Tie-rod Type Hydraulic Cylinder

CHS CH2 Auto Switch Mounting Heights (mm) CHA CHA D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-B5/B64 D-B59W D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT Related Products D-M9V/M9WV D-M9AV D-A9V Bore size (mm) D-M9/M9W D-A9A D-A9 D-A5/A6 D-A59W D-G39/K39 D-A3 D-A44 DHs Hs Ht Hs Hs Hs Ht Hs Ht Hs Ht 40 31 31 36 31 38 33.5 39.5 33.5 38 72.5 82.5 50 36.5 36.5 40 36.5 43 39 44 39 43.5 78 88 63 40 40 45

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Basic style Width across flats 3.5 23 9 4.5 4.5 MXH MXU 6.5 3.5 2 x M3 x 0.5 (Port size) MXS 2 x M3 x 0.5 MXQ (Port size for axial piping type MTS8-P) 0.2 2 x M3 x 0.5, effective length 5 9 5 MXF +0.035 +0.025 4 MXW 22 12 16 MXJ M2.5 x 0.45 12 41 + Stroke MXP 53 + Stroke 9 15 MXY MTS 0.2 9 4 x M3 x 0.5, effective length 5 10 15 Rod end male thread Width across flats 3.5 +0.035 +0.025 4 M3

Large Size Vacuum Module: Series ZR

How to Order Manifold 06 ZZR1 1 RV3 ZR1 1 R1 ZR1 Arrangement (Right valve station which is looked from valve side is first station.) Stations Port location R16 Arrangement (Right valve station which is looked from valve side is first station.) 01 1 Left side Right side R L B 06 6 Refer to (About individual spacer.)

IDX-OM-W011

2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () 2-2 IDF Series 2 4 IDX-OM-W011 2 2 3 ()2 2 2-2-3 4 2-3 IDF Series 2 5 IDX-DM-W011 3 3 1 IDF4E15E1 ` 3 2 ON IDF1E3E IDF4E15E1 5 0.15MPa (IDF1E ) 3-1 IDF Series 3 1 IDX-DM-W011 3 3 3 3 4 3 3 5 3 5 OFF 3 6 24 3-3 IDF Series 3 2 IDX-OM-W011 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2 1.

Support Guide/11-LEFG Series

Body fixed A Maintenance Warning L Model Screw size Max. tightening torque [Nm] A [mm] L [mm] LEFl16 M3 0.6 3.5 20 LEFl25 M4 1.5 4.5 24 LEFl32 M5 3.0 5.5 30 LEFl40 M6 5.2 6.6 31 Maintenance frequency Perform maintenance according to the table below.

C95

67 25 32.5 24.5 35 31 38 40 26 34 26 30 26 29.5 27.5 81.5 27.5 71.5 27.5 36.5 27.5 38.5 33 42 50 31 38 31 34.5 31 33.5 87 77 34 41 34.5 43.5 39 46.5 63 36 43 36 40 36 39 93.5 83.5 39 46 39.5 48.5 44 51.5 80 45 52 45 48.5 45 47.5 103 92.5 46.5 52.5 46.5 55 51.5 58 100 53.5 60 53.5 56.5 53.5 55.5 113.5 103 55 59.5 55 62 60.5 65.5 Other than the applicable auto switches listed in How

H/DL/L/LL

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

KF

KFN-04 KFN-06 KFW-04 KFW-06 KFV-04 KFV-06 KFS-04 KFS-06 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

Precision Cylinder Series MTS

x 0.5 (port size) 2-M3 x 0.5 (port size for axial piping type MTS8-P) 9 2-M3 x 0.5 Effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 M2.5 x 0.45 12 41 + Stroke 53 + Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male threads Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4 Stud bolt part number: MT-S8 Rod end nut part number: NTJ-006A

Slider Type Ball Screw Drive/11-LEFS Series

0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5 upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

LEC-OM069xx

Subcommand CODE Main Command ALM_RD PPRM_ LTMOD_ LTMOD_ NOP PRM_RD PRM_WR SMON WR ON OFF 00 NOP 01 PRM_RD 02 PRM_WR 03 ID_RD 04 CONFIG 05 ALM_RD 06 ALM_CLR 0D SYNC_SET 0E CONNECT 0F DISCONNECT 1C PPRM_WR 20 POS_SET 21 BRK_ON 22 BRK_OFF 23 SENS_ON 24 SENS_OFF 25 HOLD 28 LTMOD_ON 29 LTMOD_OFF 30 SMON 31 SV_ON 32 SV_OFF 34 INTERPOLATE 35 POSING 36 FEED 38 LATCH 39 EX_POSING 1 3A ZRET 3C VELCTRL

Fieldbus System

Round head screw (M3 x 8) 4 pcs. Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. 21 Accessories Series EX600 e Reinforcing Brace This bracket is used on the bottom of the Unit at the intermediate position for connecting 6 Units or more. Note) Be sure to attach this bracket to prevent connection failure between the Units caused by deflection.

Fieldbus System

Round head screw (M3 x 8) 4 pcs. Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. 13 Accessories Series EX600 Reinforcing brace This bracket is used on the bottom of the unit at the intermediate position for connecting 6 units or more. For direct mounting EX600-ZMB1 For DIN rail mounting EX600-ZMB2 Enclosed parts Round head screw (M4 x 5) 2 pcs.

IDX-OM-W038

IDX-OM-W038 . (17) (17) mm IDH6IDHA6 ( ( 1.25 6.5 Rc1/2 N.C N.O M3 (N.C:) (N.O:) 2 6.5 :1.25m m :M3 Rc1/2 31 15 (N.O) (N O 10 2 244 35 184 392 17 2 1 80 223 321 300 1 485 70 372 568 ( 10) ( 10) 240 2 15 1 306 270 63 IDH Series IDX-OM-W038 . 6.3 6.2.

Basic Type/Direct Mount Type

x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5 17.5 19 20.5 21.5 24 26 30 32 TC 10.5 14 17 20 22.5 28 33 42 48 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 3.5 4.5 6 7 6.5 8.5 11 15 16 P (Piping port) Model Nil M3 x 0.5 M5 x 0.8 M5 x 0.8

A-HEC-OM-J004

Request message to read (from master) 02 30 31 52 50 56 31 03 65 Address BCC data End code Request to read Start code Identification code Response message from the product 02 30 31 06 50 56 31 30 30 32 35 30 03 06 Address BCC data End code Start code Numerical data Affirmation code Identification code Code Symbol/Data ASCII code Start code STX 02H Address 01 30H 31H Required content R

Air Cylinder

BAF-08 BAF-10 BT-04 BT-04 BT-06 BT-08 BT-08 D-A3

Title not found

common 31 slave mode I iso ated comrnon As.lnlerhce 4in/21'jrt 31 slavE riode I ho aled con',1ron Wnhod Sl unitinpui block {SDo) Nole 1 ) Indimie the size in lt'e specinton sheel n ihe Ese oi CM and L^r Note 2l Symbols ior inch s zes are

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.