AR Series Modular Type Regulator

16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

33 3/4 Long 0.66 to 1.79 7 14 IF30-06 50 44 3/4 Middle 0.85 to 2.36 9 18 IS 60 53 3/4 Short 1.04 to 2.83 11 22 60 55 1 Short 0.56 to 1.67 10 20 ZSM 100 90 1 1/4 Short 0.57 to 1.67 17 34 PF2 160 140 1 1/2 Short 0.63 to 1.95 26 52 140 125 2 Middle 0.34 to 1.06 23 45 IF IF31-10 280 250 2 1/2 Middle 0.41 to 1.29 45 90 Data 250 220 3 Middle 0.26 to 0.81 40 80 550 480 4 Long 0.33 to 1.05 85 170

Air Slide Table/Long Stroke Type Series MXY

7 @5 #6 #3 #2 !9 #4 #5 #1 MXS MXQ @7 @8 t @9 @4 @4 @4 MXF MXW MXJ Metal stopper Shock absorber e !8 A MXP i !1 !0 @6 o @0 MXY MTS !3 !4 !5 !6 !2 @2 @1 Detail drawing of part A Component Parts Note Note Material Material No. Description No.

IZD10_eng

INDEX 1. Safety Instruction .2 2. Outline.6 3. How to Order.7 4. Specification.7 5. Mounting .7 5-1. Electrostatic sensor installation.7 5-1-1. Sensor head installation.7 5-1-2. Installation of the sensor amplifier.8 5-2. Circuitry and wiring chart.9 6. Performance.10 6-1. Output signal.10 6-2. Detection range.11 6-3. Cautions on installation .11 6-4. Timing chart .12 7.

Compact Slide Series MXH

7 w q!9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !0 i !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.

MGQ

1 !2 !3 !4 !5 !6 !7 !8 !

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53 85 98.5 30 CXS6-50-XB19 50 63 95 108.5 35 CXS10--XB19 17 S ZZ 15 1 10 7 SS 2-3.4 through 2-6.5 counter bore depth 3.3 2-2.5 x 14l AW (spring pin) 20 Z 9 5 1 35 0.2 35 0.2 33.6 46 44 20 6.3 5 2.1 2-M4 x

Secondary Batteries

(mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D. (mm) 1 8 4 Port size R Connection thread R Applicable tubing O.D.

PA3000/5000/PAX1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

Digital Flow Monitor

2 L/min 5 L/min 10 L/min unit Accumulated flow 1 L 10 L 100 L Display type LCD Number of displays 3-screen display (Main display, sub display) Display colour 1) Main display: Red/Green 2) Sub display: Orange Number of display digits 1) Main display: 5 digit (7-segments) 2) Sub display: 9 digit (7-segments) Indicator LED LED is ON when switch output is ON (OUT1/OUT2: Orange) Digital filter

Digital Flow Switch (Remote type monitor unit)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H A function to store the accumulated flow value in the products internal memory. The flow value will be stored at a set time interval of either 2 or 5 minutes.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5

Pressure Relief 3 Port Valve With Locking Holes

Reference data. 1 1 - 7.

Series LQ3 High Purity Fluororesin Fitting

2 2 3 3 3 4 4 4 5 5 5 6 6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol E T P U Combination

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

(However, there is no relationship with the chemicals listed above.) ) Reference data 848 Series CJ5-S/CG5-S Stainless Steel Cylinder Specific Product Precautions 1 Be sure to read before handling. Refer to front matters 54 and 55 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Operating Environment Caution on Design Warning Warning 1.

Series 10-, 21- AW-B Filter Regulator

3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the length when the filter regulator knob is unlocked. 1082 A

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Air slide table MXP/MXPJ6 11221122Dimensions: MXP6 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 11-/22MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4M3 x 0.5 depth 3 +0.030 0 0.05 D B 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5

PSE200

indicator, Display color: Yellow Display For channel display: 1-digit, 7-segment indicator, Display color: Red Red (Lights up when output is ON.)

Digital Flow Switch (Integrated display type)

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

AR20-B to AR60-B

Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR