SMC Corporation of America
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I Accessories .10 How To Order ffi-ffi I L_ 1D ft tead wire Switch 9rffix _ -With two switches S-With one switch x Action (Double acting) x%" Stroke: S type only Type 90-D-90(1.5 ft. lead wire) 90AD-90A 97-D-97 93A-D-93A Without switch (built in magnet) End Thread With thread B Without thread B _Nose *D _Clevis mount F -Flange Mount L -Foot mount *T rTrunnion mount 'Auto switch capability

C O M (OV) E +1224V F 0V G H 5-2 CEU1 CEU2 CEU5 CEU*3 +12V +12V COM +12V +12V COM +12V DC12V60mA .. 16 5-3 CE1-R20m CE1-H0374 CE1-R 20m CE1-H0374 CE1-H0374-1 CE1-H0374-2 CE1-H0374 CE1-H0374 CE1-H0374-1 CE1-H0374-2 20.5m 20.5m U 25mm *400 1 100 / 5-4 (1)CEU1CEU2CEU5 CE1-R**, 17 (2) (3)SFC-10 (4) (5)TDK ZGB2203-01U (6)CEU1CEU2CEU5 (7)CEU1(P)-D EMC (2004/108/EC

U D 1 -12No.VFR2000-OMM0001 01F D COM A B 1)8 2)+COM -COM 3)D U D 1 -13No.VFR2000-OMM0001 () X () (R) () (PE) -14No.VFR2000-OMM0001 NO 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7

-06 -24 -28 -12 -16 -08 10 Pressure drop (kPa) -30 10 100 1000 1 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Viscosity: 45 mm2/s Filter material: Micromesh Nominal filtration: 74 m to 149 m 498 Vertical Suction Filter FHIA Series How to Order FH I A N 04 M M R 074 Vertical suction filter Relief valve Hydraulic fluid R D N W V With relief valve None (Blanking plate) Petroleum

" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

Detection of communication error in A to D on the input side due to the broken fuse of the Input block. Input block open fuse surveillance Operator R R Refer to PROFIBUS specifications and manual of the master, etc. for how to refer to diagnosis information on the master.

When the pilot solenoid valve is energized (or when pressurized air enters through the 10(P2) port of the air operated style), the valve body closes. w e Plate assembly Valve element Valve cover Piston assembly Return spring Pilot solenoid valve Stainless steel r 32A to 50A are O-ring. NBR, FKM t Aluminum alloy Piano wire y u i Note) et components determine the valve composition.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

9.5 9.5 10.5 D-G5l/K59/G59F D-G5lW/K59W D-G5NT/G5BA 5 6 6.5 6.5 7 D-A3l/A44 D-A3lC/A44C 9 10 11 11 11 D-A5l/A6l D-B5l/B64 D-A59W 13 13 14 14 15 D-B59W 14 14 17 16 18 D-G5NB 35 35 40 40 40 D-G39/K39 D-G39C/K39C 9 9 10 10 11 D-P3DWA 4.5 4.5 5.5 5.5 5.5 D-P4DW 4 4 4.5 4 4.5 * Values which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30%

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

4-7-17 2 Series VT325 Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet Port size C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

Minimum Auto Switch Mounting Stroke (mm) (mm) Auto switch model Auto switch model D-F7W Bore size (mm) D-A9V D-A9 D-F9W D-F9V D-F9WV D-M9 D-A7 D-F9BAL D-A7H D-A80H D-F7 Number of auto switch D-J79W D-A8 D-F7V D-J79C D-F7WV Bore size (mm) D-A79W D-F7LF D-P5DW D-F7BAL 5 15 15 10 2 pcs. 10 10 25 D-A73C D-A80C D-F7BAVL 12 to 25 Number of auto switch D-F7NT D-J79 5 15 15 5 1 ps. 10 10 25 D-F79F

Different sides Same side Different sides Same side 50 + 45 (n 2) (n = 2, 3, 4, 5 ) D-C7 D-C8 15 50 10 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) (n = 2, 3, 4, 5 ) 15 60 10 Caution D-C73C D-C80C D-H7C 15 + 50 n 2 2 When operating a cylinder for the first time, make sure to release the air at low pressure.

"Z") 84.5 ( Without "Z": 66.5) 36.5 75.5 (Without "Z": 57) 2(A) port 24 32 40 119 Pilot EXH 14 3(R) port 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 19 1 3 Manual override 9 23 1(P) port 3(R) port DIN terminal VFN212N-l D (Y)ll-02l-D-l 216 19 23 2(A) port Indicator light (With "Z") Applicable heavy-duty cord O.D. 6 to 8 Pg 9 84.5(Without "Z": 66.5) 36.5 75.5(Without "Z": 57) 24 SMC 32

58.0 35.5 55.0 32.5 56.5 33.5 53.0 30.0 CC 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.0 36.5 63.5 33.0 RB Auto switch model Bore size (mm) Operating Range Auto Switch Mounting Height D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-B5 D-B64 D-B59W D-G5NTL D-H7C J 20 25 32 40 D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C7/C80 D-C73C/C80C D-C73C D-C80C D-A44 8 10 9 10 D8 10 9 10 D-B5/B64 13 13 14 14