Table of Contents

75/25 110/40 170/57 240/80 300/100 Note) In the case of two or more options, indicate them alphabetically.

C95

m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m (kg) Load weight: m (kg) 32 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

x 1.0 12 80 18 30 95 6.8 40 25 20 to 35 40 28.5 75 64 5 6 60 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 M6 x 1.0 12 95 28 40 117 7.3 60 32 Size Stroke range [mm] Without lock With lock A VB VC A VB VC 25 15 to 100 255.5 82.5 11.5 300.5 127.5 11.5 105 to 300 280.5 325.5 32 15 to 100 266.5 80 14 306.5 120 14 105 to 300 296.5 336.5 757 LEYG Series AC Servo Motor

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80 68 56 30 12.5 25 37.5 50 75 100 125 150 175 200 225 250 103 116 128 141 166 191 216 241 266 291 316 341 100 76 56 32 12.5 25 37.5 50 75 100 125 150 175 200 225 250 103 116 128 141 166 191 216 241 266 291 316 341 125 82 75 40 10 20 30 40 60 80 100 120 140 160 180 200 130 140 150 160 180 200 220 240 260 280

CL

G59F Z73 A54 A33C A34C A44C A59W Y59A Y7P J51 Y59B G39C K39C Y7NW Y7PW Y7BW Y7BA F59F Relay, PLC 100 V Grommet Reed switch Solid state switch Relay, PLC PLC 40 to 100 Yes Yes 100 V, 200 V 12 V 2-wire 24 V PLC 100 V 200 V Terminal conduit 40 to 160 40 to 100 Relay, PLC DIN terminal Diagnostic indication (2-color indication) 40 to 160 40 to 100 Grommet 3-wire (NPN) 3-wire (PNP) 24

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

, 63, 100 10, 15, 25 10, 15, 20 125 to 160 125 to 160 125 to 200 12 to 100 80 to 100 63 to 100 40 to 100 32 to 100 40 to 100 32 to 100 32 to 100 20 to 63 20 to 50 20 to 80 16 to 32 10 to 32 12 to 25 20 to 40 20 to 40 20 to 40 20 to 40 32 to 63 25 to 50 25 to 40 25 to 40 6 to 32 32, 40 Bore size 6, 10 10 16 20 25 20 25 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-7-7 8 Cylinder with Lock Double Acting, Single Rod Series CNA 40, 50, 63, 80, 100 How to

Air Cylinder

(mm) 40 50 63 80 CA2-B04 CA2-B05 CA2-B06 CA2-B08 CA2-B10 +0.058 0 57 35 11 65 15 85 10 9 17 8 40 52 60 165 10 +0.070 0 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 +0.070 0 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 196 16 +0.084 0 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 100 +0.084 0 93 60 16.5 100 35.5 130 15 13.5 24 12 65 90 116 256 25 10 Series CA2 Dimensions of Accessories

Environment

[N] Force [N] 100 Lead 10: LEY16AA Lead 10: LEY16A 60 80 LEL 60 40 40 20 LEM 0 20 0 10 20 30 40 50 60 70 80 90 Set value of pushing force [%] Max. 85% 20 30 40 50 60 70 80 90 100 LEY LEY Set value of pushing force [%] Max. 95% Ambient temperature Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 25C or less 85 or less 100 Ambient temperature Set value of pushing

Electric Actuator

/200/400 W) Ball Screw Drive Belt Drive Ball Screw Drive Series LEFS Series LEFB Series LEFS Size Stroke Size Stroke Size Stroke 25 32 40 16 25 32 16 25 32 40 100 to 600 100 to 800 200 to 1000 300 to 1000 300 to 2000 300 to 2000 100 to 400 100 to 600 100 to 800 200 to 1000 CAT.NAS100-87 Slide Table Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Series

CNA

100 100 100 MGF 50 50 50 40 40 40 200 200 80 80 80 63 63 63 100 100 CY1 50 50 50 Load weight m(kg) Load weight m(kg) 50 40 30 50 40 30 40 40 40 MY1 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Max. speed V(mm/s) Max. speed V(mm/s) 3.3-7 Cylinder with Lock/Double Acting Single Rod Series CNA 45, 50, 63, 80, 100 How to Order CNA L N 50 100 JN D Standard

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

CM2

40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 h Symbol Bore size (mm) 20 25 32 40 e f B3 Stroke Bore size (mm) 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 181 185 185 190 20 25 32 40 30 32 32 41 36 36 36 46 24 24 24 25 With Rod Boot l ZZ Symbol Z 1 to

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) With 1 pc. 70 75 80 85 95 100 15 D-A9 70 + 40 (n 4)/2 n = 4, 8, 12, 16 80 + 40 (n 4)/2 n = 4, 8, 12, 16 85 + 40 (n 4)/2 n = 4, 8, 12, 16 95 + 40 (n 4)/2 n = 4, 8, 12, 16 100 + 40 (n 4)/2 n = 4, 8, 12, 16 15 + 40 (n 2)/2 n = 2, 4, 6, 8 75 + 40 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Replacement Fine Lock Unit Bore size CLA2 40 E Suffix Nil Standard L* Long stroke 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * The lock unit for a longstroke cylinder is only applicable for flange type with bore size 50 to 100 and stroke 1001 or more.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

1000 40 32 10 100 100 1000 Speed (mm/s) Series CH2G/H Load weight for horizontal motion Speed chart (C rod retraction, pressure 14MPa) 10 100 10 Load weight (kg) 80 63 50 m 1000 40 10 100 100 1000 Speed (mm/s) Series CH2G/H Load weight for horizontal motion Speed chart (extension, pressure 14MPa) 10 100 10 Load weight (kg) 80 63 m 50 1000 40 32 10 100 100 1000 Speed (mm/s) 31 Series CH2E

CL

G59F Z73 A54 A33C A34C A44C A59W Y59A Y7P J51 Y59B G39C K39C Y7NW Y7PW Y7BW Y7BA F59F Relay, PLC 100 V Grommet Reed switch Solid state switch Relay, PLC PLC 40 to 100 Yes Yes 100 V, 200 V 12 V 2-wire 24 V PLC 100 V 200 V Terminal conduit 40 to 160 40 to 100 Relay, PLC DIN terminal Diagnostic indication (2-color indication) 40 to 160 40 to 100 Grommet 3-wire (NPN) 3-wire (PNP) 24

MNB

100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-6-7 8 Cylinder with Lock Double Acting, Single Rod Series MNB 32, 40, 50, 63, 80, 100 How