MU

7 !

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-M005

Product Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning. 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 7.3.2 Draining of facility water . 7-6 7.4 Periodic Replacement Parts . 7-6 Chapter 8 Appendix . 8-1 8.1 Specification . 8-1 8.1.1 Product specification . 8-1 8.1.2

MY1

Therefore, check the allowable load for the selected conditions. 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW 60 23 20 68 30 8.2 115 35 35 93 42 11.5 150 50 50 130

JXCx-OMX0009

1 Set always OFF(0) F to 8 Movement MOD 2 F to 0 2 F to 0 Speed Address Address 3 F to 0 Current speed 3 F to 0 Target (Set always OFF(0)) position 4 F to 0 Current Force 4 F to 0 DATA(H) 5 F to 0 Target position 5 F to 0 Acceleration DATA(L) 6 F to 0 6 F to 0 Deceleration 7 7 to 0 Alarm 1 7 F to 0 Pushing force F to 8 Alarm 2 8 7 to 0 Alarm 3 8 F to 0 Trigger LV F to 8 Alarm 4 9 F to 0

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

7 !

Vacuum Pad

19 24.5 30.5 6 Width across flats 21 35 4 35 4 3 3 ZP3P-T35PTSF-AG3 [Weight: 21.1 g] ZP3P-T50PTSF-A12 [Weight: 28.4 g] 24 M12 x 1.75 G3/8 24 Width across flats 21 22 28.2 35.5 7.3 19 24.5 7 31.5 Width across flats 21 4 35 4 3 4.5 50 ZP3P-T50PTSF-AG2 [Weight: 22.2 g] ZP3P-T50PTSF-AG3 [Weight: 28.8 g] G3/8 24 Width across flats 21 G1/4 24 Width across flats 21 22 27.5 7 34.5 22 27.5 6 33.5

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

Table of Contents

Multi-core vinyl cable 0.3 mm2 x 25C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 None None None None None None None White Black Black Red Red Red Black Black White None None Black White White Red Red White None Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red Brown Pink Gray Black White Electrical

Rotary Table/Rack & Pinion Style Series MSQ

7 !8 u @0 q @1 !2 !1 CRQ2 !8 !7 MSQ MSZ CRQ2X MSQX MRQ MSQAA (High precision type) !9 e r Component Parts Note Anodized Anodized Chromated No.

High-precision Digital Pressure Switch ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 7, 8 and 9) System error (Er0, 4, 6, 7, 8, 9) is displayed. Check if there is a noise source nearby. (2) Check if the power supply voltage is in the range 12 to 30 VDC. (2) Supply power in the range 12 to 30 VDC.

Rotary Table/

7, !

Multi-Axis Step Motor Controller

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

VK3000

/Base mounted (Bottom ported) VV5K3-40Station -M5 Grommet: G DIN terminal: D 6 x Rc1/8 (P,R port) (Pitch) 6 x Rc1/8 (P,R port) 14.5 14.5 21 42 Max.10 74.1 7.5 7 2 x 4.5 (Mounting hole) (Lead wire length) Corresponding mark ( ) Corresponding mark ( ) Pg7 69.9 Manual override (Non-locking) ~ = 300 77.4 Applicable cable O.D.: 3.5 to 7 (Pitch) 2n x M5 x 0.8 (A,B port) L Dimension n: Stations

KS/KX

30 18.5 14.9 15.2 6 21.6 5 16 1 4 1 4 3 8 17.46 17 26 29.5 31 34 37 22.23 25.0 17.9 7 30.5 3 8 22 31.5 21 Applicable tubing 35 38 Reference dimensions after NPT thread installation.

JXCx-OMY0006

(Upper digits) 5 Please refer to 21.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

7 Size: 1 to 3 Size: 7 Basic type Steel wire !8 High precision type Steel wire Stainless steel Carbon steel NBR Stainless steel NBR !

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Hydraulic Cylinders

Auto switch symbol (mm) (mm) S Bore size (mm) B Bore size (mm) h C A g N S 26.5 30 38 45 55 66 86 104 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 61 63 71 75 81 90 105 132 43 45 51 55 60 67 78 96 18 18 20 20 21 23 27 36 33 36 45 50 56 68 87 111 76 81 96 105 116 135 165 207 6 6 7 7 7 7 7 7 N g C B + Stroke h + Stroke A + Stroke Note) For all dimensions other than the above, please refer

Compact Cylinder

+ Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 20 5 to 50 21 17.5 27.5 24 8 8 30 5 29.5 M4 x 0.7 36 2.5 6 3.5 21 3.5 7.5 32 8 25 5 to 50 23.5 19 30 25.5 7 10 33.5 5 M5 x 0.8 40 2.5 8 4.5 24 3.5 8 36 8 32 5 to 50 26 21 32.5 27.5 12 12 41 5 M6 x 1.0 51 2.5 10 5 31 4.5 9