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Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5 232 262.5 273 10 227 249.5 275

(0.3) 12.6 (0.7) 14.4 (0.8) 14.4 (0.8) 16.2 (0.9) 62 Series VQ1000/2000 How to Order Manifolds VV5Q 1 08 C6 GU0 2 Options Series Stations Symbol Nil VQ2000 specifications None Back pressure check valve on all stations Note 2) VQ1000 specifications None Back pressure check valve on all stations Note 2) Symbol Nil Symbol Stations 1 2 VQ1000 VQ2000 Symbol Stations 02 2 stations B B 16 16

AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...

Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2

In-line type 0.1 0.3 1-A 2-B 1-C 2-A 2-B 1-A 2-B 2-A 2-B 2-B 2-B 2-B 2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS421F (26) AS431F (24) AS4200 (26) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS420 (102

JAS Series How to Order Port size M3 M3 x 0.5 M5 M5 x 0.8 U10 10-32UNF JAS L E A 04 M5 JAS L E A S 04 01 Seal method Type L Elbow Nil Without sealant S With sealant Control type1 Port size E Meter-out S Meter-in 01 1/8 1 Meter-out and meter-in types can be visually identified by the color of the knob.

AS4002F-11 AS4002F-13 AS-31B AS-32B AS-33B AS-34B AS-35B AS-34B 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 AS-33B AS-36B AS-32B AS-37B AS-38B M3 4 M3 4 AS-34B AS-36B AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 4 M4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautionswhenoptionsareordered ThreadedstudsformanifoldarenotincludedwhenL-bracketandDINrailmountingbracketareordered.Pleaseorderthemaccordingtothenumberofstations

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

How to Order AS 2 2 0 1F G 01 06 W2D Flame resistant flat head screwdriver adjustable Body size 2 1/8, 1/4 standard 3 3/8 standard 4 1/2 standard Applicable tubing O.D.*1 Metric size 06 6 08 8 10 10 12 12 Elbow Control method 0 Meter-out 1 Meter-in *1 For selecting applicable tubing O.D., refer to the Model shown above.

-X224 WR110-02-X215 Inlet pressure: 0.6 MPa Inlet pressure: 0.8 MPa 0.4 0.3 0.4 0.5 0.6 0.7 0.8 Outlet pressure [MPa] Outlet pressure [MPa] 0.3 0.2 0.1 0.2 0.1 Flow rate [L/min] 0 0 Flow rate [L/min] 0 0 1 2 3 4 5 6 1 2 3 4 5 6 Dimensions Construction 40.5 e w u 40.5 y IN OUT r M30 x 1.5 Panel cut dimension 30.5 q t Component Parts No.

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.