Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

Standard Combinations

(8) 0.02 to 0.2 MPa setting 20 30 40 ACG20 to 40 1/8 Metal bowl ACG20 to 40 3/8 Lubricator with drain cock ACG20 to 40 1/2 Nylon bowl ACG30, 40 Metal bowl with level gauge ACG20 With bowl guard Model combination ACG20 to 40 (9) Filter case with drain guide Combination ACG20 to 40 Non-relieving type Regulator with Built-in Pressure Gauge Filter Regulator with Built-in Pressure Gauge ACG20

Multistage Ejector (N)ZL Series

50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120

MX-OMP0051

MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 33 23 23 23 29 38 63 63 63 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 30.9 31.9 31.9 31.9 44.9 44.9 46.9 69.9 69.9 D-M9V/M9WV A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 2 2.6 5.6 7.6 7.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 7.1 7.1 7.1 13.1 30.1 7.1 MXQ12(A,C) 16.5 16.5 16.5 16.5

11-cq2-e

Grease pack part no.: GR-S-010 (10 g) 80 Compact Cylinder/Water Resistant: Double Acting, Single Rod Series CQ2 Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.290 Construction Standard (40 to 100) !2 !3 !1 !0 !3 !3 !2 !1 Without Auto Switch With Auto Switch The numbers are the same as the "Construction" of the CQ2 series catalog (CAT.ES20-205).

Speed Controller: Standard Type Series AS In-line Type

32, 40, 50, 63 124 AS3000-03 3/8 810 12.3 810 12.3 221 AS4000-02 1/4 1,670 25.5 1,670 25.5 40, 50, 63 80, 100 214 AS4000-03 3/8 1,670 25.5 1,670 25.5 205 AS4000-04 1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

Grease pack part no.: GR-S-010 (10 g) 80 Compact Cylinder/Water Resistant: Double Acting, Single Rod Series CQ2 Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.290 Construction Standard (40 to 100) !2 !3 !1 !0 !3 !3 !2 !1 Without Auto Switch With Auto Switch The numbers are the same as the "Construction" of the CQ2 series catalog (CAT.ES20-205).

Low Profile Guide Type

10 12 33.5 22.5 12 46 44 23.5 55 100,150,200,250,300,350,400,450,500,550,600 CYP Model KC KA KB KH KW L LA LL LW LZ ML MM N PA PB PC Q QA QB QW CY1F10 6.5 44 8 19 59 38 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51 10 19 66 53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13 27 84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port)

Silencer Series AN

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

42 40 42 40 44 42 9 15.4 13.7 KK 39 21.3 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L1,L2: Nut material PVDF dimensions W: Width across flats dimension 65 D 25 18 19.5 21 22.5 20.5 26.7 MS 79 26.3 41 33.4 LQ 15.4 20.5 26.3 52.5 15.4 20.5 26.3 20.5 26.3 52.5 21.3 26.7 33.4 60.3 21.3 26.7 33.4 26.7 33.4 60.3 47 80 45 78 MQR 22 24 29 22 24 49 88 47

NCQ8

1) Refer to page 50 for auto switch common specifications.

High performance type Step Motor Controller (Servo/24 VDC)

1 0 1 0 0 0 40 1 0 1 0 0 0 41 1 0 1 0 0 1 41 1 0 1 0 0 1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43 1 0 1 0 1 1 43 1 0 1 0 1 1 44 1 0 1 1 0 0 44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53

Multistage Ejector Series ZL112/212 1

MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Multistage Ejector Series ZL112.212

50 75 40 40 100 50 ZX 30 30 20 20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 ZH 70 70 60 60 ZU 50 50 40 40 30 30 ZL 20 20 10 10 ZY 0 0 10 20 30 40 50 60 70

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 8-9-10 10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Refer to Handling Precautions for SMC Products (M-E03-3) for Safety Instructions and Vacuum Equipment Precautions. 50 40 40 40 30 20 20 20 Caution Maximum suction flow 10 Refer to the vacuum equipment model selection on Best Pneumatics No.r for the selecting and sizing of Series ZQ. 0 0.1 0.2 0.3 0.4 0.5 0 5 10 15 20 25 Suction flow (l/min(ANR)) Supply pressure (MPa) 3 Space Saving Vacuum

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

HRX-OM-I051

Table 7-1 Water Quality Standards for Fresh Water (Tap Water) Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L

PFA/PFW

34 4-4.5 40 50 (41.5) 3 4 1 2 73 Connector pin numbers Pin name Pin No.

Title not found

AW20 (K) to 40 (KJ !