Type: 10S (Side Ported), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 5 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C8 (ø8 One-touch Fitting)

Port): 3 [ø6 (Straight)], Bracket: N (For Single Unit: Without / For Manifold: Not Available)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 05 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate, w/Station Number)

Type: 10S (Side Ported), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 2 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 07 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number), DIN

Compatible Robot: 011 (UNIVERSAL ROBOTS: UR3e, UR5e, UR10e, UR16e), Switch Selection: P (Auto Switch PNP), Valve Option: O (Normally Open), Robot Connection Cable: N (without connector cable), Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Type: 10S (Side Ported), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 11 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C8 (ø8 One-touch Fitting)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 5 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)

Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 04 (1/2)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: QA (DeviceNetâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 08 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: VA (CC-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 11 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)

Type: 11S (Bottom Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10S (Side Ported), SI Unit Specification: VB (CC-Link - 16 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 3 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting, Straight, Metric), Mounting: D (DIN Rail Mounting w/o Name Plate)

Type: 10S (Side Ported), SI Unit Specification: VB (CC-Link - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 8 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides)

Sensor Range: 0 [Positive pressure (0 to 1 MPa)], Accuracy: ±2% F.S., Port Size: R04 (Ø4 Plug-In Reducer), Output Specification: N (NPN open collector 1 output), Lead Wire Termination: Basic, Set Value: P (Normal Output), OUT1 Set Value: 005 (0.5 MPa, −50 kPa, 50 kPa), OUT1 Hysteresis: 5 (0.05 MPa, 5 kPa, 5 kPa)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Stations: 10 Stations, P,E Port Location: D (D Side), A,B Port Size: KN7 (ø1/4" One-touch Fitting, Inch, Replaceable), Thread: N (NPT)