Fieldbus system Analog unit

) 24 VDC Class2, 2 A Max. sensor supply current 0.5 A/Channel Input specifications Protective function Short circuit protection 12 bit Resolution 0 to 10 V, 1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA Input signal range 16 bit Resolution -10 to 10 V, -5 to 5 V -20 to 20 mA Max. rated input signal 15 V 40 mA Input impedance 100 k 50 Linearity (25 oC) 0.05%F.S or less Repeatability (25 oC) 0.15%

Digital Flow Switch ( compatible)

[i_o ] SW/external input setting 2 [ oUt] SW output [oUt1] Output mode of OUT1 [ HYS] Hysteresis mode [1ot ] Switch operation of OUT1 [ 1_P] Normal output 50% of maximums rated flow range [ 250] 250 L/min (500 L type) [ 500] 500 L/min (1000 L type) [1000] 1000 L/min (2000 L type) [P_1 ] Set value of OUT1 5% of maximums rated flow range [ 25] 25 L/min (500 L type) [ 50] 50 L/min (1000 L type

Precision Cylinder Series MTS

5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.

Compact Cylinder with Air Cushion Series RQ

Rod end nut L1 Double clevis type Double clevis type/RQD, RDQD mm Bore size (mm) Stroke range (mm) A CL Cap bolt 15 to 50 20 63.5 54.5 CD hole H10 Shaft d9 15 to 50 25 71.5 61.5 mm Bore size (mm) L CU CX +0.4 +0.2 B + Stroke 5 B L L1 CD CU CW CX CZ RR 0.1 0.3 CZ CW RR 20 CL + Stroke A + Stroke 4.5 18.5 12 18 16 9 32 8 8 25 5 22.5 14 20 20 10 36.5 10 10 (Only dimensions A and CL are different

CEx-OMQ0013

~850 25~700 1200 950 50 25~800 25~650 1150 900 63 25~800 25~650 1150 900 80 25~750 25~600 1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12 AC DC LCD 21 7. 7-1 7-1-1 1 ISO VG32 060 1m 7-1-2 M4 DIN [050] [25%85%]

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber

IP8101 Series

Simple balance current adjustment 23 4.Calibration 24 5.

Compact Cylinder with Solenoid Valve/

10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage suppressor have an internal circuit allowing voltage drop, so use within the following allowable

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

25 D1 Left side JXCE1 JXCL1 D2 Right side JXC91 JXCM1 E Battery-less absolute (Step motor 24V DC) In-line D3 Upper side JXCP1 JXC51 JXCD1 JXC61 D4 Lower side R Right side parallel (4)Lead [mm] L Left side parallel Size *For size 8 8 16 25 10 12 16 (2)Motor mouting position 5 6 8 In-line D C 2.5 Right side parallel R Left side parallel L *For size 16/25 (5)Storke [mm] (7)Actuator cable

Title not found

1 5 7 (40) 4.02 l102) 3.07 (78) 0.98 (25) 205 (52) 0 5 5 (14) 0 8 3 (21) Ml2x1.75 ( 1 1 ) \'17) lV22x1.5 (37) 4 5 7 ( 1 1 6 ) 2 7 9 (71) a m (204) 256 (65) 049 (r2 5) 3 1 5 (80) 8 3 9 1213) E 1 5 7 (40) l r 1 6 ) 3 6 2 (92) (30) 205 (52) 0 5 5 (14) 0 8 3 (21J Ml2x1.75 ( 1 1 ) o 6 7 <17) lV26x1.5 '| 57 (40) 4 9 6 (126) 243 \721 (21s) 2 5 6 (6s) 0 5 5 3 1 9 (81) L A 2 t.2241 "Min Stroke = 0

Clamp Cylinder Series CK1

5 #0 @3 !4 @4 #1 !0 y @5 !6 !7 !5 #0 @2 MK CKQ CLKQ 40 CK1 !3 !1 !2 o CLK2 Component Parts No. Description Material Qty Note No.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX21 0 1 2 3 VX021N-12A Dimensions page 22 (Single unit) VX22 0 2 3 4 VX23 0 2 3 4 VX022N-12A VX22 0 5 6 VX23 0 5 6 VX023N-12A-L 4 5 Series VX21/22/23 For Water /Manifold Solenoid Valve for Manifold/Valve Specifications N.C. N.O.

Smooth Cylinder Series CQSY

) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5

Digital Flow Switch (Integrated display type)

Replacement part Element Part number Remarks Vinyl chloride piping tube (25 A) ZS-40-U25 25 A Vinyl chloride piping tube 1 pc.

CRBB-OM00004

Hexagon nut Stainless steel 13 Cross recessed round head screw Stainless steel 14 Magnet lever 5 No. 3.

High Vacuum L Type Valve

Valve specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal

Air Cylinder CP Series Cylinder Positioner Assembly

1 5 7 (40) 4.02 l102) 3.07 (78) 0.98 (25) 205 (52) 0 5 5 (14) 0 8 3 (21) Ml2x1.75 ( 1 1 ) \'17) lV22x1.5 (37) 4 5 7 ( 1 1 6 ) 2 7 9 (71) a m (204) 256 (65) 049 (r2 5) 3 1 5 (80) 8 3 9 1213) E 1 5 7 (40) l r 1 6 ) 3 6 2 (92) (30) 205 (52) 0 5 5 (14) 0 8 3 (21J Ml2x1.75 ( 1 1 ) o 6 7 <17) lV26x1.5 '| 57 (40) 4 9 6 (126) 243 \721 (21s) 2 5 6 (6s) 0 5 5 3 1 9 (81) L A 2 t.2241 "Min Stroke = 0

3 Port Air Operated Valve Series SYJA300 1

5-26

Multi-channel Digital Sensor Monitor

R Current read value For example, when the display value is 1.000[MPa], 5%R.D. is 5% of 1.000[MPa], which becomes 0.05[MPa]. When the display value is 0.800[MPa], 5%R.D. is 5% of 0.800[MPa], which becomes 0.04[MPa]. R.D. The pressure range within which the product will meet all published specifications.