194 mm, Width: 4 in / 102 mm, Height: 6.14 in / 156 mm, Net Weight: 5.1 lbs. / 2.3 Kg Series Configured Datasheet.

/ 189 mm, Width: 4 in / 102 mm, Height: 6.14 in / 156 mm, Net Weight: 5.1 lbs. / 2.3 Kg Series Configured Datasheet.

/ 189 mm, Width: 4 in / 102 mm, Height: 6.14 in / 156 mm, Net Weight: 5.1 lbs. / 2.3 Kg Series Configured Datasheet.

Air Slide Table Series MXP

x 1 Pilot hole diameter 5.1 320.05 30 D B 2 x M5 x 0.8 Piping port 80.05 W 13 47 4H9 0 +0.030, depth 2 J 8 5 16.5 14.5 Section AA Mounting datum level D B 4H9 0 +0.030, depth 2 QL Q Without magnet and switch rail MXP16-30B 8 2 x M2 x 0.4, depth 3 10.7 8.5 L 2 x M3 x 0.5, depth 3.5 6 x M5 x 0.8, depth 7 20 20 (mm) H J K L M MA Q QL S V W Z Model MXP16-20B 58 93 40 36 40 30 58 22 20 82 65 102

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 to 0.1 MPa 0.05 MPa 102 /min (ANR) Operating pressure differential range IR Recommended press. differential (3) Press. differential setting min. flow VEX 2000 5000 2000 5000 Bowl capacity between levels (cm 3) Turbine oil Class 1(With no additives

ZP

P I: M5 x 0.8 I: M6 x 1 Model A B C D E F K L Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F K L Y G H G H ZPR40B 40 50 43 34 47.5 58.3 76.1 102 92 24.4 53 38 51.5 62.3 80.1 106 25 15 96 32.4 57 48 19 16 ZPR50B ZPR10B 10 13 12 16 25 33.9 50 71 76 5.5 15 18.5 27.5 36.4 52.5 73.5 20 25 78.5 8.7 19 13.8 7.5 5.5 ZPR13B 16 18 20 29 37.9 54 75 80 9.9 21 8.5 ZPR16B Applicable Tubing Applicable

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Female thread One-touch fitting One-touch fitting One-touch fitting Vacuum Entry Port Female thread Common Page 13-11-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible

ZR

Filter case Filter element (ZR1-FZ) Vacuum switch Gasket slot Filter gasket Filter block 13-3-18 18 Series ZR Large Size Vacuum Module: Ejector System Dimensions: ZR1-F Circuit diagram ZR1-FE Spacer A 24.5 2Slitted hole (Mounting hole)1 43 10 23 102 232 102 Indicator light (Red) ZX Vacuum pressure setting trimmer 8 28 Vacuum switch Thickness 1.2 ZR 671 571 31 Spacer A is used to leave space

Title not found

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

3

10 to 1000 L/min 202 20 to 2000 L/min Nil None A Note 8) Yes Note 8) Made to Order: Certificate in both English and Japanese Thread type Option 2 Nil Rc N NPT F G Note 1) Nil No bracket With bracket Note 7) Note 1) ISO228 compliant Port size R Symbol Port size Rated flow range 501 102 202 04 1/2 V V 06 3/4 V Note 7) Each option is not assembled with the product, but shipped together.

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

VDW30/40-XF

Note 2) For low vacuum specifications, the operating pressure range is 1 Torr (1.33 x 102 Pa) to 0.6 MPa. Please consult with SMC if using below 1 Torr (1.33 x 102 Pa). Some leakage is permitted, so avoid use in situations where a vacuum must be maintained, such as in leak testing. Note 3) The surge pressure must be under the maximum operating pressure.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Particle generation has been reduced to 1/20 compared to series 12-CY1B (previous SMC product) even without vacuum suction. 105 Particle concentration (particles/m3) 104 Class M3.5 [Class 100] 103 Class M2.5 [Class 10] Stainless steel linear guide (specially treated) 102 The specially treated linear guide achieves low particulate generation, high linearity and high precision.

Thermo-dryer

) 28.3 (800) Air flow capacity scfm (L/min [ANR]) Model IDH4 IDH6 68 (20) 1.36 37.4 (3) 0.50 77 (25) 1.24 41 (5) 0.67 86 (30) 1.11 44.6 (7) 0.85 95 (35) 1.00 50 (10) 1.00 104 (40) 0.87 Data Ambient Temperature Data Inlet Air Pressure B D Inlet air pressure psi (MPa) Correction factor Inlet air pressure psi (MPa) Correction factor Ambient temperature F (C) Correction factor 44 (0.3) 0.72 102

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

Refer to pages 102 to 106 for actuators with auto switches. Operating range and hysteresis How to change the auto switch detecting position Auto switch mounting Auto switch adjustment D53

Series PFMC 3-Color Display Digital Flow Switch

Port size Rated ow range 501 102 202 04 1/2 V V 06 3/4 V Note 7) Each option is not assembled with the product, but shipped together.

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

Note 2) For low vacuum specifications, the operating pressure range is 1 Torr (1.33 x 102 Pa) to 1.0 MPa. Please consult with SMC if using below 1 Torr (1.33 x 102 Pa). Flow Characteristics Water Air 12 (INN.C.) Orifice dia. (mm ) Port size 12 (INN.C.)

psi (0.15 to 0.7 MPa)15 to 102 psi (0.1 to 0.7 MPa)22 to 145 psi (0.15 to 1.0 MPa)15 to 145 psi (0.1 to 1.0 MPa)14 to 122F (?

psi (0.15 to 0.7 MPa)15 to 102 psi (0.1 to 0.7 MPa)22 to 145 psi (0.15 to 1.0 MPa)15 to 145 psi (0.1 to 1.0 MPa)14 to 122F (?