Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530 SET SET To measuring mode 10 Series PSE Operation : Pressure Setting Auto preset Channel selection MPa Measuring mode kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE CH1 CH2 CH3 CH4 SET Adsorption verification SET High Suction Auto preset mode Vacuum Work 1 Work 2 Work n OUT1 auto preset preparation Prepare the equipment to be set in this mode. Max.
(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11
(When replacing the piping adapter ZS-46-N, tighten it using the same method.) Piping specification: -01, -N01 After hand tightening, hold the hexagonal spanner flats of the pressure port with a spanner, and tighten with 2 to 3 rotations. As a reference, the tightening torque is 3 to 5 Nm. When tightening, do not hold the pressure switch body with a spanner. or longer simultaneously.
(When replacing the piping adapter ZS-46-N, tighten it using the same method.) Piping specification: -01, -N01 After hand tightening, hold the hexagonal spanner flats of the pressure port with a spanner, and tighten with 2 to 3 rotations. As a reference, the tightening torque is 3 to 5 Nm. When tightening, do not hold the pressure switch body with a spanner. or longer simultaneously.
(When replacing the piping adapter ZS-46-N, tighten it using the same method.) Piping specification: -01, -N01 After hand tightening, hold the hexagonal spanner flats of the pressure port with a spanner, and tighten with 2 to 3 rotations. As a reference, the tightening torque is 3 to 5 Nm.
(When replacing the piping adapter ZS-39-N, tighten it using the same method.) Piping specification: -01, -N01 After hand tightening, hold the hexagonal spanner flats of the pressure port with a spanner, and tighten with 2 to 3 rotations. As a reference, the tightening torque is 3 to 5 Nm. When tightening, do not hold the Z/ISE20 body with a spanner.
Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: Standard, Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: NZ (N + Z)
Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m), Unit Specification: M (SI Unit Only)
Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 01 (1/8), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: B (Assembly of a Bracket & Set Nuts), Semi-Standard: NYZ (N + Y + Z)
Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: BG (B + G), Semi-Standard: NRYZ (N + R + Y + Z)
Unit Size: 7 (75mm), Cup Flange Shape: N (without Flange), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 32 (ø32), Cup Form: B (Bellows), Cup Material: N (NBR), Attachment: with (Guide) Attachment
Unit Size: 7 (75mm), Cup Flange Shape: N (without Flange), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 25 (ø25), Cup Form: B (Bellows), Cup Material: N (NBR), Attachment: with (Guide) Attachment
Body Size: 20, Thread: N (NPT), Port: 01 (1/8), Option: Standard, Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: NZ (N + Z)
Body Size: 20, Thread: N (NPT), Port: 01 (1/8), Option: CE (C + E), Attachment: Standard, Semi-Standard 1: 1C (1 + C), Semi-Standard 2: NZ (N + Z)
Body Size: 20, Thread: N (NPT), Port: 01 (1/8), Option: CE (C + E), Attachment: Standard, Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: NZ (N + Z)