ITV

Cable connector (4-wire) Right angle type Cable connector (4-wire) Straight type 52 Mounting hole 4 x 7 40 (31) F.R.L.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 6 4 8 (1) M5 X 0.8 SYJ300 Top (2) SY Body ported Base mounted Rc(PT)1/8 SYJ SYJ500 Top Rc(PT)1/8 VK (1) Rc(PT)1/8 SYJ700 Top VZ Rc(PT)1/4 VT (1) M5 X 0.8 SYJ300 Side VT Rc(PT)1/8 Bottom VP SYJ500 Rc(PT)1/8 Side VG Rc(PT)1/8 (1) SYJ700 Bottom Rc(PT)1/4 VP Rc(PT)1/4 Side Note 1) Only internal pilot style Note 2) Only external pilot style VQ VQZ VZ VS Series SYJ300 Series SYJ500 Series SYJ700

Serial Transmission System Series EX250 Series EX500

Input block type (Fill out for I/O unit only) Ports 2, 4 size (metric) Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) Ports 2, 4 Symbol C8 C10 C12 02 03 B CM 1 2 3 Ports 1, 3, 5 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting 1/4 3/8 Bottom ported Rc 1/4 Mixed Input block (Fill out for I/O unit only) 1: 1/2 3, 5: 3/4 Nil Without SI unit/input block

CQS

4.

VEX1

Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 1(P) 2(A) 3(R) 02 02 01 02 03 04 04 06 10 10 12 14 20 Port size 11 2 1 11 4 11 4 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 2 Air operated Solenoid 0.1 0.2 0.2 0.3 0.4 0.5 1.3 1.4 1.9 2.0 3.9 4.0 Mass (kg) Note) Non-lubricated specifications are not available for this product.

HRX-OM-X010

and Shutdown . 4-1 4.1 Pre-check . 4-1 4.1.1 Installation condition . 4-1 4.1.2 Cable connection . 4-1 4.1.3 Installation of circulating fluid and facility water piping . 4-1 4.1.4 Operating signal from your system . 4-1 4.1.5 Check emergency off [EMO] switch . 4-1 4.2 Opening of Facility water Valve . 4-1 4.3 Supply of Circulating Fluid . 4-2 4.3.1 Preparation of circulating fluid . 4-2

HRX-OM-W032

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of Circulating Fluid Supply to Users Equipment . 4-3 4.4 Operation Start and Stop . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check Items during Startup . 4-8 4.6 Adjustment of Circulating

Air Slide Table Series MXS

60 70 75 80 FF 40 40 40 50 35 60 70 75 80 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 GA 22 22 22 22 55 61 102 154 190 HA 45 45 45 55 35 70 70 76 80 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175 KA 162 218 258 NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

NPT1/4 G1/4 Rc1/4 NPT1/4 G1/4 Note 1) Dimensions when equipped with auto switch are the same as drawing above.

Compact

[mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work

Vacuum Unit

12.3 Suction filter 38.5 16.5 A 15 4 Vacuum (V) port 78.8 V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 4 Refer to page 38 for dimensions with a mounting bracket.

JXCx-OMT0002

JXC-OMT0002-C 4.

24

Contents 20 MGP20-B-PS Set of nos. above @4, @5, @6, @7, #5, $4, $5 50 MGP50-B-PS Set of nos. @4, @5, @6, @7, above #5, #6, $4, $5 63 MGP63-B-PS 80 MGP80-B-PS Set of nos. @4, @5, @6, @7, above $4, $5 100 MGP100-B-PS 25 MGP25-B-PS 32 MGP32-B-PS 40 MGP40-B-PS *: Each seal kit includes the parts listed above.

Cylinder with Lock Series CLS

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40 (n2) 2 105 + 40 (n4) 2 110 + 40 (n4) 2 115 + 40 (n4) 2 n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs.

Series VS

IN 0-15) FLASHING:SHORT OUTPUT(DIAGNOSES IN 0-15) H H 9 9 10 10 11 11 2 3 1 B 2.IN21 2.IN21 4.IN20 4.IN20 1.24V 1.24V 3.0V 3.0V 5.PE 5.PE 5 5 2 2 4 4 (FEMALE) (FEMALE) 5PIN 5PIN MICRO CONNECTOR MICRO CONNECTOR INPUT INPUT 1 1.24V 1.24V 1 1 3 3 PWR PWR EPR EPR VLV VLV 2.IN17 2.IN17 4.IN18 4.IN18 4.IN19 4.IN19 2.NC 2.NC 3.0V 3.0V 3.0V 3.0V 3.0V 3.0V 3 5.PE 5.PE 5.PE 5.PE 12 12 13 13 4 5 5

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

VCL

Series 2 3 4 Class 2 Class 3 Class 4 VXD OUT port size VXZ Port size 1/8 (6A) 1/4 (8A) All IN ports are 3/8.

Air Cylinder Series CS1

(n4) 2 n (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 80 90 85 10 D-M9V D-M9WV 80 + 30 (n4) 2 10 + 30 (n2) 2 90 + 30 (n4) 2 85 + 30 (n4) 2 n (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 120 20 115 D-M9AL 115 + 40 (n2) 2 120 + 40 (n2) 2 (n = 2, 4,

7.4

)5 S07A5 2(B) 4(A) 2 (B) 3 (R2) 1 (P) 4 (A) 5 (R1) y t 4-Position Dual 3-Port Valve 5(R1) 3(R2) u r e w q 1(P) N.C. + N.C.

Mechanically Jointed Rodless Cylinders

4 !9 !1 @0 @2 @5 o @4 !