Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female
Lube unit S1 Thread type ALDU600 (with panel) 1a (without oil OFF) S2 Nil Rc NPT Body size (Standard) N 6 9 1B 2B Accessory Port size Float Switch Specifications Symbol Description Nil Bracket Panel 06 10 12 14 20 4 3 Voltage Max. contact capacity Max. operating current Contact point construction Level indication 200 VAC, 200 VDC 50 VA AC, 50 W DC 0.5 A AC, 0.5 A DC 1a, 1b Bottom limit indication
6 Single acting, spring return Piston seal CQ2B12-S-PS Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS CQ2B16-S-PS Gasket CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size.
2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket 20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60 6BFlange How to Select Max.
0.5% Within 1% Sensitivity Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (lvlax.) less than 0.25 SCFM @ 20 osi 0,7 SCFM @ /u osl 0.25 scFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFIVI @ 20 Dsi 0.7 SCFM @ 70 DSi Supply Pressure Variation Effect (Max.)
12 3.2 AFF,AM,AMD 90D 148 93.5 58.5 110 22 11 20 12 3.2 -22- Doc. no.
Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150
Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.
8.3 1200 2.97 (75.4) 6.9 1000 800 5.5 2.22 (56.4) 600 4.1 0.28 (7.1) 400 2.8 200 1.4 0 0.0 0 10 20 30 40 50 Flow rate (slpm, N2) 2.80 (71.1) Viton is a registered trademark of DuPont. 65 Process Gas Equipment / Regulator Specific Product Precautions Be sure to read before handling.
Power supply 11) 100/110V AC (50/60Hz) 200/220V AC (50/60Hz) 21) 1) Consult SMC if the supply voltage for LC1-1HV1 will be 110V AC or more, or the supply voltage for LC1-1HV2 will be 220V AC or more. or LC1-1-T1(Teaching box) are required.
Applicable dryer Weight lb [g] A B A 0.8 [20] 0.8 [20] AME 8.7 [220] 9.4 [240] 0.08 [35] IDF-FL209 IDFB3E AMF IDFB4E 14.8 [375] 7.7 [195] 0.12 [55] IDF-FL203 B IDFB6E ZFC 13.3 [340] 0.15 [70] IDF-FL204 IDFB8E 10.4 [265] SF 14.8 [375] 0.17 [75] IDF-FL205 IDFB11E 0.4 [10] SFD [17.3] 440 [14.5] 370 [0.26] 120 IDF-FL206 IDFB15E LLB (IDF-FL209) (IDF-FL203 to 208, 213, 214) IDFB22E 21.7 [550] 14.4
30 70 150 220 2,905 MHL2-32D1 120 198 318 3,820 32 20 MHL2-32D2 160 242 402 4,655 MHL2-40D 30 100 188 288 5,270 MHL2-40D1 160 246 406 6,830 40 20 MHL2-40D2 200 286 486 7,905 ) (mm) 10 16 20 25 32 40 (MPa) 0.15~0.6 0.1~0.6 () -10~60 (mm) 0.1 () (N) 0.5MPa 14 45 74 131 228 396 () 10,16,20,25 40mm 32,40 80mm 4 - 3. 3-1 3-2 3-3 1 ISO VG32 5 - 3-4 Nm mm Nm mm MHL2-10D M4X0.7 1.4 5
35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Note) NPT thread for AN101 and AN110 is alsoavailable.
Count Pressure characteristics Flow characteristics Supply pressure: 0.2MPa Set pressure: 0.05MPa Relief flow characteristics Supply pressure: 0.2MPa 0.15 1.0 0.25 Output deviation factor (%F.S.) 0.20 0.5 Set pressure (MPa) Set pressure (MPa) 0.10 Set point 0.15 0.0 0.10 0.05 0.5 0.05 1.0 0 200 400 600 0.00 0.0 0.1 0.2 0.3 0 200 400 800 600 Flow rate (l/min (ANR)) Flow rate (l/min (ANR))
Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female
6 SMC Actuators: Copper-free Rotary Actuators Size: 1, 3, 7, 10, 20, 30, 50, 70, 100, 200 Size (Torque) Rotary Actuators Series Application Standard Copper-free 1 3 7 10 20 30 50 70 100 200 Series variations Rotary table Series MSU Basic type MSU With auto switch MDSU Rotary table Series MSQ 20-MSQ Basic type (Adjusting bolt type) 20-MSQA High precision type (Adjusting bolt type) 20-MSQR
3 (Edition 1.13) Version 1.1 Port Class A Communication speed 100 Mbps*2 10/100 Mbps*2 (Automatic negotiation) 100 Mbps*2 125/250/500 kbps 230.4 kbps (COM3) Configuration file*3 ESI file EDS file GSDML file EDS file IODD file I/O occupation area Input 20 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input
Metric size Type (recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate l/min (ANR) (SCFM) Symbol Tubing size 100 200 101 201 Max. 20 (0.70) Max. 50 (1.75) Max. 20 (0.70) Max. 50 (1.75) Metric size (release button: light gray) 06 6 08 8 Inch size (release button: orange) Inch size Symbol 03 Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Tubing
Return voltage is 20% or more of the rated value at AC power and 5% or more at the DC power.
Metric size Type (recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate l/min (ANR) (SCFM) Symbol Tubing size 100 200 101 201 Max. 20 (0.70) Max. 50 (1.75) Max. 20 (0.70) Max. 50 (1.75) Metric size (release button: light gray) 06 6 08 8 Inch size (release button: orange) Inch size Symbol 03 Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Tubing