VG342

Option] How to Order Low power consumption 4.8 W DC (Standard type) 2 W DC (Energy-saving type) No lubrication required Possible to use in vacuum or under low pressures External pilot Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Changeable actuation: N.C., N.O., or external pilot Can be used as a selector or divider valve (External pilot) VG342 04 G 1 A Valve option CE-compliant Nil R

VP500/700 Series How to Order VP 5 1 7 5 D Y 1 Modular connection type Flow direction Series Nil Left to right 5 VP500 R Right to left 7 VP700 Bracket Pressure specification Nil Without bracket Nil Standard (0.7 MPa) With bracket*1 B K High-pressure type

VP500/700 Series RoHS How to Order VP 5 1 7 5 D 1 Y Modular connection type Flow direction Series Nil Left to right R Right to left 5 VP500 7 VP700 Bracket Pressure specication Nil Without bracket B With bracket*1 Nil Standard (0.7 MPa) K High-pressure type (1.0 MPa) *1 Brackets are supplied loose, not assembled, at time of shipment. Includes 2 mounting screws.

VQ7-6

is Rc 3/8 Seal FHG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Option FJG None Light/Surge voltage suppresor Individual pilot exhaust Nil Z V 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 When two or more symbols are specified, indicate them alphabetically.

VQD1000

With light/surge voltage suppressor 1 (P) 3 (R) Body type LO: Plug lead type L plug connector, Without connector With light/surge voltage suppressor 2 3 5 Body ported (Single unit) Body ported (Manifold) Base mounted Note) Latching type: Base mounted type only.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Option (A) 2 1 Nil: F: None With bracket 1 (P) 3 (R) Body type Bracket Function AC Symbol Specifications DC Port size [2(A) port] (0.35 W) p (0.9 W) p Note 3) Nil p Standard C3 C4 C6 M5 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting M5 thread (Replaceable type) R Note 1, 2) K Note 1) High pressure type p p External pilot type KR Note 1, 2) (0.9 W) p High pressure/External

VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Option Connector Rated voltage Port size of sub-plate Number of solenoid Single — Without sub-plate None 100V AC 1 S — — Connector SV ∗ Indicator light 1 4 A02 200V AC 2 0 N Double D FG Side piping FJG W/o conn

Wedge packing style 3 8 R port: N NPT Contact SMC for other voltages (9) Order Made Individual pilot EXH V T NPTF FIG FHG SX If specifying more than one symbol, indicate them in the alphabetical order.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Air Suction Filter ZFA Series

(Example) For 6 stations 06 How to Order (Single unit) ZFA 100 01 Bracket Air suction filter Symbol Nil L None Bracket 1 pc. on the left R LR ZFA100 Body type 1 pc. on the right With both the left and right sides 100 Filtration area (mm2) Symbol L or R shows the left or right of the filter IN when viewed from front. 2110 4210 200 Port size Thread type 02 01 Port size Applicable model Symbol

ZSE20(F)_ISE20

1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

ZSM1-115/121

style 0.5 m (Standard) 3 m Lead wire length Nil L Switch/Voltage 15 21 Solid state 4.5 to 28 VDC Contact (Reed switch) 100 VAC/DC Connection 0 1 T1 For mounting on ZM ejector R 1/8 NPTF 1/8 870

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, S/S CLEAN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, J5, KQ(X23) 10MM, .05513 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type10R 1/4KGH10-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW CLN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, H5, KQ(X23) 8MM, .05663 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type8R 1/4KGL08-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW CLEAN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, J5, KQ(X23) 10MM, .06704 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type10R 1/4KGL10-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, STAINLESS, CLEAN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, C5, KQ(X23) 4MM, .01510 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type4M5 x 0.8KGS04-M5

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, JG, KQ(X23) 10MM, .06730 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type10R 1/8KGL10-01

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONN HEX SCKT HD, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, FX, KQ(X23) 6MM, .05599 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type12R 1/4KGS12-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONNECTOR S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, HH, KQ(X23) 8MM, .03106 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type8R 1/8KGH08-01

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONNECTOR S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, HH, KQ(X23) 8MM, .05326 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type8R 3/8KGH08-03

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONNECTOR S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, JH, KQ(X23) 10MM, .08776 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type10R 1/2KGH10-04

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONNECTOR S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, LH, KQ(X23) 12MM, .05903 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type12R 1/4KGH12-02