SMC Corporation of America
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Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: None (Straight), Port Size: 02 (Rc1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Size: 100, Motor Mounting Position: R (Right Side Parallel), Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: B (10mm), Stroke: 200mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread), Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: A (10m), Driver Type: 92 (LECSN2-T9-9/EtherNet/IPâ„¢, 200V to 240V), I/O Cable Length

Size: 100, Motor Mounting Position: Top Side Parallel, Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: L (2mm), Stroke: 500mm, Motor Option: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: F (Flange), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 2 (2m), Driver Type: 92 (LECSN2-T9-9/EtherNet/IPâ„¢, 200V to 240V), I/O Cable Length: 1 (1.5m)

Size: 100, Motor Mounting Position: Top Side Parallel, Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: L (2mm), Stroke: 500mm, Motor Option: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: F (Flange), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 2 (2m), Driver Type: B2 (LECSB2-T9/Pulse Input, 200V to 240V), I/O Cable Length: 1 (1.5m)

Size: 100, Motor Mounting Position: Top Side Parallel, Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: L (2mm), Stroke: 300mm, Motor Option: w/o Option, Rod End Thread: Rod End Female Thread, Mounting: D (Double Clevis), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m), Driver Type: 92 (LECSN2-T9-9/EtherNet/IPâ„¢, 200V to 240V), I/O Cable Length: 1 (1.5m)

Size: 100, Motor Mounting Position: Top Side Parallel, Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: L (2mm), Stroke: 500mm, Motor Option: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: F (Flange), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 2 (2m), Driver Type: S2 (LECSS2-T9/SSCNET/H, 200V to 230V), I/O Cable Length: 1 (1.5m)

Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 1 (One-touch Fitting: Size 3=ø10, Size 4=ø12), Digital Flow Switch: Without Digital Flow Switch, Regulator: R (With Regulator), ON/OFF Valve: V2 [Manual Operation Valve (w/Lever Lock)], Restrictor: Without Restrictor, Filter: F (With Filter)

Size: 100, Motor Mounting Position: R (Right Side Parallel), Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: D (3.33mm), Stroke: 200mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread)

Description Note 1 Stud 2 Strainer Mesh size: 100 mesh 3 Mounting bracket 4 Lock nut 2 pcs. included for male thread mounting (Not included for female thread mounting) 7 Lock plate Replacement Parts No. Description Part no.

R Current read value For example, when the display value is 1.000[MPa], 5%R.D. is 5% of 1.000[MPa], which becomes 0.05[MPa]. When the display value is 0.800[MPa], 5%R.D. is 5% of 0.800[MPa], which becomes 0.04[MPa]. R.D. The pressure range within which the product will meet all published specifications.

Nominal diameter 80A 40A 65A 32A 50A 25A Applicable pipe size external diameter 89 48 75 38 60 32 Operating pressure 0 to 0.02 MPa Orifice size 80 65 25 40 Pilot pressure 0.3 to 0.5 MPa Kv 169.7 43.7 131.1 18.8 71.1 8.5 Flow rate characteristics Cv 198 51 153 22 83 10 Fluid temperature 0 to 60C Valve leakage 0 cm3/min (with water pressure) 852 PVC Quick Drain Valve LVW Series Construction IN r

Stainless Steel Cylinder Series CG5-S 20, 25, 32 40, 50, 63 80, 100 Replacement Procedure is P.281 Construction With rubber bumper !0 o With air cushion !2 !1 o !0 The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series CG5-S. *BLUE links will lead to purchase pages. Seal Kit List Replacement Parts: Seal Kit Kit no.

Stainless Steel Cylinder Series CG5-S 20, 25, 32 40, 50, 63 80, 100 Replacement Procedure is P.281 Construction With rubber bumper !0 o With air cushion !2 !1 o !0 The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series CG5-S. Seal Kit List Replacement Parts: Seal Kit Kit no. CG5NSR CG5NSV Contents Bore size (mm) Description Material No.

Description Material 1 Body Aluminum die-cast 2 Flange Aluminum die-cast 3 Bowl Stainless steel e r Replacement Parts No.

-X224 WR110-02-X215 Inlet pressure: 0.6 MPa Inlet pressure: 0.8 MPa 0.4 0.3 0.4 0.5 0.6 0.7 0.8 Outlet pressure [MPa] Outlet pressure [MPa] 0.3 0.2 0.1 0.2 0.1 Flow rate [L/min] 0 0 Flow rate [L/min] 0 0 1 2 3 4 5 6 1 2 3 4 5 6 Dimensions Construction 40.5 e w u 40.5 y IN OUT r M30 x 1.5 Panel cut dimension 30.5 q t Component Parts No.

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Material: Body: Stainless Steel 304; Gasket/O-ring: FKM, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size R: 2, Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 100 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: -

Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: ℓ250, Port Size R: 1, Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 100 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: -

Material: Body: Stainless Steel 304; Gasket/O-ring: FKM, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size R: 1, Element Type: Sintered Metal, Stainless Steel Material, Nominal Filtration Accuracy: 100 μm, Element Seal Material: FKM, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]

Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: ℓ250, Port Size R: 2, Element Type: Sintered Metal, Bronze Material, Nominal Filtration Accuracy: 100 μm, Element Seal Material: NBR, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]