OMR0032

Controller Set Up (P.42) and 14. Card Motor Controller Configuration software (P. 70) for instructions on how to setup. (7) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.50) and 14.5 Monitor/Test window (P. 80) for instructions on operating instruction of test operation 14 - 3.

Exhaust Cleaner for Clean Rooms AMP Series

Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting

3 Position Cylinder Series RZQ

M K E Z a a L B + Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0

Electro-Pneumatic Positioner Series IP8000/8100

No terminal box With terminal box (Exsd2BT5) OUT2 OUT2 MPa MPa MPa MPa ELECTORO PNEUMATIC IP8000 P O S I T I O N E R ELECTORO PNEUMATIC IP8000 P O S I T I O N E R Specifications Explosion Proof This product has the following approvals. Exd2BT5: Newly established standard based on international (IEC 79) Use as Exd2BT5 (A) Pressure-proof packing.

E,R.L.

Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?

VND

size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D-40F VND70D-50F 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 17-4-41 6 Series VND Precautions Be sure to read before handling

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

Brake mechanism added

B L F G C D T Nil S n Applicable counter/Controller CEU5 series CEU2 series Suffix for cylinder Nylon tarpaulin Neoprene cross With cushion on both ends Without cushion With rod cushion With head cushion With connector Without connector J K Nil N R H Nil Z Rod boot Bore size Auto switch 40 50 63 80 100 Cushion 40 mm 50 mm 63 mm 80 mm 100 mm Nil Port thread type Without auto switch (Built-in

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(A) 4 (B) 2 2 M5: M5 x 0.5 5 (EA) 1 (P) 3 (EB) 3 position closed center (A) 4 (B) 2 A 4 3 2 B 5 (EA) 1 (P) 3 (EB) D: Slotted locking type Screw driver operated J: With switch 3 position exhaust center Elbow fitting assembly (upward) L4: 4 elbow fitting assembly L6: 6 elbow fitting assembly (A) 4 (B) 2 4 5 (EA) 1 (P) 3 (EB) A 4 ON 3 position pressure center OFF B 2 SMC (A) 4 (B) 2 5 Refer

Digital Flow Switch Series PFA For Air Series PFW For Water

P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200 P P P 50 to 500 P P P P 150 to 3000 P P P P 300 to 6000 P P P P 6000 to 12000 Series variations For Water Flow rate Remote type Output specification Port size (Rc, NPT, G) Integrated measurement display type Display unit Sensor unit Switch output 3/8 1/2 3/4 range l/min PFW31m 30m 32m PFW704 720 740 PFW504 520 540 P P

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

99

Dimensions A B 70 53 Element Dimensions A B Model EJ701S-T EJ801S-T EJ901S-T Applicable container 157 117 FGH100 286 246 FGH200 538 498 FGH300 71 Membrane Element for FGH Series ED Series RoHS Specifications Model EDS-X20 EDS-X40 Filtration accuracy (Filtration efficiency 99.9%) Note 1) 0.2 0.4 Length 247 mm 4,000 6,200 Filtration area (cm2) 495 mm 8,000 12,400 Heat resistant temperature

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

Microspeed Cylinder

Vertical actuation I II P W A P a (b) (a) P P a A W (1) Basically adjusted with meter-out control. When meter-in control is also used, lurching is reduced. (1) Basically adjusted with meter-out control.

0.5

Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80

Suction Filter with Case FH99 Series

W C D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95

Refrigerated Air Dryer For Use in North, Central and South America

Options p. 8 Optional accessories p. 7 Auto Drain Valve Longer life, Higher resistance to foreign matter Shape prevents condensate accumulation Non-sliding part reduces the catching of foreign matter Poppet type Diaphragm type Condensate and foreign matter are discharged completely. Easier maintenance V One-touch mounting and removal of the bowl is possible without using any tools.