Stations: 5 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 3/8" One-touch Fitting, Mounting Method: DIN Rail Mounting

Stations: 4 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: External Pilot, Silencer, A, B Port: ø12 One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail

Stations: 4 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: NPT3/8, Mounting Method: DIN Rail Mount w/o DIN Rail

Stations: 4 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: NPTF3/8, Mounting Method: DIN Rail Mount w/o DIN Rail

Stations: 6 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: ø8 One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail

Stations: 5 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: NPT1/4, Mounting Method: DIN Rail Mount w/o DIN Rail

Stations: 8 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: Rc1/4, Mounting Method: DIN Rail Mounting

Stations: 2 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: NPT3/8, Mounting Method: DIN Rail Mounting

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: Multi-Connector Compatible Tie-Rod Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: DIN rail mounting (with DIN rail), Port pipe connection port diameter: ø3/8" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification: Internal

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: Multi-Connector Compatible Tie-Rod Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: DIN rail mounting (with DIN rail), Port pipe connection port diameter: ø3/8" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification: Internal

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: Multi-Connector Compatible Tie-Rod Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: DIN rail mounting (with DIN rail), Port pipe connection port diameter: ø3/8" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification: External

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: Multi-Connector Compatible Tie-Rod Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: DIN rail mounting (with DIN rail), Port pipe connection port diameter: ø3/8" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification: Internal

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: Multi-Connector Compatible Tie-Rod Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: DIN rail mounting (with DIN rail), Port pipe connection port diameter: ø3/8" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification: Internal

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.82 3.8 0.26 0.86 3.2 0.34 C10 ( ) 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 2.8 One-touch 3 position 189 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.61 0.25 [0.31] 0.89 [0.61] 2.3 0.38 Note) [ ]: Denotes normal position.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.82 3.8 0.26 0.86 3.2 0.34 C10 ( ) 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 2.8 One-touch 3 position 189 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.61 0.25 [0.31] 0.89 [0.61] 2.3 0.38 Note) [ ]: Denotes normal position.

Series VQ Base Mounted Metal Seal/Rubber Seal

(Series VQ2000) Porting specifications Applicable stations Port size Port location A, B P, R Series Side Side Max. 24 Max. 20 C3, C4, C6, M5 C4, C6, C8 C8 C10 VQ1000 VQ2000 Terminal Block Connection Open the terminal block cover for wire connection. Sequence 1.

SYA3000/5000/7000

SYA720-C10 2.7 [2.0] 2.4 0.38 [0.38] 0.21 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.8 One-touch ( ) 3 position 113 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 2.3 0.38 0.61 0.25 [0.31] 0.89 [0.61] Note) [ ]: denotes normal position.

5 Port Air Operated Valve SYA3000/5000/7000 Series

( ) SYA720-C10 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 0.70 [0.56] 0.59 2.8 One-touch 3 position 113 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.25 [0.31] 0.89 [0.61] 2.3 0.38 0.61 Note) [ ]: denotes normal position.

Fieldbus System

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of double sided type)) [Communication connector D-sub] (DIN rail clamping screw) R R R BUS OUT BUS 76.7 76.5 12 3 12 3 3 72 BUS IN X 49.5 B B B B B B B B P X P X P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.

Vacuum Regulator

SET side tubing O.D. 6, 8, 10 1/4" , 5/16" , 3/8" 6, 8 1/4" , 5/16" 135 g (IRV10-C08) 125 g (IRV10A-C08) 250 g (IRV20-C10) 250 g (IRV20A-C10) Weight (Without accessories) Standard connections Single sided connections Note 1) Use caution it varies depending on the pressure in vacuum pump side.