MXU Stroke 5 10 15 20 25 30 5 mm 10 mm 15 mm 20 mm 25 mm 30 mm Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19 Port size (inch) 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min Note 1) Output for the display units of PF2D 300/301 04 20 40 PF2D504 PF2D520 PF2D540 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-
(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.
byte 3 12 byte 4 byte 4 10 byte 5 20 byte 6 20 byte 4 byte 7 10 byte 8 20 byte 9 36 byte 4 byte 10 10 byte 11 20 byte 125 Get/Set 2 JOG *1 IO 20 - 3IO IO Number Type Name 100 Input 101 Input 102 Input 14 110 Output 111 Output 112 Output 12 113 Output 4IO Input Assembly Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP
Station 3 2 1 D side U side Stations 02 03 2 stations 3 stations 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valve S070 A 5 B G Electrical entry Body type Body type Base mounted with clips Symbol A G C Grommet Plug lead with light/surge voltage suppressor Coil voltage Power consumption Pressure specification Flow rate 24 VDC 12 VDC
) [o10] [o11] [o12] (OUT2) 20) [o20] [o21] [o22] () -22No.PF-OMO0007CN (OUT1) 20) [1_n] [1_P] (OUT2) 20) [2_n] [2_P] [Anr] 20 1 atm()65R.H.
268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400 1 N 16 28 47 82 130 204 359 525 mm 4 4 6 8 8 12 16 20 g 95 150 230 440 620 1,050 1,800 3,200 1) 1625 =20mm 3263
Stations 02 03 2 stations 3 stations Station 3 2 1 D side U side 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valves S070 A 5 B G Electrical entry Body type Body type Base mounted with clips G C Grommet Plug lead with light/surge voltage suppressor Symbol A Coil voltage Power consumption Pressure specification Flow rate 5 6 V S R 24
M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
Table 10-1 specifications EX245-FPS1 EX245-FPS2 EX245-FPS3 (W x L x H) mm 85 x 148.5 x 136 1,100 g 1,200 g 8 128 () 64 (US1) 350 mA 300 mA (US1/US2) XD1/XD2 16 A (US1/US2) 10 A (US1/US2) 24 VDC +20%/-15% <20.4 VDC US1 >21.6 VDC < 17 VDC 6 A 24 VDC +20%/-15% <21.6 VDC : >22.8 VDC US2 / <17 VDC 4 A () 1.2 V US1 US2 4 8 US1 UT1/UT2 24 VDC +20%/-15% 2 A( UT1) 1 A (
ARP No load voltage [V peak] Max. current rating [A] 0 to 20 [V] 5.0 IR-A 100 IR Over 20 [V] to 30 [V] Peak voltage 2) A circuit using max. 30 [Vrms] or less (42.4 [V peak]), which is powered by UL1310 or UL1585 compatible Class-2 power supply. 4.
hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA GB Piping port 2-M5 x
For ISA3-G type, the range is up to 280, with a hysteresis of 20.
(cm2) (mm) (mm) direction 3 4 i 5 6 12.57 j37.7 50.3 62.8 75.4 OUT 40 20 1 140.2: 168.2 28.0 84.1 112.1 37.7 47.2 56.6 IN 9 .43 1283 19.63 58.9 78.5 98.2 117.8 OUT 50 20 49.5 16.49 66.0 IN 82.5 199.0 124.7 155.9 !
IDF15E1-20 L PE N TB CM ILS FM OLR PTC OLR ILS PTC PTC CM PRS TB C11 C11 FM PRS P 6.4 2 6 3 7.A A 7.1 7.2 A (10) 7.3 7.4 IDF15E1-10/20-A m 3/min(ANR) 1) 50Hz 1.2 60Hz 1.3 10 1) ANR 65% 2) 7 1 8.C C 8 8.1 8.2 8.3 1) 2) 81 9.K K 9 9.1 ( ) 9.2 1.6MPa AD48-8-X2110 KQ2H10-02S 10 IDF15E1-10-K IDF15E1-20-K 1) IDF-S0086 N.O. () 1) IDF-S0002 1 9 1 10.L L 10 10.1
IDX-OM-W023-B / Series IDU8E-10(-C,K,L,M,R,S,T) IDU8E-20(-C,K,L,M,R,T) IDU11E-10(-C,K,L,M,R,S,T) IDU11E-20(-C,K,L,M,R,T) IDU15E1-10(-C,K,L,M,R,S,T) IDU15E1-20(-C,K,L,M,R,T) IDU8E-23(-C,K,L,R,T,V) IDU11E-23(-C,K,L,R,T,V) IDU15E1-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 )
Supply ftsssure Efu 0.5% pr 7 PSIG (0.5 Ksf/cm,) Chanse A|ailabb Cylinder Siz5 Bore: 2" to 4" (50-100mm) Stroke: 1" (25 mm) min. to 12" (300 mm) max.
Supply ftsssure Efu 0.5% pr 7 PSIG (0.5 Ksf/cm,) Chanse A|ailabb Cylinder Siz5 Bore: 2" to 4" (50-100mm) Stroke: 1" (25 mm) min. to 12" (300 mm) max.
(Reduce power consumption by up to 20%.)