80 90 75 20 2 Same side 75 55 80 90 Caution 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides D-A44C q Socket wrench should be used when mounting bracket are replaced.
. 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display
LES L Foot F Rod flange*2 G Head flange*2 *4 D Double clevis*3 A 10* LEPY LEPS B 15* C 20* LER * Produced upon receipt of order (Robotic cable only) *1 Mounting bracket is shipped together, (but not assembled). *2 For horizontal cantilever mounting with the rod flange, head flange and ends tapped, use the actuator within the following stroke range.
Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot
Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot
PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -28No.PF-OMN0009CN-F PF3W504 PF3W520 PF3W540 PF3W511 PF3W521 195 g 245 g 395 g 705 g 875 g 270 g 320 g 515 g 840 g 1060 g 295 g 345 g 595 g + 370 g 415 g 715 g +85 g 1323mPas(3 cP) 31 235 390(7s 4,AC250V G ()JIS B0202(ISO228-1) ISO1179-1(G )ISO16030(G )JIS B0202(ISO228-1) ISO11791(G ) () ISO1179-1 ISO1179-2 ISO1179-3 ISO1179-4 () ISO16030
4 94 16 32 10 M10 x 1.25 6 M6 x 1 13 G 1/8 4 12 15 30 Up to 1000 22 213 30 9 5 4 105 16 37.5 13 M12 x 1.25 6.5 M6 x 1 14 G 1/4 4 16 17 35 Up to 1000 24 244 37 10.5 6 4 106 16 37.5 17 M16 x 1.5 8 M8 x 1.25 15.5 G 1/4 5 20 24 40 Up to 1000 32 259 37 12 9 4 121 16 45 17 M16 x 1.5 8 M8 x 1.25 16.5 G 3/8 5 20 24 45 Up to 1000 32 300 46 14 11.5 4 128 17 45 22 M20 x 1.5 10 M10 x 1.5 19 G 3/8 25
Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface
Approx. 80 g Cable with Connector #4 PCA-1557769 Cable with M12 connector (4 poles) 14.8 14.8 3000 44 46.8 Terminal no.
([n_2]) 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. [F 2] OUT2 -38No.PF-OMM0004-D c. Add/dEC OUT1 (31 ) OUT1 OUT1 ( [n2AH]) ( [n2dH]) 3 1 3 6 6 1 6 3 1 1 4. [F 2] OUT2 -39No.PF-OMM0004-D d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.
Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !
Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !
Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H effective thread depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.
Rubber Bumper 1 1 Return Spring Steel 1 Zinc Chromate 1 0 Spring Guide Aluminum Alloy 1 Chmmate Auto Switch I Magnet 1 7 Bolt Stainless Steel Bore g e7t"" Borc O %" Alloy Sleel 4 Nickel Plating Borc A 11,4" -4" Bushing Oil lmpregnated Bronze 1 Bore g s7,u" -1'^u' Bronze Casting 1 Bore F 1%" -4" 5 Piston Rod Stainless Steel 1 Urcge/16"-11/16' Carbon Steel 1 B,orc A 1%" -4" 4 Piston Aluminum
Rubber Bumper 1 1 Return Spring Steel 1 Zinc Chromate 1 0 Spring Guide Aluminum Alloy 1 Chmmate Auto Switch I Magnet 1 7 Bolt Stainless Steel Bore g e7t"" Borc O %" Alloy Sleel 4 Nickel Plating Borc A 11,4" -4" Bushing Oil lmpregnated Bronze 1 Bore g s7,u" -1'^u' Bronze Casting 1 Bore F 1%" -4" 5 Piston Rod Stainless Steel 1 Urcge/16"-11/16' Carbon Steel 1 B,orc A 1%" -4" 4 Piston Aluminum
size (mm) Stroke range (mm) EB F HB IA IB NN NN EA A 26.5 B 17 B 22 12 16 20 25 M4 x 0.7 8-32UNC 4-40UNC M3 x 0.5 25 24 5 3 32 31.5 5 to 30 4-40UNC M4 x 0.7 8-32UNC M3 x 0.5 5 to 30 26.5 17 31.5 22 29 28 5 3 38 37 1/4-20UNC M4 x 0.7 6-32UNC M6 x 1.0 5 to 50 32 19.5 42 29.5 36 34 5.5 4 47 45.5 5 to 50 1/4-20UNC M6 x 1.0 M5 x 0.8 10-32UNF 35.5 22.5 45.5 32.5 40 38 5.5 5 52 50.5 Bore size
Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: CE Marked
02 N01 N02 F01 F02 C4 C6 C8 N7 4 8 () Rc Rc NPT 1/8 NPT 1/4 G G 6 1/4 (5/32") (5/16") 1/8 1/4 1/8 1/4 95 g 125 g 55 g 105 g 135 g 65 g 135 g 165 g 95 g 145 g 175 g 105 g LCPPBT()HNBR() FKM()SiAuSUS()304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F
1 Metering Valve with Silencer Series ASN2 Superior sound reducing performance Over 20 dB at max. flow rate Cylinder speed easily set Shape of needle is the same as that of speed controller Retainer prevents accidental loss of needle Model Model Port size Effective area (mm 2) Weight (g) ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 M5 x 0.8 10-32 UNF 1.8 1.8 3.6 6.5 16.6 24.5 5 5 17
4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !