HRX-OM-W002

26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25 26 27 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 20 20 1 10 12 1 13 4 15 3 16 15 16 18 1 23 4 8 4 3 24 24 3 2 14 (CN6) BL

Thermo-chiller/Rack Mount Type

1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

CRQ2

, 30, 40 (mm) (mm) (mm) Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 Size 10 15 20 30 40 X 2 to 18 2 to 20 Size 10 15 Size 10 15 CRQ2 Y 1 to 9 1 to 10 X 2 to 18 2 to 20 MSQ MRQ Symbol: A20 Symbol: A21 Symbol: A22 The long shaft can be further shortened by machining it into a stepped round shaft with a double-sided chamfer.

HRX-OM-X084

) 20 *1 It is not possible to select only option D.

HRX-OM-X071

1-5 1.7 Waste Disposal . 1-6 1.7.1 Disposal of refrigerant and compressor oil . 1-6 1.7.2 Disposal of product . 1-6 1.8 Material Safety Data Sheet (MSDS) . 1-7 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.1.1 HRR050-A/W-20. 2-1 2.1.2 HRR050-A/W-40. 2-2 2.2 Name and Function of Parts . 2-3 2.2.1 HRR050-A-20/40(Air cooled type) . 2-3 2.2.2 HRR050-W-20/40(Water

MLGP

25 20 20 1 1 10 50 100 200 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) (16) Over 50 Stroke V = 400 mm/s (15) 50 Stroke or Less V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 32 32 25 25 1 20 20 1 10 50 100 200 0.7 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) 9-11-12 12 Compact Guide Cylinder

MLGP

25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 9-11-15 15 Series MLGP Horizontal Mounting (Ball bushing bearing) (29) l2 = 50 mm V = 200 mm/s (30) l2 = 100 mm V = 200 mm/s MLGPL20/25 MLGPL20/25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300

T

Burst Pressure Characteristics Curve and Operating Pressure How to Order 5 TPS0604 B 20 4 Burst pressure (MPa) Tubing model Burst pressure 3 Color Length per roll Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20 m roll 100 m reel Symbol 20 100 Max. operating pressure 2 1 20 0 0 20 40 60 80 Operating temperature (C) 15-6-23 1 Miniature Tubing and Miniature Fittings Series

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

2 5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Data format 0: offset binary, 1: signed magnitude, 2: 2s complement Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V,

Intrinsically Safe Valve

) Manifold series 5 7 53-SY5000 Manifold base (5 stations) 53-SS5Y5-20-05 53-SY7000 Stations Stations 3 2 1 02 2 stations 20 20 stations 53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

CXS

(2) V = 400 mm/s Graph (1) V = 200 mm/s 20 50 CXSM CXSL CXSM CXSL 10 10 Weight m (kg) Weight m (kg) 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (

CXS

(8) UV = Up to 400 mm/s; Up to 10 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0 0.01 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) Graph (12) V = Up to 400 mm/s; Up to 50 mm stroke CXSJM CXSJL Graph (13) V = Over 400 mm/s; Up to 50 mm stroke CXSJM CXSJL 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Mounting (Male thread) M5 x 0.8 Vacuum entry port Mounting Connection 20 M8 x 1 Female thread Male thread 10 to 16 24 M10 x 1 M8 x 1 20 to 32 10 to 16 55 M14 x 1 M10 x 1 M5 x 0.8 40, 50 20 to 32 Pad diameter (mm) M14 x 1 40, 50 Ball joint rotation 15 Pad Type Pad form Ball joint type Pad diameter (mm) 10, 13, 16, 20, 25, 32, 40, 50 Material Urethane rubber NBR Silicon rubber Fluoro rubber

CJ2X/CUX/CQSX/CQ2X/CM2X

20 mm 25 mm 32 mm 40 mm Nil S n 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

20 mm 25 mm 32 mm 40 mm Nil S n 2 pcs. 1 pc. n pcs.

Vacuum Pad: Ball Joint Type

Mounting (Male thread) ZP3 M5 x 0.8 Mounting Vacuum entry port Female thread Connection 10 to 16 20 to 32 40, 50 20 M8 x 1 ZP3E Male thread 24 M10 x 1 10 to 16 M8 x 1 ZP2 55 M14 x 1 Pad diameter 20 to 32 M5 x 0.8 M10 x 1 40, 50 M14 x 1 ZP2V Ball joint rotation ZP ZPT ZPR ZPT ZPR XT661 709 ZPT Series 20 25 32 10 13 16 ZPT F-B5-A8 (Without buffer/Male thread) ZPT F-B5-A10 (Without buffer/Male

MY1

20 1.