IDX-OM-M051

Checks and Inspection Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less

IDX-OM-Z004

50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2 IDF100150F-W

EXxx-OMN0029CN

(/) Max(512 /512 ) Duplicate MAC ID Check Message Group 2 Only Unconnected Explicit Message Explicit Message (Group 2) Poll I/O Message (Predefined M/S Connection set) TM DC1125 V DeviceNet () 55 mA PNP() NPN() 32 (8 /16 /24 /32 ) DC24 V 1.5 W LED (SMC ) DC24 V2 A HOLD / CLEAR / ON 1 IP67() -1050 -2060 3585%RH() AC500 V1 FE DC500 V10 M FE 3(UL508) CE UL(CSA)RoHS 300

, 300, 400500, 600, 700, 800401010001000800620500??

, 300, 400500, 600, 700, 800401010001000800620500??

, 300, 400500, 600, 700, 800401010001000800620500??

VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

, 300, 400500, 600, 700, 800401010001000800620500??

, 300, 400500, 600, 700, 800401010001000800620500??

, 300, 400500, 600, 700, 800401010001000800620500??

, 300, 400500, 600, 700, 800401010001000800620500??

, 300, 400500, 600, 700, 800401010001000800620500??

, 300, 400500, 600, 700, 800401010001000800620500??

, 300, 400500, 600, 700, 800401010001000800620500??

, 300, 400500, 600, 700, 800401010001000800620500??

, 300, 400500, 600, 700, 800401010001000800620500??

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Applicable stroke table Standard Model Stroke (mm) 100 200 300 400 500 600 700 800 900 1000 Manufacturable stroke range [mm] LEFS16 100 to 400 LEFS25 100 to 600 LEFS32 100 to 800 LEFS40 200 to 1000 Strokes are manufacturable in 1 mm increments. Refer to the manufacturable stroke range. However, strokes other than those shown above are produced as special orders.

, 300, 400500, 600, 700, 800401010001000800620500??