AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

ZX

Operating pressure range Operating temperature range Filtration efficiency Element Weight ZX ZR ZM ZH Vacuum Pressure Switch Unit/ZSE2, ZSE3, ZSP1 Refer to page 13-2-13 to 13-2-18 for details.

REA/REB

REAR25, 32, 40 REAR20 REAR15 REAR10 10 11 12 13 14 15 16 17 18 REAR40 REAR32 REAR25 REAR20 REAR15 REAR10 Deflection (mm) 1 2 3 4 5 6 7 8 9 1000 2000 3000 4000 5000 0 Stroke (mm) The above deflection data indicate values when the external slider has moved to the middle of the stroke. 10-2-18 18 Series REAR Model Selection 4 Caution on Design 3 Body Non-rotating Accuracy and Max.

Metal Seal/Rubber Seal Series VQ Body Ported

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Stainless Steel 316 Fittings

Length Stainless steel 316, Special FKM TJG-0402 TJG-0425 TJG-0403 TJG-0604 TJG-0805 TJG-0806 TJG-1065 TJG-1075 TJG-1008 TJG-1208 TJG-1209 TJG-1210 TUS0425 TUS0604 TUS0805 TUS1065 TUS1208 18 18 18 19 20.5 20.5 23 23 23 24 24 24 M-5G3 Gasket 4 KQG223-P01 KQG206-P01 KQG208-P01 KQG210-P01 KQG212-P01 KQG216-P01 3.2, 4 6 6 8 8 Stainless steel 316 Bulkhead nut 10 10 12 16 12 Stainless

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

REA/REB

REAR25, 32, 40 REAR20 REAR15 REAR10 10 11 12 13 14 15 16 17 18 REAR40 REAR32 REAR25 REAR20 REAR15 REAR10 Deflection (mm) 1 2 3 4 5 6 7 8 9 1000 2000 3000 4000 5000 0 Stroke (mm) The above deflection data indicate values when the external slider has moved to the middle of the stroke. 10-2-18 18 Series REAR Model Selection 4 Caution on Design 3 Body Non-rotating Accuracy and Max.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Calle 18 69-05 Apart.

ZR

, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

KA

Calle 18 69-05 Apart.

5 Port Solenoid Valve, Series VQC

B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM spec. Positive COM spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special wiring specifications (options) COM () (+) 26 Positive COM spec. Negative COM spec.

SMC Pneumatic Clean Series

200 36.4 2 20 1815.5 12 5 13 8 27 5 26 Up to 150 30.4 2 N P X ZZ 14 10 8 6 16 13 12 11 10 10 10 10 94 83 77 75 30 26 22 20 11 9 9 7 32 24 22 18 26 21 18 15 37 1/8 55 135 33 1/8 45 117 29 1/8 44 111 27 1/8 38 104 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 5.5, 9.5 counterbore depth 6 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 18 18

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Large Size Vacuum Module: Series ZR

ZR1-SR2-82-A(a set of four threads) For nozzle size 18, 20 ZR1-SR2-86-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For

ZP

Model Size C10 A 10 ZP10C B 12 C 4 D 13 E F Y 1.7 7.7 7.7 8.2 9.5 9.5 10 13.7 14.7 12 12 12.5 14 14 14.5 18.5 19.5 3.8 ZP10U to 50U C13 13 ZP13C 15 4 13 1.8 C16 16 ZP16C 18 4 13 1.2 C20 20 ZP20C 23 4 15 1.7 C25 25 ZP25C 28 4 15 1.8 C32 32 ZP32C 35 4 15 2.3 C40 40 ZP40C 43 7 18 3.3 C50 50 ZP50C 53 7 18 Deep (D) ZP10D to 40D Model Size U02 A ZP02U B 2.6 C 1.2 D E F Y 2 4 6 8 10 13 16 20 25

Parallel Style Air Gripper Series MHZ

22 8 12 18 22 8 12 18 22 60 135 270 470 70 145 290 515 70 140 290 515 17 45 66 104 Double acting Single acting type, Normally open Normally closed Normally open Single acting Single acting type, Normally closed 13 38 57 85 MHZ MHF Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

C92

18 22,5 31 10 10 11 11 15 15 18 20 10 12 12 16 16 20 25 32 5,5 5,5 6,6 6,6 9 9 11 14 38 41 50 52 66 76 94 118 51 54 65 67 86 96 124 156 10 10 14 14 18 20 28 34 21 24 33 37 47 55 70 97 4 4 6 6 6 6 18 23 18 22 30 35 40 50 60 88 26 28 32 40 50 60 70 90 31 35 45 50 60 70 90 126 32 36 45 50 63 71 90 115 8 10 12 12 14 15 20 25 32 40 50 63 80 100 125 160 1.12-8 ISO Cylinder/Standard: Double Acting

KC

Calle 18 69-05 Apart.