EXxx-OMY0004

msec 1 1 1 100 msec Bit 5 Bit 4 Bit 3 Value for ON feedback delay time for Zone M 0 0 0 Reserved 0 0 1 Reserved 0 1 0 Reserved 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 6 Output feedback for Zone M 0 Disable 1 Enable Bit 7 Reserved 55 No.EX##-OMY0004 Table 10-9 Byte2 Output feedback parameter zone 1 for Safety Mode (Module Passivation/xxx) Bit 2 Bit 1 Bit 0

IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

ZSE3/ISE3

LCD Readout Digital Pressure Switch Series ZSE3/ISE3 How to Order Piping specifications Operating pressure range Single mounting R 1/8 Note 1) Nil L 01 T1 0 to 0.98 MPa 0 to 98 kPa Single mounting NPTF 1/8 Note 1) Note 1) M5 x 0.8 female threaded.

VXE21/22/23

Table (3) Rated Voltage Electrical Option Rated voltage Solenoid valve model (Port size) Orifice symbol (diameter) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) Voltage L (With light) Voltage symbol 5 6 24 VDC 12 VDC VXE21 Model VXE22 VXE23 01 (1/8) Port symbol (Port size) 02 (1/4) 03 (3/8) 04 (1/2) 02 (1/4) 03 (3/8) 04 (1/2) 02 (1/4) Table (4) Bracket Part No.

NCRBIBwserbs

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.

EXxx-OMY0006CN

Valve diagnostics 1 Table 9-9 Valve diagnostics 1 Bit 0 12 0: 1 1 34 0: 1 2 56 0: 1 3 78 0: 1 4 910 0: 1 5 1112 0: 1 6 1314 0: 1 7 1516 0: 1 9.1.2.3. General diagnostics 2 Table 9-10 General diagnostics 2 Bit 0 1 0:1: 1 2 0:1: 2 3 0:1: 3 4 0:1: 4 5 0:1: 5 6 0:1: 6 7 0:1: 7 8 0:1: 9.1.2.4.

HRX-OM-Y120

Fig.1-3 shows the location of the communication port. RJ45 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 1 14 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 Fig.1-3 Communication port HRL Series 1.3 Communication port 1-5 HRX-OM-Y120 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.

E-ITV-STD-RF-A

Avoi d carel ess di sassem bl y or rem oval of part s, as t hi s can l ead t o m al f unct i on. 3 CAU TI O N Take t he f ol l ow i ng st eps t o avoi d m al f unct i on due t o noi se. 1) I nst al l a l i ne f i l t er et c. t o t he AC pow er l i ne t o reduce / el i m i nat e pow er suppl y noi se. 2) Avoi d m al f unct i on due t o noi se by i nst al l i ng t hi s product and i t s w

3

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.

VXR21/22/23

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

A

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PA PP 1(P) 2 2(A) 1 1/2 PP = approx.

Power Valve: Economy Valve Series VEX5

Port 3 (R) 1/4 (P1) Refer to page 2449. 2 x port size Port 2 (A),1 (P) 2 x d Mounting hole A (Air operated) For bracket mounting Max. O Min.

Soft Start-up Valve AV2000/3000/4000/5000

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PP PA 1(P) 2 2(A) 1 1/2 PP = approx.

Soft Start-up Valve AV2000/3000/4000/5000 1

gauge G36-10-01 1 MPa Description Part no.

HRX-OM-W069

Fig.1-3 shows the location of the communication port. 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 1 14 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 Fig.1-3 Communication port 1.3 Communication port HRL Series 1-4 HRX-OM-W069 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

Series VS

Series VS R8b S RUBBER SEAL/METAL SEAL SERIES VSR8/VSS8 2-position Single solenoid (FG-S) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Metal) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Rubber) (A)(B) 4 2 5 1 3 (EA)(P)(EB) 3-position Closed center (FHG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Exhaust center (FJG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Pressure center (FIG-D) (A)(B) 4 2 5

MHx-OMY0001

16DD-M9(W,A)V D-P3WA 56mm Nm D-M9(V) D-M9W(V) D-M9A(V) D-P3DWA 0.050.15 -12- (mm) L1 L2 L3 L4 L5 L6 16 5 MHM-16D 1 1 1 1 MHM-25D 36 34 MHM-32D 50 24 MHM-50D 23 25 80 41 / 3 NPN 3 PNP PLC PLC 2 2 PLC PLC PLC PLC -13- AND(),OR() *50ms 3 NPN OR 3 NPN AND 1 1 1 2 2 2 3 PNP AND 3 PNP OR 1 1 1 2 2 2 2 AND 2 OR 2 AND ON , 2 ON 20V 2 OR OFF OFF 1 1 ON 2 2 ON =-2 OFF =2

PFxx-OMX0007

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -53No.PF-OMX0007-A Characteristics data Flow rate/Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A701H 10 L