Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., DUAL ROD CYLINDER, GUIDED CYLINDER, 569, 250.00000 lb

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads, FILTER REGULATOR, FILTER REGULATOR, MODULAR, P57, 1.76000 lb

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released. GUIDED CYLINDER. Cyl, Compact, Slide Bearing. 0.10000 lb. 573.

Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability.

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads FILTER REGULATOR, MODULAR. FILTER/REGULATOR. 1.76000 lb. FVD.

44

14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 D1 4 17 4 4 10.4 19.7 L2 A D2 10 H 8 Connection threads 6 18.5 10 10 12.8 21.8 (R) 10 (R) Applicable tubing 8 15.2 20.5 26 18 12 25.3 M L1 10 18.5 23 41 29 28.4 17 17 12 20.9 24 58 46 30.4 D1 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

HEC-OM-S008

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK UT CR 4.2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

KA

(mm) Fitting size d Soft nylon Polyurethane D L A M Part No. 3.2 9.6 18.5 17.5 18 4 33.5 34.5 36.5 18.5 15.5 KAR23-04 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 39.5 37 39.5 10 KAR04-10 3.3 2.5 KAR06-08 8 18.5 6 17 12.8 KAR06-12 42 4.7 12 20 10 KAR06-10 13.1 13.1 3.0 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5

IDX-OM-O004C

IDF15E1-20 L PE N TB CM ILS FM OLR PTC OLR ILS PTC PTC CM PRS TB C11 C11 FM PRS P 6.4 2 6 3 7.A A 7.1 7.2 A (10) 7.3 7.4 IDF15E1-10/20-A m 3/min(ANR) 1) 50Hz 1.2 60Hz 1.3 10 1) ANR 65% 2) 7 1 8.C C 8 8.1 8.2 8.3 1) 2) 81 9.K K 9 9.1 ( ) 9.2 1.6MPa AD48-8-X2110 KQ2H10-02S 10 IDF15E1-10-K IDF15E1-20-K 1) IDF-S0086 N.O. () 1) IDF-S0002 1 9 1 10.L L 10 10.1

IDX-OM-W017

L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 14-1 . 14-1 IDFA Series 2 IDX-OM-W017 i i i 1 () OFF 3 ON OFF i-1 IDFA Series i 1 IDX-OM-W017 i i-1-1 3 IDFA Series

IDX-OM-W032

(1 ) 2. 3. 0 IDFA Series 9-3 (ADH4000-04) 9 2 IDX-OM-W032 10 R 10 R 10-1 10-2 IDFA22E/37E/55E-23-R 10A 30mA IDFA75E-23-R 20A 30mA 10-3 (IDFA55E,75E) (IDFA55E,75E) M5 9.5mm 2 1.25mm L ,N N L () () IDFA Series 10-3 10-1 IDX-OM-W032 10 R 10-4 () () ONOFF 10-5 R 6-4 6-3 T 11-6 11-3 IDFA Series 10-4 10-2 IDX-OM-W032 11 T 11 T T 11-211-3 11-1 1. 2. 3.

Speed Controller with

Metric Size Applicable tube Tube size 4 6 8 10 12 23 04 06 08 10 12 Applicable series 3.2 TMH-23J TMH-04J TMH-06J AS1002F AS2002F AS2052F AS3002F AS4002F TMH-06 TMH-07 TMH-08 TMH-10 TMH-12 TMH-13 Holder for speed controller Note) The applicable TMH for AS1002F-02 is not available.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Stopper Cylinder Adjustable Mounting Height Type Series RSG

U Values inside ( ) are for D-H7LF D-H7C B Approx.

Process Pump <Fluororesin Type> Series PA3000

[ANR]) Discharge pressure (MPa) 0.4MPa Discharge flow rate (l/min) SUP = 0.5MPa 0.3 0.3MPa SUP = 0.5MPa 150 10 0.4MPa SUP = 0.5MPa 0.2MPa 0.4MPa 0.2 100 0.3MPa 0.3MPa 5 0.2MPa 0.1 50 0.2MPa 00 5 10 00 5 10 15 00 50 100 150 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) 4 Series PA3000 Dimensions PAm331m-m03 152 4-7 64 2-M5 with depth 8 139 10 10 120 95 Bottom view

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

ASP630F 1500 1000 14 Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 20 Flow rate (l/min (ANR)) 10 11,12,13 12 10,11 08,09 1000 10 15 8 500 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-10-2 3 Series ASP

Air Suction Filter With One-touch Fittings ZFB Series

ZFB100, ZFB101 ZFB200, ZFB201 ZFB300, ZFB301 ZFB401 16 x 14 x L60 rZFB200-08 tZFB300-08, -10 ZFB301-11, ZFB401-13 I-34S-A 10 x 6 x L33 12 x 8 x L42 14 x 10 x L45 I-35S-A I-36S-A I-39S-A 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. yZFB401-13 Note) Elements and O-rings for the cover are sold in sets of 10 pieces each. 10 pcs.

AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.