Process Pump

Diaphragm PTFE Material Check valve PTFE, PP, PFA Liquid contact seals FFKM Fluid Refer to P.11 for applicable fluids Discharge rate 1 to 45 L/min 1 to 50 L/min Average discharge pressure 0 to 0.4 MPa Pilot air pressure 0.2 to 0.5 MPa Air consumption Refer to P.14 for air consumption Suction lifting range Note1) Dry Up to 0.5 m (Interior of pump dry) Wet Up to 6 m (liquid inside pump) Noise 75 dB

Process Pump

size Pilot air supply/exhaust port Rc, NPT, G, NPTF 1/4" Female thread Body wetted areas New PFA Material Diaphragm PTFE Check valve PTFE, New PFA Discharge rate 1 to 13L/min Note) Average discharge pressure 0 to 0.4MPa Pilot air pressure 0.2 to 0.5MPa Air consumption 140 L/min (ANR) or less Dry 0.5 m (Interior of pump dry) Suction lifting range Wet Up to 4 m (liquid inside pump) Noise 80 dB

Process Pump

Port size Pilot air supply/exhaust port Rc, NPT, G, NPTF 1/4" Female thread Body wetted areas New PFA Material Diaphragm PTFE Check valve PTFE, New PFA Discharge rate 0.1 to 9L/min Average discharge pressure 0 to 0.4MPa Pilot air pressure 0.2 to 0.5MPa Air consumption 140 L/min (ANR) or less Dry 0.5 m (Interior of pump dry) Suction lifting range Wet Up to 4 m (liquid inside pump) Noise 75 dB

Process Pump

Pilot air supply/exhaust port Rc, NPT, G, NPTF 1/4" Female thread Body wetted areas ADC12 SCS14 Material Diaphragm PTFE Check valve PTFE, SCS14 Discharge rate 0.5 to 10L/min Average discharge pressure 0 to 0.6MPa Pilot air pressure 0.2 to 0.7MPa Air consumption 150 L/min (ANR) or less Dry Up to 2 m (Interior of pump dry) Suction lifting range Wet Up to 6 m (liquid inside pump) Noise 84 dB

HRX-OM-W058

continuous voltage fluctuation) Applicable earth leakage breaker capacity*8 A 10 Electric system For option T:15 Rated operating current*3 (50/60Hz) A 5.1 / 5.6 5.4 / 6.1 For option T:6.2/7.7 For option T:6.4/7.8 Rated power consumption*3 (50/60Hz) kVA 1.0 / 1.1 1.1 / 1.2 For option T:1.3/1.6 For option T:1.4/1.7 IP rating (Electrical BOX) IP54 (Cable gland:IP67) Noise level*9 (50/60Hz) dB

HRX-OM-X027

/8 Over flow port Port size Rc 3/4 Power supply Single-phase 200 to 230 VAC (50/60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Electric system Applicable earth leakage breaker capacity*8 A 20 Rated operating current*3 (50/60Hz) A 8.9 / 11.5 Rated power consumption*3 (50/60Hz) kVA 1.8 / 2.3 IP rating (Electrical BOX) IP54 (Cable gland:IP67) Noise level*9 (50/60Hz) dB

HRX-OM-R016

Allowable voltage range 10% Electric system Circuit protector17 A 10 (For option -T-MT : 15 Applicable earth leakage breaker capacity9 A 10 (For option -T-MT : 15 (50/60Hz) A 5.2/6.0 Rated operating current4 For option -T-MT : 6.2/7.6 consumption4 (50/60Hz) kVA 1.0/1.2 Rated power For option -T-MT : 1.2/1.5 Noise level10 (50/60Hz) dB 62/65 Dimensions11 mm W377xD500xH660 (W14.8XD19.7xH26.0

HRX-OM-W038

Allowable voltage range 10% Electric system Breaker14 A 20 Applicable earth leakage breaker capacity A 20 Maximum operating current A 14 ( For option -T:17) Rated operating current3 (50/60Hz) A 7.9/9.6 6.9/8.4 Rated power consumption3 (50/60Hz) kVA 1.6/1.9 1.5/1.7 Noise level9 (50/60Hz) dB 64 / 66 Dimensions10 mm W377xD592xH676 (W14.8XD23.3xH26.6[Inch]) Accessory Fitting (for drain port)

