XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLGR Series

(Pilot port 2 opens) The valve leaves from the body seat to open by applying pressure to the pilot port 2. (Open pilot port 1) 2. Bypass valve The valve leaves from the body seat to open up to the set value by applying pressure to the pilot port 3. The valve returns to the original position by releasing air pressure of the pilot port 3. 5-2.

Pressure Relief 3 Port Valve With Locking Holes

2 - (2) Double action type VHS4510~5510 VHS3510 VHS2510 Unit (mm) Model Standard Specifications P1 P2 A B C D E F G H I J K L M Z VHS2510 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 24 4.5 14.8 9 3.2 VHS3510 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 30 4.5 19 9 3.2 VHS4510 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 4.2 VHS4510-06 3/4 1/2 110.4 42 75 63 22 58 44

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

ZVB20_E_

Option NIL Without photoelectric sensor *1 NIL Without option S Photoelectric sensor *2 D Duct hose (3m, hose band in attached) *1: Connect a switch to the external input terminal on the back P Dust collect bag (hose band attached) side of the product. *2: This is a regression reflection type photoelectric sensor.

FGX-OM-N027

Fig. 2-1 Name and function of parts 2-1. Name and function of parts No. Name of components Part no.

Electrostatic Sensor Monitor

Panel mount adapter ZS-27-C With M3x5 L (2 pcs.) Panel mount adapter + Front protective cover ZS-27-D With M3x5 L (2 pcs.) Front protective cover ZS-27-01 -7No.SFOD-OMO0004-B Summary of Product parts Names of individual parts Output (OUT1) display (Green): Lit when OUT1 is ON. Output (OUT2) display (Red): Lit when OUT2 is ON.

IZ-OMU0031-CN

L(2) ZS-27-01 -7No.IZ*-OMU0031 LCD (OUT1)() (OUT2)() (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 ON/OFF ON/OFF -8No.IZ*-OMU0031 (2 m)ZS-28-A (1 )ZS-28-C 0.140.2mm 0.81.0 (M3X5 L(2))ZS-28-B (M3X8 L (2 ))ZS-27-C (M38 L(2))ZS-27-D ZS-27-01 -9No.IZ*-OMU0031 M3X5 L(2) 0.50.7 Nm M3X5L (ZS-28-B) M3X5L M3X8 L(2 ) M3X8L ( ZS-27-01) (ZS-27-C) 90 2 -10No.IZ*-OMU0031 ,FG 20mm () SMC 3M

SGC200-OMJ0004

4) 4) , , , , 1)-10-20 2) 1) 1) 1) 1) 50mm 2/s 2) 2) 2) 2) 3) 3) 3) 3) 4) 5), 6) 4 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 4550 Rc1 6570 , , , , 1.5~2 1) 2) 3) 2 5 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / 30 1 1) 2)1 0.1MPa

Air Catch Sensor

Tightening the fasteners by specified torque 1.2 Nm. 2.

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Body BC6 Operating lever SPCC q w e r t 0.02 Rod C3604B Adjusting gear POM Gear POM 10 20 30 40 50 60 70 Flow rate (l/min) 16-12-2 Diaphragm Style Flow Switch Series IFW5 Dimensions IFW50--00 to 04 (Without terminal box) ZSE ISE PSE Z I SE3 PS With neon light Lead wire length 500 Z I SE1 2 ZSP ISA2 IS ZSM PF2 IF 2-3/8, 1/2, 3/4 Data IFW50--10 to 24 (With terminal box) With neon light 2-3

POWER CLAMP CYLINDER

Product Specifications 2-1.

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note 2) Value for DC.

In-line Air Filter

D-G

DOC1001947

Proper tightening torque Body Lock nut width size [ Nm ] across flats Chamfer dimension D[mm] Connection M5 0.17 7 thread size (Recommended value) 1/8 0.3 9 M5 5.1 5.4 1/4 1 12 10-32UNF 5.0 5.3 3/8 1.5 14 1/2 2 17 Piping Threads with Sealant Caution (1) If the fitting is tightened with excessive (5)For R, NPT, G thread torque, a large amount of sealant will seep out.

VP(A)300/500/700 Series (PILOT VALVE : V200)

Limited warranty and Disclaimer 1.The warranty period of the product is 1 year in service or 1.5 years after the product is delivered. 2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

Related Products: Heavy Duty Auto Drain Series ADH4000

M6 x 10l (Hex. bolt) 2 pcs. BM58 Bracket set Ball valve/Rc 1/2 1 pc. Barrel nipple/R 1/2 2 pcs. Elbow/Rc 1/2 1 pc. Ball valve piping set ADH-C400 Note) The accessories (Option) are shipped unassembled, but packed in the same container.

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

/8, 1/2 70 156.2 25.5 35.5 38.4 40 35.5 HF2-BFD40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 16 Document No.AMX-OMZ0106 Revision history Rev.