Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Power amplifier with feedback circuit Control circuit Electro-pneumatic proportional valve Pressure sensor Caution VEXP3141 1. Air supply Poor quality air could increase the spools sliding resistance, while preventing it from attaining its specified characteristics.
Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reduction capability of over 30 dB. Provides a sufficient effective area. Operating Fluid Piping Caution Warning 1.
32 Stork turbine 32 Turbin oil 32 General R turbine oil 32 Fucoal turbine 32 PTFE NBR Approx. 40 ml PA3000 automatically operated type 100 million cycles 50 million cycles LVH Approx. 100 ml PA5000 automatically operated type 50 million cycles 50 million cycles Approx. 22 ml PA3000 air operated type 50 million cycles LVD Approx. 90 ml PA5000 air operated type 50 million cycles Approx. 21
Dimensions (N.O.) (44) W T R (Y) Z VC T 25 VDW IN port 2-3/8 l =280 l =300 : Thread type VQ VX2 (V) (X) 2.5 (N) VX (U) E C D G Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Q S A VX3 C B VXA L1 L2 16 VN L3 LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21
Frequency (Hz) 50 20 11 60 17 7 Model Power source AC VXR21 50 40 18 60 35 12 DC AC VXR22 50 50 21 60 45 17 DC AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C) Ambient temperature (C) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature water (2) (D) High temperature oil (2) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum
CAT.ES70-21 A Series VC Direct Operated 2 Port Solenoid Valve for Air Series VCA Multipurpose Valve for Air Direct Operated 2 Port Solenoid Valve for Air Series VCA Series VCA Improved durability (Nearly twice the life of the previous series) Operating resistance of moving parts reduced for improved longevity and wear resistance.
W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5
Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)
Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Handling Operating Environment Warning Warning 1. Absolutely never use in an atmosphere where explosive gases are used. The compact manometer does not have explosion proof construction.
Item CH2 measured value: 16-bit signed integer Bit offset 47 46 45 44 43 42 41 40 39 38 37 36 35 34 33 32 Item CH32 measured value: 16-bit signed integer Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item CH4 measured value: 16-bit signed integer Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Error diagnosis CH4 diagnosis CH3 diagnosis CH2 diagnosis CH1 diagnosis Reservation
) (mm) Width across corners I 85 103 132 FZ 93 114 138 GA 16 24 24 H 128 144.5 171.5 E 64 77 98 FT 20 25 25 FX 73 90 110 A 221 243.5 299.5 B 93 99 128 CD 20 20 25 CT 8 10 10 CZ 36 45 45 D 32 40 50 L 45 54 56 N 9 11 13 O QA 10 12.5 12.5 QB 7 8.5 10 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21
Refer to Connecting to other series on page 16-3-21.
Strand diameter [mm] 0.08 Minimum bending radius [mm] (Reference value) 21 Internal Circuit Sensor Unit Amplifier Unit D-RNK D-M9K/D-7K READY OUT1 OUT2 Vsw Brown 4: Vsw DC (+) Main circuit of switch Detective sensor Brown + Load Load Brown 12 to 24 VDC 3: SOUT2 OUT1 Sensor Main circuit of switch White Black 2: GND OUT2 GND Blue Blue White 1: SOUT1 DC () SOUT1 Black SOUT2 White Black Blue
steel Hexagon socket head cap screw (with SW) 13 13 Nut Armature assembly Brass 14 14 Rubber mount Return spring NBR Stainless steel 15 15 DIN connector type solenoid coil Tube assembly Stainless steel 16 16 Clip Nut Stainless steel Brass 17 17 DIN terminal gasket Rubber mount CR NBR 18 18 DIN connector DIN connector type solenoid coil 19 Clip Stainless steel 20 DIN terminal gasket CR 21
D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 T : Thread type 2 5.5 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 (44) W T R Z (Y) L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93 231
3 Port Solenoid Valve Rubber Seal Series SY100 Low power consumption: 0.5 W (Standard, Without indicator light) (Current draw: 21 mA at 24 VDC) V100 Body width: 10 mm Large flow type: 0.75 W (Current draw: 31 mA at 24 VDC) SY [Energy saving type [0.22 W] is available, too. For details, refer to catalog on page 4-3-15.] [Low wattage [0.45 W] is available, too.
Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Power amplifier with feedback circuit Control circuit Electro-pneumatic proportional valve Pressure sensor Caution VEXP3141 1. Air supply Poor quality air could increase the spools sliding resistance, while preventing it from attaining its specified characteristics.
) 71.6 (22) 73.4 (23) 75.2 (24) 77 (25) 78.8 (26) 80.6 (27) 82.4 (28) 84.2 (29) 86 (30) F (C) 59 (15) 60.8 (16) 62.6 (17) 64.4 (18) 66.2 (19) 68 (20) 69.8 (21) 71.6 (22) 73.4 (23) 75.2 (24) 77 (25) 78.8 (26) 80.6 (27) 82.4 (28) 84.2 (29) 86 (30) Maximum value of the outlet air set temperature Maximum value of the outlet air set temperature [Note] Select so that it does not exceed the maximum
21 IS 27 27 2 x M2.5 x 24L Mounting threads 2 x M2.5 x 24L Mounting threads ISG ZSM Grommet type: SE1-14/-15/-18/-19 01 T1 01 T1 Connector type: SE1-14C/-15C/-18C/-19C I Z I Z Hysteresis setting trimmer Pressure setting trimmer Hysteresis setting trimmer Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16C/-17C SE1-01
W (44) (Y) Z (X) (V) T R T 25 IN port 2 x 3/8 l=280 l=300 : Thread type Plug provided on U side at shipping. 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n x 1/4 H H P = J (Pitch) 2 n x 1/8 : Thread type L Dimension (mm) n (stations) Model Dimensions 2 3 4 5 6 7 8 9 10 L1 70 105 140 175 210 245 280 315 350 VV2CL2 L2 82 117 152 187 222 257