Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: G (G), Port Size: 01 (1/8), Applicable Tubing O.D: 08 (ø8)

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 01 (1/8), Applicable Tubing O.D: 09 (ø5/16")

Series GS40 Digital Pressure Sensor 1

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: (R Thread or In-Line Type), Port Size: 01 (1/8), Applicable Tubing O.D: 08 (ø8)

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 01 (1/8), Applicable Tubing O.D: 07 (ø1/4")

Process Pump

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.

1

P CXWM10, CXWL10 4-J Herical insert thread depth K F P 4-M4 x 0.7 Helical insert thread depth 6 CXWM16 CXWL16 F 25 35 32.5 37.5 42.5 55 67.5 80 F 34.5 47 53 53 65.5 78 90.5 103 P 25 30 60 75 90 90 90 90 P 52 52 65 90 90 90 90 90 I I CXWM10 CXWL10 Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm F 21 26 26 26 F 35.5 38

IZ-OMU0031-CN

1]OUT1[F 2]OUT2 P_1 H_1 [kv] ON OFF [] <> 1 [P_1] -16No.IZ*-OMU0031 1 1 [P_2] -17No.IZ*-OMU0031 2[F 0] [F] 2 2 [F 0] 0.4 kV 19 [F 1] OUT1 [F 2] OUT2 20 OUT1+0.2 kV OUT2-0.2 kV 0.04 kV [F 1] OUT1 ON OFF 21 [F 3] 25 mm 22 [F 4] 1 23 [F 5] ON 24 [F 6] OFF 25 [F98] OFF 26 [F99] OFF 27 -18No.IZ*-OMU0031 [F 0] <> [F 0] [F 0] -19No.IZ*-OMU0031 [F 1] OUT1 OUT1 ON OUT1ONOFF

PF-OMN0011_C

1]OUT1(26)[F 2]OUT2(34) -21No.PF-OMN0011CN-C 3 1 [P_1][n_1] 1 1 OUT1OUT2[P_2][n_2] [ tn][ tp] [F 1]OUT1(26)[F 2]OUT2(34) 28 (23 ) -22No.PF-OMN0011CN-C 2 [F 0] [F] 2 2 [F 0] 25 4 L/min [F 1] OUT1 26 ON OFF 50% 5% ON OFF [F 2] OUT2 34 () ( ) ON OFF 50% 5% OUT1 -23No.PF-OMN0011CN-C [F 3] 40 1 [F10] 41 [F20] 45 [F22] 46 OFF [F30] 48 OFF [F80] 49 () [F81

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 34 [Twist Selector (2 Position)], Suffix: R (Push Button Selector Color Red), Accessory: F [Foot Bracket (Internal Pilot Type Only)]

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.1 to 1.0MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 36 [Key Selector (2 Position)], Suffix: None [Or Polyacetal (Std) in Case of Roller Material), Accessory: F [Foot Bracket (Internal Pilot Type Only)]

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 30 [Push Button (Mushroom)], Suffix: G (Push Button Selector Color Green), Accessory: F [Foot Bracket (Internal Pilot Type Only)]

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 02 (One-way Operation Roller Lever), Suffix: S (Roller Material Hard Steel), Accessory: F [Foot Bracket (Internal Pilot Type Only)]

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 33 [Push Button (Flush)], Suffix: None [Or Polyacetal (Std) in Case of Roller Material), Accessory: F [Foot Bracket (Internal Pilot Type Only)]

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 08 (Toggle Lever), Suffix: None [Or Polyacetal (Std) in Case of Roller Material), Accessory: F [Foot Bracket (Internal Pilot Type Only)]

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 34 [Twist Selector (2 Position)], Suffix: B (Push Button Selector Color Black), Accessory: F [Foot Bracket (Internal Pilot Type Only)]

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 05 (Straight Plunger), Suffix: None [Or Polyacetal (Std) in Case of Roller Material), Accessory: F [Foot Bracket (Internal Pilot Type Only)]

Body Option: Internal Pilot, Port Size: NPT1/4, Style: 36 [Key Selector (2 Position)], Suffix: None [Or Polyacetal (Std) in Case of Roller Material), Accessory: F [Foot Bracket (Internal Pilot Type Only)]

Body Option: Internal Pilot, Port Size: NPT1/4, Style: 30 [Push Button (Mushroom)], Suffix: Push Button Selector Color Green, Accessory: F [Foot Bracket (Internal Pilot Type Only)]