SI Unit for Vacuum Manifold

L/A1 LED and L/A2 LED Table. 7-2 L/A1 LED and L/A2 LED L/A1 L/A2 Description Green ON --The SI Unit is connect to Ethernet via BUS IN/Port 1. Orange ON --The SI Unit is transmitting or receiving Ethernet data via BUS IN/Port 1. --Green ON The SI Unit is connect to Ethernet via BUS OUT/Port 2. --Orange ON The SI Unit is transmitting or receiving Ethernet data via BUS OUT/Port 2.

Fieldbus system EtherNet/IP compatible SI Unit

(When L/A port1 LED is OFF.) L/A port1 or L/A port2 LEDs are OFF.

HRX-OM-W032

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

“

IR1210-A Flow rate: Up to approx. twice 0.4 (Compared to the current SMC product) [L/min (ANR)] IR Current model Series 0.3 Set pressure [MPa] Current model IR1010 720 320 IR1200-A Approx. twice 0.2 1900 940 IR2200-A 5000 4000 IR3200-A 0.1 Supply pressure: 0.7 MPa 0 720 320 Flow rate [L/min (ANR)] Supply pressure: 0.7 MPa 772 Regulator IR1200-A/2200-A/3200-A Series Weight Reduced by up to

PF3A8xxH.eng

[P_1] Set value of OUT1 500 L/min 1000 L/min Used as switch output device Used as IO-Link device [H_1] Hysteresis of OUT1 50 L/min 100 L/min Units display (Temperature value) Indicates the flow measurement units currently selected.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Pilot valve specifications Electrical entry Y U L N 1W 0.5W Large flow capacity L : Plug lead type L type plug connector, with lead wire, with indicator light and surge voltage suppressor LO: Plug lead type L type plug connector, without connector, with indicator light and surge voltage suppressor M : Plug lead type M type plug connector, with lead wire, with indicator light and surge voltage

MU

Data Clevis Pin, Knuckle Pin Rod End Nut l Bore size (mm) Bore size (mm) l d B Dd9 H L C D d Part no.

Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

Angle Seat Valve /

Indicator Insulated adapter (PPS) Set Nil No L Yes O-ring (FKM) Port size Pressure type Thread type Symbol Port size Symbol Pressure type Symbol Thread type Nil Standard H High pressure 03 3/8 04 1/2 06 3/4 Nil Rc A G B NPT Component Parts a Housing assembly 1 pc. b Mounting screw: M5 hexagon socket head cap screw 2 pcs.

MU

Data Clevis Pin, Knuckle Pin Rod End Nut l Bore size (mm) Bore size (mm) l d B H Dd9 L C D d Part no.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Air Cylinder/End Lock Series MBB 32, 40, 50, 63, 80, 100 How to Order MBB L 32 50 H N Standard H N L 32 50 A53 MDBB With auto switch Number of auto switches Built-in magnet S 3 n 2 1 3 n Mounting Manual release Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size N L Non-locking Locking 32 40 50 63 80 100 Without auto

Series VCL

J L Bracket part no.

Profile Design ISO/VDMA Air Cylinder Series CP95

G Rear flange F Front flange L Foot C Male rear clevis D Female rear clevis 1.8-29

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

J L Bracket part no.

VZ1000

(Values at the initial period) Option Solenoid Specifications Grommet (G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D) 100, 200, 24, 48, 110, 220 Electrical entry AC 50/60 Hz DC Made to Order Specifications (For details, refer to page 3-3-85.)

CG5-S

m L H1 B1 Metric (mm) (mm) Part no.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.