Process Valve Series VNA

(mm) 1 8 1 4 1 8 1 4 1 8 1 4 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 Equivalent size Note 1) No freezing Note 2) This product cannot be used for water applications.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2 7 4 ( 8 5 . 8 1 S I 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2 7 4 ( 8 5 . 8 1 ) 2 8 4 ( 8 9 . 8 1 178 Return to Menu

HRX-OM-Z002

Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 QUALITY CONTROL OF CIRCULATING FLUID AND FACILITY WATER . 8-1 8.2 INSPECTION AND CLEANING . 8-2 HRLE Series HRX-OM-Z002 Contents 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 3-month inspections . 8-4 8.2.4 6-month inspections . 8-5 8.2.5 Inspection during winter season . 8-6 8.3 CONSUMABLES . 8-6 8.4 OPERATION STOP FOR AN EXTENDED

Plug-in/Plug Lead: Single Unit

PE port Rc 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

L 16 44 8 (7.5) L 8 2514 131 (35) (25) 5.5 47.04 SMC 55 Approx. 10 Vinyl multicore cable 0.3mm x 25C 2-M2.6 x 0.45 Socket side Terminal no.

C76

8 !9 @0 q w e r t y u i o !

C76

8 !9 @0 q w e r t y u i o !

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

8 !

Free Mount Cylinder for Vacuum Series ZCUK

62 5 12 11 12 24 29 51.5 23 34.5 ZC(D)UKC32 1/8 1/8 M5 x 0.8 1/8 11 12.5 20 32 2 6 7 8 13 17 28 31 12 5 to 50 14 18 26 32 40 50 3 4 8 10 9 10 8 10 16 20 20 22 33 43.5 19 21.5 33.5 34 15.5 5 to 50 H J L MM P Q QA R S SA T Y Z Model ZC(D)UKC16 ZC(D)UKC20 ZC(D)UKC25 ZC(D)UKC32 ( ): In the case of a mounted auto switch.

2/3 Port Valve

Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 Port size 7.1 14.3 3.9 5.2 6.2 7.3 8 10.6 9.5 13.5 15.8 8.7 Orifice size Effective area Cv factor Pilot port size 41mm2 58mm2 112mm2 7.2mm2 13mm2 18mm2 25mm2 30mm2 43mm2 86mm2 120mm2 22mm2 Flow rate 1.2 2.3 3.2 6.2 0.4 0.7 1.0 1.4 1.7 2.4 4.8 6.6 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Rc Weight Face-to-face dimension

1

covers), Rc1/8, NPT1/8 port) 0.08 0.10 0.14 0.24 Basic weight Basic weight JCMMm-m (Male thread on both covers, M5 port) 0.08 0.12 0.15 0.28 JCMMm-mF (Male thread on both covers, M5 port) 0.07 0.10 0.13 0.24 JCMMmm-m (Male thread on both covers, Rc1/8, NPT1/8 port) 0.10 0.14 0.18 0.32 JCMMmm-mF (Male thread on both covers, Rc1/8, NPT1/8 port) 0.09 0.12 0.16 0.27 JCMMZm-m (Male thread on

K35-OMW0030

Assembly of the valve unit . 56 8-3-1. Disassembly of the servo valve . 57 8-3-2. Assembly of the servo valve . 58 8-4-1. Disassembly of the E-stop valve . 59 8-4-2. Assembly of the E-stop valve. 60 8-5-1. Disassembly the position sensor . 61 8-5-2. Assembly of the position sensor . 62 8-6-1. Disassembly of the air cylinder parts . 63 8-6-2.

Plate Cylinder

/4 G1/8 G1/8 G1/4 G1/4 NPT1/8 M8 x 1.25 depth 13 NPT1/8 M8 x 1.25 depth 13 NPT1/4 M10 x 1.5 depth 15 NPT1/4 M10 x 1.5 depth 15 The position of the 4 flats of the piston rod is different from the above drawing.

58

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 105 15 110 115 D-M9 D-M9W 115 + 40(n 4) 2 105 + 40(n 4) 2 110 + 40(n 4) 2 15 + 40(n 2) 2 With n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs.

RHC

(mm/s) 2000 10 32 1/4 1/4 2500 3000 12.5 15 30 6 10 1/4, 3/8 = 0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1/4, 3/8 3/8 3/8 3/8 1500 2000 2500 3000 12 16 20 24 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 40 8 10 1/4, 3/8 500 6 40 = 0.7 30 40 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12 1000 1500 2000 2500 3000 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Refer to page 10-6-7 for maximum absorbed

CUJ

5 15.31 9.18 IN 30.6 21.44 Data 39.26 23.56 OUT 78.5 54.97 10 6 25.13 15.07 IN 50.3 35.18 Spring Reaction Force/Single Acting Standard Stroke Bore size (mm) 4 6 8, 10 4 6 8, 10 Standard stroke (mm) 4, 6, 8, 10 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 4, 6 4, 6, 8 4, 6, 8, 10 Action IN Spring in pre-loaded condition Spring in loaded condition OUT Double acting Single acting, Spring return When

CLS

8 !

CUJ

Table 1 Standard strokes Lead wire length (m) Applicable load Auto switch part number Electrical entry direction Bore size (mm) 4 6 8, 10 4 6 8, 10 Standard stroke (mm) 4, 6, 8, 10 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 4, 6 4, 6, 8 4, 6, 8, 10 Action Load voltage Electrical entry Indicator light Wiring (output) Special function Double acting Type 0.5 (Nil) 3 (L) 5 (Z) DC AC In-line Perpendicular

ALF400 to 900, ALT-5/-9

1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2 7 4 ( 8 5 . 8 1 S I 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2 7 4 ( 8 5 . 8 1 ) 2 8 4 ( 8 9 . 8 1 178 Return to Menu