Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

HRX-OM-O021

HRX-OM-O021 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.4.2 Earth Label . 1-5 1.5 Safety

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Model Indication of the Replacement Parts (7) Supply valve, (8) Release valve Rated voltage 5 24 VDC 6 12 VDC Electrical entry Note 1) L L plug connector with lead wire LO L plug connector without lead wire M M plug connector with lead wire Note 2) MO M plug connector without lead wire Note 2) Note 1) All with light and surge suppressor.

Antistatic One-touch Fittings Series KA

M P D L A Part No.

CLK1

4 Unclamp side port Rear cushion valve Top width across flats 3 L + Stroke 3-Rc 1/4 GA 4-M6 x 1 Thread depth 12 52 171010 14 N GB W Clamp side port 3 32 45 45 BX M 3 Approx.

RZQ

9 e @1 @4 !3 RE A B @0 REC !2 CX @3 !1 CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G @2 !5 !7 !6 !4 @3 t !

VEX1

plug connector, with lead wire M plug connector, without lead wire M connector, wihtout connector DlN connector 1 8 1 4 1 4 3 8 1 2 1 2 3 4 12 L LN 12 LO 32 M 32 MN MO 50 D 1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet terminal 2 T Conduit terminal 90 D DlN connector Body ported VEX3 12 0 01 5 D B Base

60

VXK21 VXK22 VXK23 Model 2 mm 3 mm 4.5 mm 6 mm 8 mm Orifice size Orifice size M Solenoid Coil Coil: Class B, Class H M Rated Voltage 100 VAC, 200 VAC, 110 VAC, 220 VAC, 240 VAC, 230 VAC, 48 VAC, 24 VDC, 12 VDC 1/8 1/4 1/4 3/8 1/4 3/8 Port size Normally Open (N.O.)

CM2

Axial foot style (2) Rod side flange style (1) Head side flange style (1) CJ1 Clevis integrated style (1) (1) Single clevis style CJP (1) (3) Double clevis style Rod side trunnion style (1) (2) CJ2 (2) Head side trunnion style (1) CM2 Boss-cut basic style (1) Boss-cut flange style (1) CG1 Boss-cut trunnion style (1) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Mini Rotary Actuator

1 2 Piston 1 1 Body 1 No Description Qty.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

Power Clamp Cylinder

0 o CK1 CLK2 C(L)KQ MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA q !2 u y e i For Asia For North America For Europe For France Special r w !1 Replaceable Kits List Table 1 Contents Kit no. Bore size (mm) Description Code Opening angle 30 H e Switch holder y Proximity switch u Parallel pin i Sheet gasket !

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

9 Black zinc chromated 2 Alloy steel Hexagon socket head cap screw @0 1 Synthetic rubber Rubber cap @1 Black painting 1 22A Aluminum die cast Cap A Tufftride 1 22B Carbon steel Cap B Black painting 1 Zinc die cast M/O knob @3 Black zinc chromated 1 Alloy steel M/O bolt @4 Zinc chromated 1 Steel wire M/O spring @5 Zinc chromated 1 Carbon steel Stopper ring @6 1 Resin Wear ring @7 Nickel plated

OMS0020

Data No. 0Note6) to 1000 8 MovementMode (0:ABS, 1:REL) 1 0 , 1 9 ThresholdForceValue 0.1 0.1 to 5 10 Positioning width [m] 1 0 to Note1) 11 AREA A Position 1 [m] Note1) 1 0 to Note1) 12 AREA A Position 2 [m] Note1) 1 0 to Note1) 13 AREA B Position 1 [m] Note1) 1 0 to Note1) 14 AREA B Position 2 [m] Note1) 1 0 to Note1) 15 Unused 4 Step Data No. 2 (Step Data No. 1Note6) 0-15 Same as above

Miniature Tubing & Miniature Fittings

steel J D I G F E C Thread B A Barb one-touch: M-32F-2, M-04F-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g B C D E M A Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 Parts list 4 3 2 1 E Material Brass Brass NBR No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated D C POM, Stainless steel

AR Series Modular Type Regulator

A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22

Digital Pressure Switch

(example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analogue output of 5V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V). Output impedance Output type The operation type of the switch output.

PF-OMN0009_C

N M8 M8 R / ZS-40-K PF3W504/520 4 3X8 ZS-40-L PF3W540 4 3X8 ZS-40-M PF3W511 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -13No.PF-OMN0009CN-F FLOW POWER (OUT ) M8 1 DC+ (4 ) () 2 NC/ () () 3 DC() 4 (IN ) () M8 IN OUT POWER FLOW POWER FLOW -14No.PF-OMN0009CN-F