Modular F.R.L. Pressure Control Equipment Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Directional Control Valves Air Grippers Modular F. R.
Table roll deflection arrow A due to static roll moment applied at arrow F when Lr=(see table) and table is retracted. Deflection on A when the load is applied at F. Deflection on A when the load is applied at F. Deflection on A when the load is applied at F.
Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26
Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26
l h 10.2 10.2 l + Stroke f * For one side rod boot type, a rod boot is mounted on the lock side (left side of the drawing above).
Dimensions Basic style: RECB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com H2 2-RcP Width across flats B2 Width across flats B1 2-NN G G H1 Standard port Pluged (M5 x 0.8) I 2-Eh8 D MM AL K A N N F lNA S + Stroke H F ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I
G1, Symbol N: NPT1) Tank drain port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Automatic fluid fill system (Standard) Circulating fluid system Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless
Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.
Mat<. 1o/o 13-18.5 (1A F S.) lor Voltage Fluct. Max. +1 0olo (1A F.S.) Max. +1% against DC22-26V (1A F.S.) :urrent itabllity tor Temp. Fluct. Max. +1% @ 79'F (25'C) (1A F S.) Mat<. +2Vo @ 79'F (25"C) (1A F.S.) )perating Temp.
G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity HEA IDH Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat
339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350
F A F For the double axis type, this is the cylinders central axis.
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, MECHANICAL, SPL, VALVE, VM (VFM/VZM) MECHANICAL VALVE, BA, VM BODY PT(M5, NON-US STD), .72600 lb
TRAFFIC SIGNL APP, TRAINING EQUIPMENT, H25, 10.90000 lb
PID PRESSURE APP, TRAINING EQUIPMENT, H25, 1.13398 lb
PID TEMP APP, TRAINING EQUIPMENT, H25, 1.13398 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
(ZSE30AF (for compound pressure) 3.5% F .S.) Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.