XM, XY

How to Order XMH XYH 16 25 Angle type In-line type q w e w Flange type XMH q Flange size XMH XYH Symbol Nil C Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Type KF (NW) CF Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 e Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Seal material

Cylinder with Lock Series CNG

HS Auto switch 8.5 12 24.5 16 A B A B 26 33 D-H7, D-H7W D-H7F, D-H7BA D-C73C, D-C80C Approx. HS Approx. HS Auto switch Auto switch 8.5 8.5 16 16 A B A B 29 (36) 36.7 Numbers inside ( ) are for type D-H7LF. D-H7C D-B5, D-B6, D-B59W Approx. HS Approx.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

I/O Configurator (NFC version)

bytes) Increase and decrease by 16 points. 128 points/ 16 bytes Available b) Input size 0 to 128 points (0 to 16 bytes) Increase and decrease by 16 points. 128 points/ 16 bytes Available c) Output size Slave unit setting The valve output size is included in the output size of each station.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 +0.027 0 +0.027 0 +0.027 0 +0.027 0 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30

e-Rodless Actuator

, 25 How to Order Cam follower guide type E-MY2C 16 N 100 TA M9B Nominal size Number of auto switches 16 25 Nil S n 2 pcs. 1 pc. n Stroke Refer to the standard stroke table.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

VQ5000

VQC SQ VQ0 O-ring connector Lever Note) Do not pull on the lead wires with excessive force. This can cause faulty and/or broken contacts.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63

Compact manifold regulator ARM5 Series

8, 5/16 5 13.5 21 38.5 Note) The O-ring is attached.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper

C76

Screw the locking ring into the switch (do not tighten with pliers, hand tishten only). Lead Wire with Connector Length 0.5 m 3 m 5 m Part no.

C76

Screw the locking ring into the switch (do not tighten with pliers, hand tishten only). Lead Wire with Connector Length 0.5 m 3 m 5 m Part no.

,,: ,.

'v8 sl8-24 7t't6 .98 .125 3/16 114 3ta-24 9/16 1 . 1 7 .125 1t4 1te 7t16-20 7116 1.O4 .189 1t4 114 7t16-20 9/16 1.25 .189 1t4 3/8 7t16-2016 .189 1t4 1t2 7 t16-20 718 1.54 . 1 8 9 5/16 1t8 1/2-20 1/2 . 1 4 .220 5/r 6 'l 14 1t2-20 9/16 1.32 .220 5/16 318 'lt2-20 1 1 / 1 6t.!

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

53.4 7.6 17.2 49 47.6 17 22.5 12 16.1 17 21.5 24 7.8 16.2 16.4 AS2052FS-09 5/16" 15.2 13.5 57.2 8.5 18.1 49.9 48.5 19 18.4 AS3002FS-07 1/4" 13.2 12 4.5 8 16.6 20 59 9.8 21.7 55.7 54.3 21.8 25 12 20.5 17 24.5 28.5 9.3 19.2 23.6 AS3002FS-09 5/16" 15.2 13.5 65 19 26 AS3002FS-11 3/8" 18.5 16 69.8 21 38.1 AS4002FS-11 3/8" 18.5 16 4.3 8 18.8 26 76.9 11.3 23.7 64.3 62.7 28 33 14 26.2 21 26

Compact Cylinder

M10 x 1.25 6 14 26 19 17 16.5 16 M10 x 1.25 6 14 26 19 19 19.5 20 M12 x 1.25 7 17 30 22 19 19.5 20 M12 x 1.25 7 17 30 22 Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 32 40 50 63 51 44 12 16 46 8.5 M8 x 1.25 59 2 14 7 32.5 5.5 M6 x 1.0 9 14.5 11 5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3