximum operating frequency cycle/min 70

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70

XL

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

Title not found

60 3.5 2.8 2.3 1.9 1.6 1.4 1.3 70 4.4 3.8 3.2 2.8 2.3 2 1.8 80 6.5 5.2 4.2 3.6 3.1 2.7 2.4 90 8.5 6.8 5.5 4.7 4 3.5 3.1 100 11.4 8.6 7 5.8 5 4.4 3.9 110 14.2 11.2 8.8 7.2 6.2 5.4 4.9 1" ID 30 0.2 0.2 0.1 0.1 0.1 0.1 0.1 40 0.3 0.3 0.2 0.2 0.2 0.2 0.2 50 0.5 0.4 0.4 0.3 0.3 0.2 0.2 60 0.8 0.6 0.5 0.5 0.4 0.4 0.3 70 1.1 0.8 0.7 0.7 0.6 0.5 0.4 80 1.5 1.2 1 0.8 0.7 0.6 0.5 90 2 1 1.3 1.1 0.9

Title not found

60 3.5 2.8 2.3 1.9 1.6 1.4 1.3 70 4.4 3.8 3.2 2.8 2.3 2 1.8 80 6.5 5.2 4.2 3.6 3.1 2.7 2.4 90 8.5 6.8 5.5 4.7 4 3.5 3.1 100 11.4 8.6 7 5.8 5 4.4 3.9 110 14.2 11.2 8.8 7.2 6.2 5.4 4.9 1" ID 30 0.2 0.2 0.1 0.1 0.1 0.1 0.1 40 0.3 0.3 0.2 0.2 0.2 0.2 0.2 50 0.5 0.4 0.4 0.3 0.3 0.2 0.2 60 0.8 0.6 0.5 0.5 0.4 0.4 0.3 70 1.1 0.8 0.7 0.7 0.6 0.5 0.4 80 1.5 1.2 1 0.8 0.7 0.6 0.5 90 2 1 1.3 1.1 0.9

5 Port Solenoid Valve Series SV1000/2000/3000/4000

SQ VFS A B C Series Model Effective area 14 mm2 16 26 AN203-KM8 51 SV1000 (For 8) VFR 26 m2 22 53.8 AN200-KM10 80.8 SV2000 (For 10) 30 mm2 25 AN300-KM10 70 97 VQ7 SV3000 SV4000 (For 12) 41 mm2 25 AN300-KM12 70 98 Plug (White) These are inserted in unused cylinder ports and P, E ports. d Cassette base type 16 Tie-rod base type 10 D A Series Manifold Model SUP block disk EXH block disk L SV1000

New

AC Specification (Built-in Full-wave Rectifier Type) Class B Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Temperature rise (C) Note 3) Model Model Apparent power (VA) Note 1) 2) VXZ23, 24 VXZ25, 26 VXZ2A, 2B VXZ2C, 2D 9.5 70 10 70 12 70 14 70 Class H Class H Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Temperature rise (C) Note 3) Model Model Apparent power (

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt M8 x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 120 l x 140 l x 160 l M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 70 75 80 85 90 95 100 105 110 120

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

Modular Type Filter Regulator Series AW

AWD20 AWD30 AWD40 173 201 239 73 86 92 52 59 75 40 57 73 45 50 70 40 53 70 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Optional specification With barb fitting With drain guide Metal bowl B 173 214 252 Metal bowl with level gauge Model B B B AWD20 AWD30 AWD40 234 272 209 247 208 246 74

High Vacuum Angle Valve, XL Series

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 127 LEJ Series AC Servo Motor Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction.

7

AC Specification (Built-in Full-wave Rectifier Type) AC Specification (Built-in Full-wave Rectifier Type) Class B Class B Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Apparent power (VA) Temperature rise (C) Model Model VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 7 60 9 60 9.5 70 10 70 12 14 70 70 Class H Class H Apparent power (VA) Note 1) 2) Temperature

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.05 0.04 0.04 0.04 0.03 0.03 0.02 0.06 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Piping port size Shock Absorber Specifications RB1007 RB1412 RB2015 RB2725 Shock absorber model MGG20 MGG25/32 MGG40/50/63 MGG80/100 Applicable guide cylinder Maximum energy absorption (J) 19.6 58.8 147 5.88 Stroke absorption (mm) 12 15 25 7 Maximum collision speed (m/s) 5 Max. operating frequency (cycle/min) 45 25 10 70

HRX-OM-S004

5.21.1 Communication function . 5-70 5.21.2 Setting/checking of communication function . 5-70 Chapter 6 Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal