Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

100 150 200 250 300 IRV Flow rate (L/min (ANR)) Inlet pressure (MPa) VEX ARP30(K) ARP30(K) Rc 3/8 SRH 0.50 0.25 SRP 0.45 0.40 SRF Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point VCHR 0.30 ITV 0.20 0.25 0.20 IC 0.15 ITVX 0.10 PVQ 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 VEF VEP Flow rate (L/min (ANR)) Inlet pressure (MPa) VER ARP40(K) ARP40(K)

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

100 150 200 250 300 Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP40(K) ARP40(K) Rc1/2 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet

EX260-SEC-A_eng

Designation Description 2 Fieldbus interface connector (BUS IN) EtherCAT connection (M12 4-pole socket, D-coded) 4 5 2 *1: Blinking pattern SV24 V +24 V for solenoid valve 1 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 5-pole plug, A-coded) 3 2 SV0 V 0 V for solenoid valve 200 ms 200 ms 1 SI24 V +24 V for SI unit operation 3 4 Ground

Flow Rate: 5.6 CFM / 9.6 m3/hr / 159 LPM , 5.6 CFM / 9.6 m3/hr / 159 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .59, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 9.8 in / 249 mm Width: 6.14 in /

AS-FPQ/AS-FPG

ASS ASR ASF Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

AS-FPQ/AS-FPG

Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Standard Stroke Table Bore size (mm) 20, 25, 32, 40 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 200, 250, 300 Note 1) Intermediate strokes not listed above are also available. Note 2) As the stroke increases, more sliding resistance may result due to the deflection of the piston rod and other factors.

Clean Rodless Cylinder Series CYP

Provides high linearity and high precision. 1 Series CYP How to Order CYP 15 Z73 200 Clean rodless cylinder Cylinder bore size Number of auto switches 15 32 15mm 32mm 2 pcs. 1 pc. n pcs. Nil S n Standard stroke Standard stroke (mm) 100, 150, 200, 250, 300 350, 400, 450, 500, 600, 700 Bore size (mm) Type of auto switch 15, 32 Nil Select auto switches from the table below.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

3 Port Solenoid Valve Base Mounted Type VQ100 Series Compact Design With Large Flow Rate High Speed Coil (ON: 3.5 ms) Long Service Life (200 million cycles) Innovative Manifold Construction Table of Contents Product Features .5 Specifications .6 How to Order .7-9 Plug-in Non plug-in Dimensional Drawings .10-14 Plug-in Non plug-in Construction .14 Operation Guide .15-18 The Preferred

PSxx-OMF0005CN

ON (+)ON 1 OFF ()ON OFF DC(+)DC(-) 2 ON 80 mA 3 () DC(+)DC(-) NPN PNP ( ) 4 OFF () ( ) 5 () DIN 6 -24No.PS-OMF0005CN-E No. 7 / ( 8 () ) -25No.PS-OMF0005CN-E ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 0.010.25 mm 0.030.50 mm (5 m) 30200 kPa 50200 kPa 1.5 20 50 kPa 5 10 L/min (ANR) 100 kPa 8 15 200 kPa 12 22 DC1224 V10 (p-p)10() 15 mA NPN PNP NPN PNP 1 1 1 80 mA 30 V(

EXxx-OMV0017-D

(Refer to the I/O Mapping Order of Wireless Base / Remote Module of the Operation Manual (page 50) for details) Mode 1: Assigned to the right from the end plate. Mode 2: Assigned to the left from the wireless unit. Unit address order Mode 1 Mode 2 Mode 1 Base unit setting buttons No. Name Functions 1 Save all Changed settings are stored in the equipment.

Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz): 100~120V no longer available; 200~230 (LECSS-S); 200~240 (LECSS-T); Display and settings buttons for direct input and status monitoring; LEC-MRC2 Configuration software required (sold separately); C-UL-US listed (LECSS2-T only)

Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz): 100~120V no longer available; 200~230 (LECSS-S); 200~240 (LECSS-T); Display and settings buttons for direct input and status monitoring; LEC-MRC2 Configuration software required (sold separately); C-UL-US listed (LECSS2-T only)

① Standard strokes from 200 to 1000 mm are available in 200 mm increments, and 1500 and 2000 mm strokes are also available as standard.
② Intermediate strokes can be manufactured from 201 mm in 1 mm increments for the standard model. An intermediate stroke type used to be available via the special order part number suffix “-XB10.”

VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Series 10-MGF ø40, ø63, ø100 Guide Table

M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

AMF

AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AMH

50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMH150 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50

, 110 to 120, 220 VAC (50/60 Hz), 240 VAC (50/60 Hz) 12, 24 VDC?