3

150 200 10 50 100 150 200 250 15 600 500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

MXF

0 0 20 40 60 80 100 120 60 0 40 80 100 20 20Load (N) Load (N) Load (N) Data MXF20 Lr = 50 mm 0.10 0.10 0.28 MXF20-100 MXF20-100 Table displacement amount (mm) Table displacement amount (mm) 0.24 Table displacement amount (mm) 0.08 0.08 MXF20-75 0.20 0.06 0.06 0.16 MXF20-50 MXF20-75 MXF20-100 MXF20-75 MXF20-50 MXF20-30 0.12 MXF20-30 0.04 0.04 MXF20-50 0.08 MXF20-30 0.02 0.02 0.04 0 0 0 50

IZ-OMK0015

cable with the ground resistance of 100 ohms or less.

PSE540/560

to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 1 MPa 0 1 MPa Low pressure 0 to 101 kPa 101 kPa 0 For general purpose fluids Compound pressure 100 to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 500 kPa 0 500 kPa 16-3-24 3 Compact Pressure Sensor For General Air Series PSE540 How to Order ZSE ISE Pressure sensing range PSE 1 3 Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa)

Low Profile Slide Table Series MXF

(N) Load (N) Load (N) MXF20 MTS Lr = 50 mm 0.10 0.06 0.28 Table displacement amount (mm) Table displacement amount (mm) MXF20-100 MXF20-100 Table displacement amount (mm) 0.24 0.08 MXF20-100 MXF20-75 MXF20-50 MXF20-30 MXF2075 0.20 0.06 0.04 0.16 MXF2050 MXF2075 0.12 MXF2030 0.04 0.02 MXF2050 0.08 MXF2030 0.02 0.04 50 100 150 40 80 120 240 200 160 200 50 100 150 200 0 0 0 Load (N) Load (N

REC

300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

PFxx-OMA1007

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below.

3

Additional Weight Ensuring Safety Unit: g Caution 12 13 16 32 20 100 25 100 32 200 40 200 50 350 63 350 Bore size (mm) With arm Rod flange (including mounting bolt) If one side of the piston is pressurized by supplying air with the clamp arm attached, the piston will move vertically while the clamp arm rotates.

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Standard Strokes (mm) Bore size Standard stroke Note1) Maximum manufacturable stroke Note 2) 1 Cylinders with rubber bumper have no bumper. 2 Only compatible with cylinders with rubber bumper, but has no bumper. 20 25, 50, 75, 100, 125, 150, 200 201 to 1500 25 32 40 50, 63 80 100 25, 50, 75, 100, 125, 150, 200, 250, 300 301 to 1500 Refer to pages 355 to 361 for cylinders with auto switches

CRQ2

The rotation angle can be adjusted between 0 to 100. The rotation angle can be adjusted between 0 to 100.

Table of Contents

Series CQ2 Compact Cylinder: Long Stroke Type Double Acting, Single Rod 32, 40, 50, 63, 80, 100. How to Order . Precautions. Specifications. Construction. Dimensions . Series RQ Compact Cylinder with Air Cushion 20, 25, 32, 40, 50, 63, 80, 100. Features. Series Variations. Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod 20, 25, 32, 40, 50, 63, 80, 100 .

60

Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure (P2) MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VXK211l 2 50 100 150 200 250 300 350 VXK2l2l 3 100 200 300 400 500 600 VXK2l3l 4.5 200 400 600 800 1,000 1,200 VXK2 4l 3 2 6 500 1,000 1,250 3 2 VXK2 5l 8 500 700 Flow rate Q l/min (ANR) How to read the graph The sonic range pressure

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Electronic Pressure Switch Series (Separate Type)

kPa 27 to 80 kPa 4.5 to 28 VDC (ZSM1-115) 24 to 125 VDC 100 to 250 VAC to 100 VDC to 100 VAC 24 to 220 VDC 100 to 550 VAC Voltage 100 VAC/DC or less (ZSM1-121) Repeatability 0.05 MPa 0.05 MPa 3% F .S. 3% F.S. 3% F.S. 3% F.S. 10% F.S. 15 kPa or less (ZSM1-115) 0.02 to 0.35 MPa (Without pointer scale) 0.03 to 0.4 MPa (Without pointer scale) Hysteresis (Calibration range of ISG) 0.08 MPa or

VQ20/30

Blue (100 VAC) 2 (, +) 2 Red (200 VAC) Indicator light Indicator light With indicator light With indicator light Red (+) DC Blue (100 VAC) Series VC (Class H coil) Red (100 VAC) Grommet, Conduit, Conduit terminal AC circuit For energy-saving circuit, there is the polarity. 1 DIN terminal Since internal connections are as shown below for the DIN terminal, make connections to the power supply

Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

CQM

Lateral load Operating pressure: 0.5 MPa 100.0 Eccentric distance Stroke 50 100 10.0 Load weight (kg) 40 32 Plate allowable lateral load (N) 50 25 1.0 40 20 16 32 20, 25 10 12 12, 16 0.1 10 100 1000 Maximum speed (mm/s) 1 0 10 20 30 40 50 60 70 80 90 100 Stroke + Eccentric distance (mm) 7-5-4 5 Series CQM Compact Cylinder: Guide Rod Type Double Acting, Single Rod Construction 12 to 25 With

XLG Series

39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62 12.5 11 XL*-OMI0010-E 5.

Digital Flow Switches

PF2W504--1 PF2W520--1 PF2W540--1 PF2W511--1 PF2W504--2 PF2W520--2 PF2W540--2 PF2W511--2 4 0.5 4 0.5 16 2 16 2 40 5 40 5 100 10 100 10 19 Series PF2W For Water Digital Flow Switch to are terminal numbers.