Clean Air Module

/8 Restrictor (36.5) Clean air filter Note) One-touch fitting 12 103 85 13.2 34.8 3 (41) 111 59 71 80.4 41 59 59 Rc 3/8 (NPT 3/8) 521 3.5 (3.5) Note) This port is unavailable.

ML2B

For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17

Transfer

56 68 AA 106 133 164 BB 30 35 40 CC 16 19 23 DD 12 15 16.5 EE 14.5 16 22 FF 63.5 77.5 95 GG 22 27 35 HH 24 32 37 II 16 19 23 F 93.5 Model ML2B25 ML2B32 ML2B40 107.5 130.5 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 OO 9 9.8 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 MA M5 x 0.8 M6 x 1 M8 x 1.25 LA 11 12 14 MB M6 x 1 M8 x 1.25 M10 x 1.5 LB 9.5 16 15 MC M5 x 0.8 M6 x 1 M8

IC

VBA VE VY1 SW round head Phillips screws G M3 x 8 Panel PPA Gasket A AL Display protective cover Tighten screws by 1/4 to 1/2 turn after the heads are flush with the panel. 14-8-41

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

3

56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67 58 55 110.5

EXxx-OMU0020CN

(EX245-EA2-1) No. 1 SI ON/OFF 2 3 4 SI 5 . 11 11 No.EX-OMU0020CN 2. . 2-1 EX245 DC24 V 1 msec IP65 CE RoHS AC500 V1 FE DC500 V10 M FE -1050 -2060 35%85%RH 1057 Hz0.75 mm p-p 57150 Hz49 m/s 2 XYZ 2 2 XYZ 3 () 147 m/s 12 No.EX-OMU0020CN 3. 3.1. 8 VQC4000 7 2 x M5 ( = 1.5 Nm) 2 x M5 (SI = 1.5 Nm) 4 x M* . 3-1 13 No.EX-OMU0020CN 3.1.1.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

SFOD-OMT0009CN

) (M5)X4 (b) DIN DIN DIN (M5X8) DIN 2 4 3.0[Nm] M5X8 DIN 1 2 2 3.0[Nm] DIN M5X14 A DIN B DIN DIN (M5X14) 0.40.6 [Nm] 0.40.6[Nm] 28 No.SFOD-OMT0009CN-B A B M5X14 (2) M3 29 No.SFOD-OMT0009CN-B (1) D (100) 2 (2) 2mm D : : (3) 40 50mm ()100mm , 100 30 No.SFOD-OMT0009CN-B 5. 5.1 (1) C PWR +24V 24-0V +24V (+) (+) (24-0V) (-) (-) JXC-C1 2) AWG20(0.5mm 1.76 +24V 24-0V (

PSxx-OML0002CN

No.PS-OML0002CN-G // ZSE30A(F) ISE30A 2 8 10 11 14 14 17 18 21 21 24 24 24 F0 26 F1 OUT1 27 F2 OUT2 30 F3 30 F4 31 F5 32 F6 34 F7 35 F8 36 37 F90 37 F97 39 F98 41 F99 43 44 47 48 49 56 56 58 -1No.PS-OML0002CN-G (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

HRX-OM-W060

Enabling/Disabling of AL27: CH2 electric conductivity increase alarm function (1) (2) (3) (4) Electric conductivity and alarm (AL27) setting HRL Series 5.4 Description of Screen 5-41 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions Table 5.4-14 Settings of electric conductivity (AL27) No.

HRX-OM-Y098

25 TEMP READY alarm (AL12) of TEMP READY function .5-27 Offset (TEMP OFFSET) function .5-30 Pump operation mode .5-32 Discharge pressure alarm (AL18/AL19/AL20) .5-34 Electric conductivity and alarm setting (AL28) .5-36 5.4.8 CH2 setting screen .5-37 Temperature rise/drop alarm (AL14/AL15) setting .5-38 TEMP READY alarm (AL16) and TEMP READY function .5-39 Offset (TEMP OFFSET) function .5-41

HRX-OM-X037

of TEMP READY function .5-26 Offset (TEMP OFFSET) function .5-29 Pump operation mode .5-32 Discharge pressure alarm (AL18/AL19/AL20) .5-33 Electric conductivity and alarm setting (AL28) .5-35 5.4.8 CH2 setting screen .5-36 Temperature rise/drop alarm (AL14/AL15) setting .5-37 TEMP READY alarm (AL16) and TEMP READY function .5-38 Offset (TEMP OFFSET) function .5-40 Pump operation mode .5-41

Air Slide Table Series MXQ

42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

Multistage Ejector (N)ZL Series

Fluid Air Operating pressure range Internal pilot type 0.2 to 0.5MPa (29 to 72 psi) 5 to 50C (41 to 122F) Ambient and fluid temperature Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Slotted locking type With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust

COQ2BP

OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~.. Dd9 L d I m 1 Soap ring ly-(l05 50,63 14

Water Strainer

range (-X215): 0.05 to 0.69 MPa Rc1/8, Rc1/4 NPT1/8, NPT1/4 Port size: Rc1/8 Port size: Rc1/4, 3/8, 1/2 Series WF300 14-E628 Series WF300 Dimensions 25 25 A A 14 41 54 29 66.5 Construction A-A Component Parts q e w r No.

4-channel Flow Monitor ( compatible)

32 to 47 CH3: Flow measurement value With symbol 16 bit 48 to 63 CH2: Flow measurement value With symbol 16 bit 64 to 79 CH1: Flow measurement value With symbol 16 bit Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH1: Flow measurement value (PD) Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Item CH2: Flow measurement value (PD) Bit offset 47 46 45 44 43 43 41

Compact Electric Actuator Series LG1

Refer to page 41 for further details.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Switch with left hand mounting A t r t fit gI Switch with right hand mounting t[ n-r ffi I+l+| + t 2 switches With right hand moun0ng D6A&1 D-8G&2 Rotation Speed Range Model 20--{.03-0.3sec/90' Model 30-O.04-0.3sec/90" lf a rotation speed is used slower than 0. 3sec/90" sticking may occur. _n_ | d l l"l l l n , t d .