Low torque Metal seal type Rotary joint

1 2 3 4 2 1 8-5 x 0.8 10 counter bore depth 1.5 14 *5 27 6.5 3.5 6.5 3.5 15H8 (8) 20H8 (6) 1 2-M4 x 0.7 thread length 8 P.C.D.38 2 1 2 4 45 3 41 32 2-M3 x 0.5 thread length 8 P.C.D.29 3 Low torque Metal seal type Rotary jointSeries MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR8-M5 MQR12-M5 0.03 7 M6 x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43

MGC

40.5 44 38.5 40.5 42 40 37 43 ( ): For long stroke 3.20-14

MHF2

0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43

CRB1/Size: 10, 15, 20, 30

Weights (g) Vane style Double vane Single vane Model CRB1BW15-lS CRB1BW20-lS CRB1BW30-lS CRB1BW10-lD CRB1BW15-lD CRB1BW20-lD CRB1BW30-lD CRB1BW10-lS Rotation angle 90 180 270 180 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Body of rotary actuator 26.3 26.0 25.7 49 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange bracket ass'y 9 10 19 25 9 10 19 25 Auto switch

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Applicable cable O.D. 3.5 to 7 Station n L1 L2 3 80 68 Station 20 403 391 6 137 125 8 175 163 10 213 201 Station 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 43 Series SYJ700 Type 40 Manifold: Bottom Ported/SS3YJ7-40Stations -01 [ ] for AC Grommet (G) 53.5 5 L2 L1 10.5 1.5 19.5 3.4 48.4 (

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Non-standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB(X10) Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 A section 90 83 5.8 1.7 4.8 80 Stroke + 360 A section

Air Slide Table Series MXQ

Shock absorber Model Axial piping type (S: Stroke mm) With end lock With buffer 20 30 40 50 75 100 125 150 10 Extension end Retraction end Extension end Retraction end Extension end Retraction end MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 5 10 100 120 140 180 200 25 5 6 13 + 0.2S 10 23 23 30 140 170 210 250 315 385 35 10 10 40 26 + 0.2S 23 30 35 47 335 340 380 450 490 745 655 70 23 25 100 43

Sine Rodless Cylinder Series REBR Direct Mount Type

14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z Model REBR15 18 54.5 98 REBR25 28

3 Position Cylinder Series RZQ

27 39 50 46 47 35.5 43 36.5 48.5 32.5 41.5 38 44.5 31 44 34 33.5 29.5 40 63 49 40 50 39 46 41.5 51.5 36 44.5 37.5 47.5 34.5 47 37 33 43 D-A7H,A80H D-F7,D-F7F D-J79,J79W D-F7W D-F7BAL D-F7NTL D-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-F9V D-F9WV D-A7,A80 Bore size (mm) U U U U U U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 40 35 36 42 38.5 44 41.5 37.5 30.5

Pneumatic Transfer System Series MF

From back 2 x 2-M8 x 1.25, thread depth 16 14 56 12 (Max. 35) 94 82 43 (body width) 4 2-M10 x 1.0 Adjustment bolt 78 60 8 90 24 86 85 60 80 15 12 (absorber stroke) 2-RB1412 shock absorber M14 x 1.5 2-Rc(PT) 3/8 Cylinder port 129 Note) 244 + Stroke 7 7 134 2-10 through 12 110 48 43 75.5 11.5 21 87 85 65.5 75 55 SMC Body (Support bracket) (MY-S32A (B)) Note) The dimension can be adjusted to

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VV3Q11 (L5) (L4) (L3) (8.5) 88 L2 48.7 L1 Plug ass'y VVQ100-12A2 3 1 (35) (45) 33 (5.5) 23.5 12.3 E 3 2 R11(Min. bending inner radius) 21.5 Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

PSxx-OML0002CN

No.PS-OML0002CN-G // ZSE30A(F) ISE30A 2 8 10 11 14 14 17 18 21 21 24 24 24 F0 26 F1 OUT1 27 F2 OUT2 30 F3 30 F4 31 F5 32 F6 34 F7 35 F8 36 37 F90 37 F97 39 F98 41 F99 43 44 47 48 49 56 56 58 -1No.PS-OML0002CN-G (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

EXxx-OMN0029CN

No.EX-OMN0029CN-D TMSI DeviceNet // EX600-SDN#A EX600-ED# 3 9 10 12 12 15 15 17 SI 18 18 19 19 20 LED 25 27 27 28 29 29 30 30 31 31 31 -1No.EX-OMN0029CN-D 33 34 43 43 54 EDS 54 TM 55 RSNetWorx for DeviceNet 59 60 63 TM 65 DeviceNet 77 -2No.EX-OMN0029CN-D *1) (ISO/IEC)(JIS) *2) *1) ISO 4414 Pneumatic fluid power -General rules relating to systems ISO 4413

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

F/ISE

A CAT.ES100-43 A For General Fluids High Precision Digital Pressure Switch F/ISE ZSE 50 60 50 60 Series High precision/High resolution pressure switch. Applicable for pressure detection with a wide range of fluids, by using a stainless steel diaphragm. Pressure detection for a wide range of fluids.

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no.: P3270157 Type C2 ZR1-VC2 Type C4 ZR1-VC4 Circuit diagram Circuit diagram PS PE SOL.b SOL.a PE PS Air operated a Pilot air PV PD Release valve Supply valve PV PD V Release valve Supply valve V Manual override Pilot valve Dimensions not indicated are identical to type C1. 13-3-43 43 Series ZR Manifold Specifications/Vacuum

Solenoid Direction: Opposite side of A port (A port bottom ported for Type 40), Type: A Port Side Ported; 42S: Solenoids on the Same Side of A Port, Stations: 02, Port Size: ø4 Cassette, Thread: NPTF, Bracket: -

Solenoid Direction: Same Side of A Port, Type: A Port Side Ported; 42S: Solenoids on the Same Side of A Port, Stations: 02, Port Size: ø4 Cassette, Thread: NPTF, Bracket: -