Soft Start-up Valve AV2000/3000/4000/5000

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

Digital pressure switch for energy-saving control ejector

For details of each setting, refer to page 17 to 42 of this manual. The Pressure switch is compulsory turned off for 1 seconds after power supplied. For 4 seconds after supplying power, the measurement output is turned off. Maintenance Turn off the power supply, stop the supplied air, exhaust the residual pressure and verify the release of air before performing maintenance.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

43 L plug connector (L) n: Station Dimensions n L 11 12 13 14 15 16 17 18 19 28 20 39 31 50 42 61 53 72 64 83 75 94 86 105 97 116 108 127 119 138 130 149 141 160 152 171 163 182 174 193 185 204 196 215 207 20 237 229 2 3 4 5 6 7 8 9 10 L1 L2 1 226 218 1.13-10 Series VQD1000 Dimensions Plug lead manifold unit(VV4QD15-ll) Lead wire length: 300mm Light 4-Rc(PT)1/8 SY (P, R port) ACB ACB ACB

42

Maximum stations are 12.

High Purity Fluoropolymer

L L H A M W E N A LQ2H21-M LQ2H22-M LQ2H23-M LQ2H24-M LQ2H31-M LQ2H32-M LQ2H33-M LQ2H34-M LQ2H35-M LQ2H36-M LQ2H41-M LQ2H42-M LQ2H43-M LQ2H44-M LQ2H51-M LQ2H52-M LQ2H53-M LQ2H54-M 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 W 39 1/8" 42.5 19 19.9 16 18 36.5 1/4" (M) H 49 43 H (E) 1/4" Class 2, 3 48.5 42.5 Port size 22 26.2 24 24 R (NPT) 49 42.5 3/8" 48.5 59 58 59 58 68 67 68 67 42 53

VS 8-2/VS 8-4

VDC, 24 VDC 10% of rated voltage Equivalent to Class B 1 W DC (42 mA) 1 W DC (83 mA) 1 (P) 5 (R1) 3 (R2) Power consumption (Current) 24 VDC 12 VDC 2-position double (Rubber) Note 1) Use dry air to prevent condensation at low temperatures.

Secondary Batteries

and up) SUS304 (6 and 8) Aluminum (12 and up) SUS304 (6 and 8) Aluminum (12 and up) Material Piston Anodized (12 and up) Chromate (12 and up) Electroless Ni-plated (6 and 8) Chromate (12 and up) Treatment SUS304 SUS303, SUS304 Iron SUS304 SUS303 Iron Brass Electroless Ni-plated Brass Electroless Ni-plated Iron Material Air slide table MXQ Piston spacer Treatment Material Packing support

Series KP/KPQ/KPG

KPGR08-12 12 d 10 18.5 24 41 29 50.5 25.7 9 KPQR10-12 KPGR10-12 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

KPGR08-12 12 d 10 18.5 24 41 29 50.5 25.7 9 KPQR10-12 KPGR10-12 Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

KPQR08-12 48 23.2 6 12 d 10 KPQR10-12 KPGR10-12 18.5 24 41 29 25.7 9 50.5 Note 1) D indicates the maximum diameter.

C95

MR 212 238 259 288 341 371 50 63 75 90 110 132 12 16 16 20 20 25 26 28 32 40 50 60 48 55 68 80 100 120 4 4 5 5 6 6 38 46 52 62 63 75 10 10 12 12 16 16 7 9 9 9 12 14 7 9 9 9 12 14 32 36 45 50 63 71 10 12 12 16 16 20 59 67.5 82.5 95 114 129 32 40 50 63 80 100 72 83 100 115 126 150 12 15 15 20 20 25 26 28 32 40 50 60 10 11 12 12 14 16 9.5 12 12 16 16 20 65 75 80 90 110 140 56 65 77 92 100 120

CM2

M8 x 1.25 20 12 18 8 5 M20 x 1.5 9 15.5 13 5 28 15 24 1/8 11.5 20 0 0.033 25 45 8 13 10 12 M10 x 1.25 22 12 22 8 5.5 M26 x 1.5 9 19.5 17 6 33.5 15 30 11.5 1/8 26 0 0.033 32 45 8 13 12 20 M10 x 1.25 27 15 22 10 5.5 M26 x 1.5 12 19.5 17 6 37.5 15 34.5 14.5 1/8 26 0 0.039 40 50 11 16 14 20 M14 x 1.5 33 15 24 10 7 M32 x 2 12 21 22 8 46.5 21.5 42.5 14.5 1/4 32 Dimensions by Stroke Stroke 1 to

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPQR08-12 12 d 10 18.5 24 41 29 25.7 9 50.5 KPQR10-12 KPGR10-12 Note 1) D indicates the maximum diameter.

MK

ring Flange Hexagon socket head cap screw Piston rod y Except 12, 16 Except 12, 16 Bumper Ring nut Scraper pressure Rubber magnet u i o !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Back port (Refer to P . 8-12-3.)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

PLC Fieldbus network Gateway (GW) unit Serial communication RS485 Up to 12 controllers are connectable.

Vacuum System Peripherals:

42 e Valve Model Fill in the blanks below with symbols of necessary specifications.

NCA1

2 1/4 4 2 1/2 1 3/4 2 1 1/2 -12 NCA1-1400 2 5 1/8 NI-1400 3 5 2 1/2 2 2 1/2 1 7/8 -12 NCA1-1401 2.5 6.19 NI-1401 3 1/2 5 13/16 3 2 1/2 2 13/16 2 1/4-12 NCA1-1402 3 6.25 Note) Retainer Rings are included NI-1402 3 1/2 6 1/8 3 3 3 1/4 2 1/2-12 42 Medium Duty Air Cylinder Series NCA1 How to Order Auto Switches Wire Lead Type Connector Type D D PC Lead wire length 0.5 (m) (1.64 ft) L 3 (m) (

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Back port (Refer to P . 8-12-3.)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

4 82 88 12 14 26 12 M6 x 1 depth 9 21 100 st or more 25 25 25 350 to 500 175 80 37 46 57 100 88 13 14 31 12 M6 x 1 depth 13 21 125 st or more 32 32 32 350 to 600 201 82 37 52 65 114 90 16 14 38 12 M6 x 1 depth 13 21 150 st or more 40 40 40 350 to 800 238 92 44 62 84 138 101 20 15 47 12 M8 x 1.25 depth 16 25 200 st or more 50 50 50 350 to 1000 285 104 55 75 94 164 116 25 16 58 14 M10 x 1.5