0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable

Smooth Cylinder/Low Speed Cylinder

Caution 1.

Combination Cylinder

Unit: CXWP.3.10-1 CXW Dual Rod Cylinder: CXSP.3.11-1 CXS Platform Cylinder: CXTP.3.12-1 CXT Series MX INDEXP.3.13-1 MX Compact Slide: MXUP.3.14-1 MXU Compact Slide: MXHP.3.15-1 MXH Air Slide Table: MXSP.3.16-1 MXS Air Slide Table: MXQP.3.17-1 MXQ Compact Air Slide Table: MXFP.3.18-1 MXF Air Slide Table: MXW P.3.19-1 MXW Air Slide Table: MXPP.3.20-1 MXP Series MG INDEXP.3.21-0 MG Compact

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

2/3 Port Valve

IN Model Port size Rc(PT) Orifice size (mm) Model Solenoid coilO Coils: Class B, Class H 1 8 1 4 , VX211 0 2 2 3 4.5 3 1 8 1 4 , VX212 0 2 1 8 1 4 , VX213 0 2 VoltageO 1 4 3 8 , VX222 0 2 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V 1 4 3 8 , 4.5 VX223 0 2 1 4 3 8 , 6 VX224 0 2 1 4 3 8 , 8 VX2250 DC Standard Option 24V 12V 3 8 1 2 , 1 4 , 10 VX2260 1 4 3 8 , 3 VX232 0 2 1 4 3 8 , 4.5

Electric Slide Tables

1 !5 #1 q C B C B !4 !2 !0 !8 @1 !6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

0.55

(A) 2 1/8 1/4 4.2 12 1 (P) 3 (R) VPA500 N.O. Base mounted Body ported (A) 2 1/4 3/8 12 P. 25 8.9 1 (P) 3 (R) VPA700 For vacuum N.C./N.O. (A) 2 3/8 1/2 15.3 12 Air operated valve 1 (P) 3 (R) VPA300 N.C. (A) 2 12 1/8 1/4 3.8 1 (P) 3 (R) N.O. (A) 2 12 VPA500 1 (P) 3 (R) 1/4 3/8 P. 30 8.8 For vacuum N.C.

10

65.5) 61 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 3 ( ): Denotes the Normally Open (N.O.) dimensions. 33 Series VX21/22/23 For Steam Can be used with heated water.

Electric Actuator

2 (ISO14644-1)!

JXCx-OMT0061CN

. . (07F0)h (07FF)h (No.63) 16 * ()No.0 (0400)h 1 0=1=ABS2=INC (0401)h 1 *1 1mm/s (0402)h 2 "(-)(+) 0.01mm 2 (0404)h 1 1 1mm/s 2 (0405)h 1 1 1mm/s (0406)h 1 *1 1% (0407)h 1 *1 1% (0408)h 1 *1 1mm/s (0409)h 1 *1 1% (040A)h 1 2 "(-)(+) 0.01mm 040Ch 2 2 "(-)(+) 0.01mm 040Eh 2 *1 0.01mm *1 31 - 10. 10.1 10.1.1 IO (Rx Ry) IO Rx00Ry00 IO [IN]() PLC Rx00Rx0F Rx10Rx1F CC-Link

Electric Actuator

1 !2 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

1 !2 !3 !

1

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket MY2H X168 Bore size Stroke Auto switch Suffix X417 1 1 1 1 2 1 1 L, H, LS, HS Nil W Z L H LZ HZ Nil W L H With X416 (1 pc.) on only one side With X416 (2 pcs.) (With each 1pc. for both sides) With X416 on one side, X417 on the other side (1 pc.)

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

JXCx-OMY0004

Caution 1.

JXCx-OMT0005CN

1. 2. 3. 4. 4 - JXCD1/ 1. / [][] 1 1.5 *3) *3)1 1 5 - 2 2.1.

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

JXCx-OMY0006

Alarm was generated in order of (1) (5) 0-7 Alarm 1 8 8-15 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) Alarm 2 0 (1) (2) (3) (4) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) 9 (1) to (5) in the table indicates the alarm codes which are generated. Refer to "15.2. Alarm and countermeasures (P.64)" for detailed alarm information. 8-15 Alarm 4 5 Please refer to 20.

5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2