PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

Digital Flow Switches Series PF2A

unit Resistance Output Note 2) specifications Voltage output 1 to 5 V (within the flow rate range) Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.

3 Port Solenoid Valve Metal Seal Series VZ200 1

x 0.8 (Pilot EXH) DIN terminal: VZ4 5-D(Z)L plug connector: VZ4 5-L(Z)01 02 1 2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10

IIIIIIIIII

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

MGG

9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

EX600-WEN_WSV.eng

Forced output mode 3 2 1, Boulevard de Strasbourg, Parc Gustave Eiffel Bussy Saint Georges F-77607 Marne La Vallee Cedex 3, France 2 24 V (Output) 2 24 V (Output) 1 2 OFF Base is not registered. 4 5 4 1 0 V (Control and input) 3 0 V (Control and input) MS Base system status Green LED is ON. Remote is normal. Red LED flashes. 3 3 Restorable error is detected.

EXxx-OMV0028.eng

Hardware failure) 1 24 V (Output) 1 24 V (Output) HUNGARY (36) 23 513 000 OFF PROFINET communication is established. 2 0 V (Output) 2 0 V (Output) Torbgy u. 15-19, 2045 Trkblint, Hungary 3 2 PROFINETcontroller settings and EX600 configuration data do not match. 24 V (Control and input) 24 V (Control and input) 1 2 Red LED flashes. 3 3 4 5 4 1 Red LED is ON.

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

MGC

) B54 100 V, 200 V Yes Yes 24 V B73C C73C 12 V 2-wire Diagnostic indication (2-color indication) PLC (B59W) B59W Grommet G79 H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) Grommet K79 K79C 2-wire 12 V Connector Relay, PLC 3-wire (NPN) IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 3-wire (PNP) Grommet 2-wire Water

Dedicated Controller Series LC1 Uniaxial Type

to 50C 5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric energy 180VA 640VA 300VA 300VA 640VA 100VA 300VA 640VA 640VA 300VA 180VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return function Maximum positioning point setting With magnet switch as adjacent switch, and encoder Z phase signal as home position

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

MLGC

5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 5 V, 12 V IC circuit 4-wire (NPN) Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) H73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 9-

MLGC

5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 5 V, 12 V IC circuit 4-wire (NPN) Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) H73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 9-

PSxx-OMG0001CN

050 -1060 () 3585RH() AC1000 V 1 50 M(DC500 V) 0.5%F.S. (25 ) PSE35P4PPSE3T PBTPBT(PSE3)PPE(PSE3T) PSE385 g PSE330 gPSE3T50 g 5 4.1 2 m 2 0.2 mm 1.12 mm CEUL/CSARoHS [mA] [V] A B E 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 0100 kPa 0 100 kPa -10 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa C D F 02 kPa 0 2 kPa -0.2 kPa -32No.PS-OMG0001CN-H 4

Digital Flow Switches, Series PF2A, Series PF2W

View A 1 2 3 4 5 6 7 8 Analog output 1 to 5VDC 8 7 6 5 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Max. measured flow rate value Real-time flow rate [l/min] Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Standard condition Standard condition Basic condition Basic condition Minimum measured Maximum measured

VQ5000

How to order manifolds U side VV5Q 5 5 08 03 C 5 W n Base mounted Plug-in Kit designation 1 2 4 3 1. Stations 5.

S070

Stations 02 03 2 stations 3 stations Station 3 2 1 D side U side 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valves S070 A 5 B G Electrical entry Body type Body type Base mounted with clips G C Grommet Plug lead with light/surge voltage suppressor Symbol A Coil voltage Power consumption Pressure specification Flow rate 5 6 V S R 24

HRX-OM-Y098

mode [MODE] . 5-12 RUN/STOP display . 5-13 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status screen . 5-15 5.4.4 Information screen . 5-17 Alarm reset . 5-18 HRL Series HRX-OM-Y098 Contents Alarm name .5-18 Alarm log record.5-19 Display of alarm/maintenance reminder .5-20 5.4.5 Check operation time screen and maintenance reminder .5-21 Setting the usage time of DI filter.5-23 Setting

Series SY100 3 Port Solenoid Valve Rubber Seal

For manifold type 30, 31 VP Standard SY1 3 5 L 1 M3 VG : Body ported (Cv: 0.008) VP Standard SY1 4 M 5 1 (Cv: 0.008): Base mounted VQ 3 port Piping port Rated voltage VQZ For DC M3: With sub-plate : Without sub-plate 5 6 V S R 24V DC 12V DC 6V DC 5V DC 3V DC VZ VS Sub-plate style For manifold type S41 For AC (50/60Hz) 1 2 3 4 100V AC 200V AC (With gasket and screw) 110V AC [115V AC] 220V

VQ4000

W Dust proof Dust tight, Jet proof V V 1.11-5 Series VQ4000 Plug-in Conduit terminal 0 1 2 position single: VQ410 l 23.5 23.5 50 158 50 90 108 158 Indicator light 11 (A port) 11 (B port) (12.5) 5 3 (12.5) 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 25.6 Mounting hole 14 5 1 3 12 30 45 25.6 Mounting hole 5-Rc1/4, 3/8 (R1, R2=Rc1/4) Manual override Bottom piping SMC (A, B port