HRX-OM-T004

Table 1.4-1 Parameters Display Content Default setting Reference page Category 2.4 4.3 5.3 Communication mode LOC Serial protocol MDBS 4.3 5.3 Communication specifications 485 4.3 5.3 RS-485 terminal OFF 4.3 5.3 Serial communication Mo db us Slave address 1 (-) 4.3 Communication speed 19.2 (-) Slave address ---(1) Communication speed ---(9.6) communication BCC ---(ON) protocol Simple Data

HRX-OM-R028

Table 1.4-1 Parameters Display Content Default setting Reference page Category Communication mode LOC 2.4 4.3 5.3 Serial protocol MDBS 4.3 5.3 Communication specifications 485 4.3 5.3 RS-485 terminal OFF 4.3 5.3 Serial communication Mo db us Communication speed 19.2 (-)1 4.3 Slave address 1 (-)1 Slave address ---(1) 1 Communication speed ---(9.6) 1 Simple communication BCC ---(ON) 1 protocol

HEC_W-E

Piping port size Recirculating fluid IN/OUT : 3/8 Radiating water IN/OUT : 3/8 Recirculating fluid drain : 1/4 (with a plug) Radiating water side:SUS303, SUS304 Recirculating fluid side: SUS303, SUS304, EPDM, Ceramic, PPS glass 30%, Wetted materials Carbon, Polyethylene, Polyurethane Power supply voltage Single phase AC200 to 220V, 50/60Hz Current consumption MAX 5A Max. sound pressure 62 dB

LEC-OM038xx

supply plug (2nd. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Power supply plug (3rd. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Caution When the stop signal is input, the controller (LEC) is stopped with max deceleration speed, and servo motor is turned off. 26 - 7 CN3: Bus conecter No Designation Description 1 DA CC-Link communication line A 2 DB

JXCx-OMT0034CN

AWG20(0.5mm (EMG+,EMG-) 60 8mm 21 - D (100) D 6.3 (CN2SW)ON (EMG+,EMG-) (LEC)EMG (CN2SW) RY CN4 CN2 EMG+ EMG24V 0V (CN2SW)ON EMG+,EMG-(LEC)OFF (LEC)(EMG+,EMG-) 22 - (LEC) ()LEC6 DC24V 0V Ry EMG+ Ry EMG(1 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 23 - 7.CN3 1 1 DA CC-Link A 2 2 DB

Soft Start-up Valve

Noise Tightening Silencer assembly Uni-thread Torque Reduction Element part no. size [Nm] [dB] *1 Insert to (1pc) EXH port AV22P-250AS Uni1/4 4 to 5 21 Element AV32P-250AS Uni3/8 8 to 9 25 O-ring AV42P-250AS Uni1/2 14 to 15 26 (1pc) AV52P-250AS Uni3/4 22 to 24 26 *1 Reference data Element Cover (1pc) -24- 7Working Principle conditions Operation description Internal construction/Cylinder actuation

Fieldbus system (CC-Link compliant)

Make sure to connect "terminating resistor" between "DA"-"DB" to the units at the both ends of the system. (Refer to Fig. 3) The connected terminating resistor differs depending on used cable in system. See the table below.

Fieldbus system (PROFIBUS DP compliant)

Normally, indicated by dB/ft (decibel per feet). B BF Abbreviation of BUS FAULT. It shows the communication of the GW unit. Branch wiring A method to branch and connect a communication line and power line from GW unit to SI unit and Input unit. C Class 2 master Master for control, commissioning, and configuration functions.

Vacuum Unit Ejector / Vacuum Pump System

Noise Level (Reference values) Model ZK207 ZK210 ZK212 ZK215 ZK2G (High-noise reduction silencer exhaust) 46 55 63 69 Noise level [dB(A)] ZK2A (Silencer exhaust) 59 66 75 76 -55No.

Vacuum Unit Ejector / Vacuum Pump System

Noise Level (Reference values) Model ZK207 ZK210 ZK212 ZK215 ZK2G (High-noise reduction silencer exhaust) 46 55 63 69 Noise level [dB(A)] ZK2A (Silencer exhaust) 59 66 75 76 -47No.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MRHQ 63 80 32 50 40 Through-hole with dust cover MHSHJ3-D Auto switch installation examples and mounting positions Auto switch hysteresis Auto switch mounting Protrusion of auto switch from edge of body 1,710 3,040 430 1,020 600 MA Center pusher (cylinder type) with dust cover MHSHJ3-DA D2.360 4,120 550 1,380 800 Center pusher (spring type) with dust cover MHSHJ3-DB 2.310 4.120 520 1,340

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no