SMC Corporation of America
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Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

200 50 100 50mm/s 20 25 32 40 0 1.0 0 2.0 10 Time [s] Cylinder size [mm] 4.10-2 Series RHC low/medium speed opration with heavy loads 20 , 25 , 32 , 40 Cushion Ring MK/MK2 RSQ/RSG The long cushion ring can absorb larger energy (in terms of speed and weight).

30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39

(100) 71 (71) 44.5 46 16 Reference dimensions after R(PT) thread installation.

double 3 position Ambient and fluid temperature C 10 to 60 (No freezing.)

(Convertible) Standard 0.2 to 1.0 Operating pressure range (MPa) For vacuum 100 kPa to 0.2 Pilot pressure (MPa) 0.2 to 1.0 (Equivalent to the operating pressure or more) Ambient and fluid temperature (C) 10 to 50 (No freezing) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction to axis and right

Information End Lock Cylinder Series CBJ2 / 16 Cylinder stroke (mm) 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer. For types with auto switch, refer to Minimum Strokes for Auto Switch Mounting on page 2.

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

(g) 120 1 1 0 100 90 80 l|AN20002 U1 35 (1.9) .04 (17) NAN3OO-N03 % 60 (3.3) .06 t25) NANtrco+to4 90 (5.0) .08 (35) 60 NAN50(rN0,6 3A 160 (8.8) .36 (165) NAN6OO.NI O 1 27O llsl .46 e25) NAN700+i12 1]4 444 Q4l 1 .87 (4901 Supply pressure: 7l PSI Distance from silencer: NAN200-500-) 31t NAN6O0-7OO+ 6.5fi MN800_900 ,10f1 NANSOO-N,'4 1\h 590 (33) 2.21 (580) NANgOO-N2O 2 960 (53) 3.13 (820) Construction

, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available for special order upon request.

VCHC Connection Female Thread: Rc, NPT, NPTF ASR ASQ Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 3.

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

0.5 70 80 90 1.0 100 80 60 40 20 50 100 150 VAC side pressure (supply pressure) (kPa) Flow rate (l/min) (ANR) SMC Pneumatics, Inc.

Contact capacity 50 VA AC, 50 W DC 1 2 5 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 24 VDC Pressure gauge for supply pressure Pressure gauge for tank pressure Pilot valve Recommended Equipment AIR BLOW Supply pressure AIR It is recommended to use each mist spray unit type with the mixing valves, magnet holders, branch pipes and nylon tubes listed in the table below.

Max. 100 mm (MACM10-50) 100 50 (Stroke) Table center Right/left Table centering accuracy 1 mm or less (Workpiece not loaded) Rotation Forward/backward Angled 3 types of table material can be selected.

/400 100/400 100/400 100/400 100/400 100/400 100/400 100/400 100/100 100/100 100/200 100/200 100/200 100/200 100/200 100/200 100/100 100/100 100/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

32 32 204 10 50 51 100 101 200 200 300 300 4 10 50 51 100 101 Data Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.