PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

F/ISE

2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

Width across flats H1 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/4 R 1/4 R 1/4 R 1/4 14 14 14 14 20 20 20 20 14 14 14 14 D 2 A Connection thread H1 L1 Copper extension nozzle: KNL (mm) Model Nozzle size D Outside diameter L1 Outside diameter KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 1.5 2 1.5 2 6 6 6 6 300 300 600 600 D L1 Note) When

EXxx-OMV0017-D

Timing of Wireless Communication 20 / 40 / 100/ 200 / 500 / 1,000 / 2,000 / 5,000 msec 500 msec Activated only when protocol V.2.0 is used If wireless communication (including retries) does not succeed due to obstacles or for other reasons, it is judged to have failed after a set amount of time and disconnected. Afterwards, the Base and the Remote are reconnected.

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

JXCx-OMT0032CN

6.1 . 20 6.2 . 20 6.3 . 21 1 - . 22 7.CN3 . 23 8.CN1IF(CONT) . 24 8.1 . 24 8.2 . 26 9.CN2TB/PC . 27 9.1 . 27 10.LED . 28 10.1 LED . 28 10.2IFLED . 28 11. . 29 11.1 . 29 11.2 . 29 11.3 . 29 11.4 . 31 12. . 32 12.1 . 32 12.2 IF(IN Data) . 38 12.3 (IN Data) . 38 12.4(OUT Data) . 40 13.

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

1

The chart on the left illustrates the example when 100 [kPa], F.S. = 100 0 = 100 [kPa], 3.0% F.S. = 100 x 0.03 = 3 [kPa]. It means that if the tempareture is changed within the range of 0 to 50[C], the error will occur at the max. 3 [kPa].

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

or less 0.19 0.20 0.80 0.19 0.20 0.79 15 or less 95 Rubber seal Closed center SQ1000 10-SQ1331 39 or less 0.16 0.26 0.58 0.15 0.20 0.64 25 or less 100 Rubber seal Exhaust center 10-SQ1431 39 or less 0.19 0.20 0.80 0.15 0.20 0.64 25 or less 100 Rubber seal Pressure center 10-SQ1531 39 or less 0.14 0.20 0.59 0.19 0.21 0.79 25 or less 100 Rubber seal Note 1) Values for the cylinder port size

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Air cylinder (Series compatible with secondary batteries)

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 9 Position for application of grease Table 10 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 20 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.9, ) Pay attention to the mounting direction of the seal.

DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Coolant Valve

6.1 9.3 7.9 13.2 14.3 20.0 14.3 20.0 22.5 29.3 25.7 34.3 35.4 53.6 35.7 57.1 42.4 60.6 63.1 86.5 7 0.3 0.2 11 15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 45 65 56 80 3 8 0.7 0.5 1 2 3 4 0.8 1.0 1.2 1.4 1 1 4 1 2.2 2.4 5.0 5.2 32 1 2 1 3.6 3.8 Symbol 6.8 7.0 40 Valve type Operation N.C.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

Dead volume LVM11: 11 l or less LVM1R, LVM11: 20 l or less The dead volume enclosed by the body and the diaphragm Valve width ( ): 13 mm 2 port 3 port Valve width 9.5 mm (LVM090), 20 mm (LVM200) are also available.

VNC

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 x 2-18 mouting hole Applicable flange Pilot port Rc A Model L K J H F E D C B VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 278 293.5 317.5 310.5 326 350 12 12 14 36 42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 Flange Type Port size: 65F, 80F Electrical

2/3 Port Solenoid Valve for Chemicals

Dead volume LVM11: 11 l or less LVM1R, LVM11: 20 l or less The dead volume enclosed by the body and the diaphragm Valve width ( ): 13 mm 2 port 3 port Valve width 9.5 mm (LVM090), 20 mm (LVM200) are also available.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 45 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AFF 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27 32