SMC Corporation of America
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Hastelloy C-22 316L SS 316L SS PCTFE (Option: Vespel) PCTFE Dimensions Flow Characteristics inch (mm) SL5200 SL5210HF 100 psig (0.69 MPa) inlet Inlet pressure: 50 psig (0.34 MPa) inlet 0.97 (24.6) 70 0.48 60 0.41 1.18 (30.0) Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Max. 3.95 (100.3) 40 0.28 30 0.21 0.44 (11.2) 1.42 (36.1) 20 0.14 10 0.07 0 0.00 1.25 (31.8) A 0 20 40 60 80 100 120

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Repetition Pressure characteristics Flow characteristics 0 1 10kPa 20kPa -20 Output deviation factor % F.S. 0.5 40kPa -40 Set pressure kPa Out 60kPa -60 0 Return 80kPa -80 -0.5 100kPa -100 -120 -100 -80 -60 -40 -1 0 1 1.5 0.5 2 2.5 3 3.5 -120 -20 4 Flow rate l/min (ANR) Supply pressure MPa 5 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Single unit 4-6 2-6 PWR L bracket (optional

AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement distance: AN200 to 500 1 m, AN600 to 700 2 m, AN800 to 900 3 m Tension bolt Sound absorbing material (PE sintered body) Sound absorbing material (PE sintered body) Cover Case Without silencer With silencer Body 130 Hexagonal flats 120

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

Left Right VAC. port Common EXH port 2-Rc 1/2, 3/4 (mm) L1 1 Stations L 28 1.5 40 1.5 56 1.5 4 76 1.5 88 1.5 104 1.5 5 92 1.5 104 1.5 120 1.5 6 108 2.0 120 2.0 136 2.0 7 124 2.0 136 2.0 152 2.0 8 140 2.0 152 2.0 168 2.0 9 156 2.0 168 2.0 184 2.0 10 2 44 1.5 56 1.5 72 1.5 3 60 1.5 72 1.5 88 1.5 172 2.0 184 2.0 200 2.0 L2 L3 13-4-15 15 Series ZM Manifold

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31

Pin description 1 DC(+) PF2W740 2 OUT2 3 DC() 120 60 1.6 17 67 6 Static Electricity Elimination Equipment Reduced-wiring Fieldbus System 4 OUT1 FLOW SWITCH U P 34 55 S E T 60 50 34 OUT1 OUT2 DOWN FOR WATER 34 2 x Port size 4 x 4.5 50 40 (42.2) Alphabetical Index Length Measuring/ Counter 73 34 Flow direction 307 B Series PF2W Dimensions: Integrated Display Type For Water PF2W711 79 148 9

122.2 <124.2> 100 22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9 (for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 VNA 122.2 <124.2> 142.2 <144.2> VNB 22.6 100 120 80

Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 2 position 0.47 0.41 0.41 0.47 0.13 0.13 M5 x 0.8 M5 x 0.8 0.49 0.46 0.49 [0.39] 0.40 0.43 [0.35] 0.42 0.44 0.37 0.51 [0.38] 0.44 0.47 [0.39] 0.45 0.13 0.12 0.14 [0.10] 0.12 0.13 [0.10] 0.12 VZ320--M5 3 position 130 75 120

P.125 P.120 Use to branch tubing in the same direction.

(MPa) Group Model 20oC 100oC 200oC 260oC 2.4 Max. operating pressure (MPa) A B TLM0201 TLM0425 TLM0302 TLM0604 TLM0403 TLM0806 TLM1075 TLM1209 TLM1008 TLM1613 TLM1210 TLM1916 TLM2522 2.3 1.7 1.1 0.9 0.55 0.45 0.3 0.23 2.2 A 2.0 1.8 C 1.5 0.7 0.35 0.2 B 1.6 1.4 C 1.2 D 1 0.5 0.25 0.15 1.0 0.8 0.6 E 0.7 0.35 0.17 0.11 0.4 0.2 F 0.6 0.3 0.15 0.1 0.0 G 0.4 0.2 0.1 0.05 20 0 20 40 60 80 100 120

NAAMS Standards Compliant Power Clamp Cylinder 50, 63 CKZ3N -X2742A -X2568 How to Order Metal switch cassette cover Front mounting hole Nil (None) C (With cover) Nil (No) F (Yes) With metal switch cassette cover Front mounting hole X2742A CKZ3N 63 120 R T F Base type X2568 CKZ3N 63 120 R T L C F With manually operated handle Bore size Top cover 50 50 equivalent 63 63 equivalent Nil Rubber

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 40 100 160 200 10 16 20 25 32 30 60 80 40 80 100 20 40 60 50 100 120 70 120 160 Nil 1 2 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

Thread type Opening/Closing stroke (mm) Cylinder bore Symbol Type 10 20 40 60 16 30 60 80 20 40 80 100 25 50 100 120 32 70 120 160 40 100 160 200 Symbol Nil 10 to 25 M thread Rc NPT G Nil 1 2 TN TF 32 to 40 Double acting Action D Applicable Auto Switch/Refer to pages 761 to 809 for further information on the auto switches.

Material: Chromium molybdenum steel Surface treatment: Nickel plated Cylinder model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Cylinder model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Mounting bolt size M5 x 50L x 55L x 60L x 65L x 75L x 85L M5 x 55L x 60L x 65L x 70L x 80L x 90L M5 x 60L x 65L x 70L x 80L x 90L x 115L

PF2W5--2 (With voltage output type) PF2W540-(N)B 48.2 60 120 1.6 23 Wiring Brown (1) DC(+) Main Circuit Black (4) OUT (Output for display unit) 50 60 34 55 White (2) NC/Analog output Blue (3) DC() 4-4.5 2-Port size 6 50 40 Use this sensor by connecting it to a P/A remote type display unit Series PF2W2/3. Connector pin numbers 2 1 A (44.2) 4 3 (mm) Pin no.

Maximum load mass m m CXS6, 10, 15, 20 CXS25,32 1.5 4.0 CXSM/Slide bearing CXSL/Ball bushing CXSM/Slide bearing CXSL/Ball bushing 3.5 Maximum load mass (kg) Maximum load mass (kg) 3.0 1.0 2.5 2.0 1.5 0.5 CXS32 CXS25 1.0 CXS20 0.5 CXS6 CXS10 CXS15 0.0 0.0 0 20 40 60 80 100 120 0 20 40 60 80 100 120 Stroke (mm) Stroke (mm) Allowable kinetic energy (XB19) Plate end inclination The values in

0.6MPa Gripping force N Gripping force N 50 0.6MPa 80 0.5MPa 0.5MPa 40 60 0.4MPa 0.4MPa 0.3MPa 30 0.3MPa 40 20 0.2MPa 0.2MPa 20 10 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L mm MRHQ25D MRHQ25D L: Gripping point distance 160 100 Pressure 0.7MPa Pressure 0.7MPa 140 Gripping force N Gripping force N 0.6MPa 0.6MPa Model selection guidelines by work piece weight 80 120

K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.