Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

Gasket Body Low tightening torque Tight seal Stainless steel 316 Specifications Applicable tubing material FEP (3) Nylon Soft nylon (1) Polyurethane Super PFA (2) Modified PTFE (4) 3.18/2 4/2.5 6/4 4/2.5 6/4 3.18/2.18 4/2.5 6/4 4/2.5 6/4 4/2.5 6/4 6/4 Applicable tubing O.D.

Rotary Table

1 ( 2 ) C t tdt + = = 2 When 0 = t , rotation angle =0, so the integration constant is C=0. t t 2 1 2 1 2 = = thus, 2 = t 30 - Auto switch type for rotary table The rotary table has a magnet mounted on its piston and an auto switch on the outside of the body to detect the piston position (table position).

PSxx-OMU0008CN

10 1 2466 LCD * -8No.PS-OMU0008CN-D ISE20C X M 2 3 ISE20C -0.100~1.000 MPa Y ZSE20C 0.0~-101.0 kPa K ZSE20CF -100.0~100.0 kPa T ISE20CH -0.100~2.000 MPa 24 X NPN2 A1 A Y PNP2 A3 C R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E

PFA/PFW

unit DIN rail 8-M3 3 x 7.2 ( = 21.6) 36 2-3.4 6.4 15 1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 m30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 7 Series PFA Digital Flow Switch for Air Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70 % PFA5 0-m m (N) 1 5 Sensor Unit 98 56 82 60 42 6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43

•

-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."g',,'-___ : ','(); Pin:t12"",: g= WL idth across fl~tsl 4.7 ./ ClevIS wld!h CK 1A :1 6.s=+P 40 80+ Stroke ZZ+ StJoke 2 CK1B : 195!

HRX-OM-S004

commercial losses) (6) Expenses and compensation not covered in 2.

HEC-OM-S008

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

HRX-OM-W032

commercial losses) (6) Expenses and compensation not covered in 2.

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

Filter for Cleaning Solvent Quick Change Filter Series FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

Free-Mounting Cylinder with Air Cushion Series CU

light 4.3 DC() Blue [Black] 2 Indicator light 20 2.7 2.8 4.6 3.8 3.1 4 6.2 6 Most sensitive position 11

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Flow characteristics Note 1) Port size 12 [32 Note 2)] Flow characteristics Manifold 23 [21 Note 2)] 1, 2, 3 port Cv Cv C[dm3/(sbar)] 0.032 0.070 0.050 0.085 C[dm3/(sbar)] 0.050 0.085 0.032 0.070 b 0.13 0.10 0.26 0.16 b 0.26 0.16 0.13 0.10 10-V114 10-V114A 10-V124 10-V124A 0.007 0.016 0.012 0.020 0.012 0.020 0.007 0.016 10-VV100-S41 type M5 x 0.8 Note 1) Values when manifold base (5 stations

Shuttle Valve/AND Valve with One-Touch Fittings

Note 2) On standard products all brass parts are electroless nickel plated. (Suitable for copper free applications.) Flow Rate and Effective Area VR1220F VR1210F Model Metric size 10 8 6 8 6 4 3.2 Applicable tubing O.D.

PSxx-OMG0001CN

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

Heavy Duty Stopper Cylinder Series RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting spring extended (TL, TM) Double acting spring type (BL, BM) r $0 !1 !

AR Series Modular Type Regulator

Name plate and caution plate for bowl in imperial units: MPa V V V V Z Note 5) Name plate and caution plate for bowl in imperial units: psi Note 6) Note 6) Note 6) Note 6) Note 2) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

LOCK Applicable cable Cord O.D.: 3.5 to 7 (Reference) 0.5mm2 2-core and 3-core wires equivalent to JIS C 3306.

EXxx-OMY0006CN

General diagnostics 2 Table 9-3 General diagnostics 2 Bit 0 Module 1 0: 1:1 1 Module 2 0: 1:2 2 Module 3 0: 1:3 3 Module 4 0: 1:4 4 Module 5 0: 1:5 5 Module 6 0: 1:6 6 Module 7 0: 1:7 7 Module 8 0: 1:8 9.1.1.3.