MHF2

4 r t e !6 Parts list Parts list Note Material No. Description No.

Wedge Cam Operation Provides

9 t y !5 i u !6 q r !0 !1 !2 Fingers closed Normally closed !4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

MIW/MIS

Apply the specified grease to the sliding part and T groove part of the finger. . Insert the piston in the T groove so that it will be hooked there. 4. Mount the cover and tighten the hexagon socket head screws with the tightening torque in the table below. Hexagon socket head screw Tightening torque Nm Size Width across flats M2.5 x 6 Lubrication Caution 12 20 2 0.36 M4 x 10 3 1.5 1.

MXW

7 y r e t w q @1 !0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !4 !1 !3 !2 @0 !9 o u i Component Parts No.

CRB1/Size: 10, 15, 20, 30

2 Stopper Resin Stopper packing NBR Special packing t !3 Stopper Stainless steel NBR Gasket Special packing y !4 Bearing High carbonate chrome steel O ring NBR u !5 Back-up ring O ring NBR Stainless steel i !

GA342

Thread type Nil Rc F G N NPT T NPTF 04 1/2 06 3/4 10 1 SA VA JIS Symbol VM N.C. N.O. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications VR Operating type Air operated type Type of actuation N.C./N.O.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

3 Port Solenoid Valve Series VQ100 1

) VZ Component Parts VS Description Material Resin Stainless steel Stainless steel, Resin Stainless steel NBR Carbon steel NBR No. q w e r t y u i Solenoid coil Body Fixed iron core Movable iron core assembly Return spring Poppet Round head combination screw Interface gasket VFN Replacement Parts No. o Description Material ZDC Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

T NPTF F G Note 1) R port of VQZ200 is only PF 1/16.

4/5 Port Air Operated Valve Series SYJA3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SYJA5 20 1 M5 Body ported SYJA5 40 2 Base mounted Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 3

VFRA3000

1 5 Port Air Operated Valve Series VFRA3000 How to Order SA 02 VFRA3 11 2 VA SA Thread type (Including pilot port) Function VA Nil Rc 2 position single 1 2 3 4 3 position exhaust center F N T 2 position double G NPT NPTF 3 position closed center VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

VZA2000

Nil T F Rc NPTF, NPT G Caution 3 position closed center 3 position exhaust center Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-1 2 Series VZA2000 Dimensions: Body Ported 2 position single: VZA2121-M5 2 position double: VZA2221-M5 2-2.8 mounting hole 2-2.8 Mounting hole Pilot port (A side) M5 x 0.8 Pilot port (A side) Pilot port (B side) 2-2.8

VHK

44.3 47.7 51 68 1 4 3 8 1 2 17 19 72 70 12 22 46 76.3 31.5 44.8 21.5 4 21.8 14 17.5 3.2 63 70 VHK-B2A 49 17 1 30 25 21.5 31 VHK-12F-02S VHK-12F-03S VHK-12F-04S 77.3 80.2 45.8 48.7 64 71 72 22 70 1 4 3 8 1 2 3 port valve Reference dimensions after insertion of R thread. 1(P)/2(A): Male Thread Effective area (mm2) Connection thread R Model Bracket mounting dimensions S (Width across flats) T

Size: 7 (Body Size 7), Style: 0 (Standard Formula), Operation: 1 (External Pilot Solenoid), Port Size: 12 (1+1/4), Thread: T (NPTF), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light+Surge Suppressor)

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Smooth Cylinder Series CQSY

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

Magnetically Coupled Rodless Cylinder / Low Profile And High Precision Guide Series CY1F

Cylinder / Low Profile And High Precision Guide Series CY1F 10,15,25 ll ll l h l pact mpact pact mp m ler overall length ler overall length ller overall length ll ll 29% reduction in height 29% reduction in height 2 29% reduction in height Overall length reduced 31% Ove Ove O 31% 31% 31% CY1F MY2H CY1H CY1F Height mm CY1H 10 15 25 Series CY1F CY1H 28 34 46 46 63 39.5 Overall length mm h i h h t

Stainless Steel One-touch Fittings Series KG

Weight (g) M T(M) L Part No. Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 13 15 17 21 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Confirmation of non-rotating accuracy 3-1 Rolling direction 3-2 Pitching direction + + + T Bore size (mm) Allowable rotary torque Non-rotating accuracy Deflection angle for eccentric load Allowable rotary torque T (Nm) Non-rotating accuracy () Non-rotating accuracy () Bore size (mm) Bore size (mm) 40 7 40 40 0.12 or less 0.3 or less 15 50 50 50 20 63 63 63 16

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T